KR100193731B1 - Housing of chemical solution management sensor - Google Patents

Abstract

The present invention relates to a housing for improving the accuracy of the chemical solution management sensor, the chemical solution management sensor housing according to a preferred embodiment of the present invention, the inlet for the chemical solution is introduced, the outlet for discharging the introduced chemical solution, A nut part for connecting the inlet and the outlet with a pipe, a fluid passage communicating with the inlet and the outlet but having a diameter smaller than the diameter of the pipe, and a detection unit of a sensor for measuring pH on the fluid passage may be located. By having a structure including a formed sensor insertion hole and a coupling means for fixing the sensor to the sensor insertion hole, the accuracy is improved when measuring pH, it is easy to install, and there is an effect that can prevent corrosion by chemical solution. .

Description

Housing of chemical solution management sensor

1 is a partial cross-sectional view schematically showing the structure of a conventional chemical solution management sensor housing.

2 is a partial cross-sectional view showing the structure of the chemical solution management sensor housing according to an embodiment of the present invention.

* Explanation of symbols for main parts of the drawings

10: measuring sensor housing 10a: inlet

10b: outlet 10c: sensor insertion opening

12: fluid passage 12a: measuring space

18 connector 20 sensor

22: detection part 50: nut part

60: coupling means 62: nut

64: O-ring 66: O-ring holder

[Industrial use]

The present invention relates to a housing for improving the accuracy of the chemical solution management sensor.

[Private Technology and His Issues]

Generally, equipment using chemicals has been used to transfer the chemical solution from the tank storing the chemical solution to the chamber using the chemical solution or to discharge the chemical solution in the chamber after the process. The pipe should be corrosion resistant to various chemical solutions.

The material of the pipe used for this purpose is usually made of stainless metal and Teflon.

Chemical solution is to use all three components of acid, neutral, alkaline, the material of the tube should be changed according to the components. Metal tubes are used to transport neutral and alkaline solutions, the most commonly used to transport alkaline chemicals.

Metal pipes have a risk of corrosion, so acidic chemical solutions cannot be used. However, equipment used in the semiconductor manufacturing process is more frequently used for acidic chemical solutions.

The housing of the sensor is used to insert a sensor for measuring the flow rate of the chemical solution between the pipes for transferring the chemical solution described above.

1 is a partial cross-sectional view showing the structure of a housing of a conventional management sensor used for the above-described application.

Referring to FIG. 1, the conventional management sensor housing includes an inlet port 10a through which a chemical solution is introduced, an outlet port 10b for discharging the introduced chemical solution, and a communication port between the inlet port 10a and the outlet port 10b. It has a structure including a fluid passage 12, and a sensor insertion opening (10c) formed so that the detection unit 22 of the sensor 20 for measuring the acidity (pH) on the fluid passage 12 can be located.

On the other hand, each of the pipes 100 to be connected to the inner diameter of the inlet (10a) and the outlet (10b) is provided with a male screw portion 14 formed in the inner diameter so that the predetermined length is inserted and screwed. In addition, the sensor insertion hole 10c is fastened with a separate connection pipe 18 so as to prevent the sensor 20 inserted into the sensor insertion hole 10c from being separated and prevent the leakage of the chemical solution at the sensor insertion hole 10c. .

The housing 10 of the chemical solution management sensor having such a structure has a high velocity because the fluid passage 12 through which the chemical solution flows suddenly narrows at a portion (a) where the detection unit 22 of the sensor is located. Since the size of the fluid passage 12 that is connected to the pipe 100 and the chemical solution is introduced into and discharged from the pipe 100 is bubbled, the sensor 20 has a large error in measuring the pH. In addition, since the management sensor housing 10 is made of a metal material having high adsorption of impurities, it is difficult to use for pure chemical solution.

In addition, the sensor 20 has a lot of inconveniences for the operator to work by coupling the separate connecting pipe 18 to the sensor insertion hole (10c) and inserting the sensor 20 into the connecting pipe (18).

[Purpose of invention]

The present invention has been proposed to solve the above problems, and an object of the present invention is to provide a housing of a chemical solution management sensor that can easily and easily install the housing, reducing the influence of flow rate and bubbles causing errors in pH measurement. .

[Configuration of Invention]

According to a feature of the present invention for achieving the above object, the inlet for the chemical solution is introduced, the outlet for discharging the introduced chemical solution, the fluid passage is in communication with the inlet and the outlet, the pH is measured on the fluid passage A chemical solution management sensor housing including a sensor insertion port formed to be positioned to detect a sensor of the sensor, comprising: a nut part for screwing a pipe to the inlet and an outlet, a coupling means for screwing the sensor to the sensor insert; And a fluid passage having a diameter smaller than a diameter of a pipe connected to the inlet, and having an elliptical measuring space formed at a position where the detection unit of the sensor is installed.

In a preferred embodiment of this feature, the nut has an o-ring inserted to prevent leakage of the chemical solution.

In a preferred embodiment of this feature, the coupling means is a nut that is screwed to the sensor insert, the nut is screwed, the one end of the sensor insert is inserted between the nut and the O-ring for preventing leakage of the chemical solution is inserted It includes an O-ring holder.

In a preferred embodiment of this feature, the chemical solution management sensor housing is made of Teflon material.

[Action]

According to the present device having such a configuration, the accuracy of the pH measurement is improved, and easily installed, as well as the leakage of the chemical solution is prevented.

EXAMPLE

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Referring to Figure 2, the chemical solution management sensor housing according to a preferred embodiment of the present invention, the inlet and outlet communicate with the fluid passage having a diameter smaller than the diameter of the pipe, and measuring the pH on the fluid passage Coupling means for fixing the sensor to the sensor insertion opening formed so that the detection unit of the sensor, and an elliptical measuring space on the fluid passage in which the detection unit of the sensor is located. By this device, the accuracy of the pH measurement is improved, and it is easy to install as well as to prevent the leakage of chemical solution.

2 is a view showing the overall structure of the chemical solution management sensor housing according to a preferred embodiment of the present invention, the same reference numerals for components that perform the same function as the components of the chemical solution management sensor housing shown in FIG. Staging.

2 is a partial cross-sectional view of the housing of the chemical solution management sensor according to a preferred embodiment of the present invention connected to the pipe.

In Figure 2, the chemical solution management sensor housing according to a preferred embodiment of the present invention, the inlet port (10a) through which the chemical solution is introduced, the outlet port (10b) for discharging the introduced chemical solution, and the inlet (10a) and Nut part 50 for connecting the outlet 10b and the pipe 100, the inlet 10a and the outlet 10b is in communication with the fluid passage 12 having a diameter smaller than the diameter of the pipe 100 and A sensor insertion hole 10c formed to allow the detection unit 22 of the sensor 20 to measure pH on the fluid passage 12, and to fix the sensor 20 to the sensor insertion hole 10c. Coupling means 60 has a structure formed.

Chemical solution management sensor housing having such a structure (10), the both ends of the pipe 100 to be connected to the inlet port (10a) and the outlet port (10b) by screwing the nut portion 50, the sensor insertion opening (10c) In the state in which the sensor 20 is inserted into the coupling member 60 to fix the sensor 20 inserted into the sensor insertion hole 10c so as not to be detached and to prevent leakage of the chemical solution at the sensor insertion hole 10c. Tighten.

The chemical solution management sensor housing installed in this way, the chemical solution is introduced from the pipe 100 connected to the inlet (10a) to pass through the fluid passage (12). Thereafter, the chemical solution flows through the measurement space 12a formed in an elliptical shape on the fluid passage 12 to the outlet 10b.

On the other hand, by forming the measuring space 12a of the fluid passage 12 in which the detection unit 22 of the sensor is deep and wide, the flow of the chemical solution is temporarily slowed down and the generation of bubbles is reduced.

In addition, the sensor insertion hole (10c) does not need a separate connection pipe can be easily installed during installation, the housing is made of Teflon material can reduce the contamination due to corrosion inside the housing.

[Effects of the Invention]

According to the conventional chemical solution management sensor housing, the flow rate of the detection part of the sensor is fast, the accuracy of the pH measurement due to the foaming is reduced, as well as by inserting the sensor by installing a separate connection pipe and contamination by corrosion of the housing There was discomfort during work.

The present invention proposed to solve this problem, the inlet and outlet are in communication with the fluid passage having a diameter smaller than the diameter of the pipe and formed so that the detection portion of the sensor for measuring the pH on the fluid passage can be located Coupling means for fixing the sensor to the sensor insertion opening, and the elliptical measuring space on the fluid passage in which the detector of the sensor is located.

Therefore, the accuracy of the pH measurement is improved, there is an advantage that can be easily installed as well as to prevent corrosion by chemical solutions.

Claims (4)

An inlet 10a through which the chemical solution is introduced, an outlet 10b for discharging the introduced chemical solution, a fluid passage 12 through which the inlet and the outlet communicate, and a sensor for measuring pH on the fluid passage. In the chemical solution management sensor housing including a sensor insertion opening (10c) formed so that the detection unit 22 can be located, the nut portion 50 for screwing the pipe 100 to the inlet (10a) and outlet (10b) And a coupling means 60 for screwing the sensor 20 to the sensor insertion hole 10c, and a diameter smaller than the diameter of the pipe 100 connected to the inlet port 10a. Chemical solution management sensor housing, characterized in that it comprises a fluid passage (12) is formed in the elliptical measuring space (12a) at the position where the 22 is installed. The chemical solution management sensor housing according to claim 1, wherein the nut part (50) has an o-ring (52) inserted therein to prevent leakage of the chemical solution. The method of claim 1, wherein the coupling means 60 is sandwiched between the nut 62 is screwed to the sensor insertion hole (10c), and one end of the sensor insertion hole (10c) and the nut 62, the leakage of the chemical solution Chemical solution management sensor housing, characterized in that it comprises an O-ring holder 66 is inserted to prevent the O-ring (64). The chemical solution management sensor housing according to claim 1, wherein the chemical solution management sensor housing is made of Teflon material.