KR100189737B1 - Exhaust apparatus - Google Patents

Abstract

The present invention is to prevent the inlet of the main exhaust pipe connected to the storage tank due to the deposition of the chemical, to install a second solvent supply pipe between the solvent tank and the first solvent supply pipe and to supply the solvent by connecting it to the inlet of the main exhaust pipe, In addition, the first solenoid valve and the second solenoid valve is electrically connected to operate at the same time at the same signal, that is to say that the chemical supply to the chemical supply pipe at the same time the solvent is supplied to the solvent reaction tank and the main exhaust pipe inlet.

Description

Exhaust system

1 is a system diagram for explaining a conventional exhaust device,

2 is a schematic diagram illustrating the exhaust system of the present invention.

* Explanation of symbols for main parts of the drawings

10, 30: 1st air pipe 11, 31: 1st solenoid valve

12, 32: nozzle 13, 33: chemical supply pipe

14, 34: 1st air valve 15, 35: 2nd air pipe

16, 36: second solenoid valve 17: solvent supply pipe

37: the first solvent supply pipe 18, 38: flow meter

19, 39: second air valve 20, 40: secondary exhaust pipe

21, 41: solvent reaction tank 22, 42: main exhaust pipe

43: second solvent supply pipe 44: the second flow meter

45: third air valve 46: third air pipe

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust device, and in particular, when depositing a PIQ COATING LAYER on a wafer, the deposition of an aluminum chelate (ALUMINUM-CHELATE) sprayed on the wafer to make the deposition more favorable The present invention relates to an exhaust device suitable for preventing the blockage of the exhaust pipe inlet.

A thermosetting resin, PIQ (POLYIMIDE-ISOINDROQUINAZORINE-DIONE COATING LAYER), is an alpha particle (α-PARTICLE) protection layer that protects devices formed on the wafer. SAWING) is used to protect the device by depositing this coating on the wafer prior to the process.

At this time, by applying the aluminum chelate (ALUMINUM-CHELATE) helps to deposit a better P coating coating on the wafer, but the aluminum chelate has a property of depositing and depositing, so as to dissolve the deposited aluminum chelate Use thinners as materials.

Here, aluminum-chelate is referred to as a chemical for convenience, and a substance that dissolves aluminum-chelate such as thinner is called a solvent.

1 is a schematic diagram illustrating a conventional exhaust apparatus, which will be described below with reference to the accompanying drawings.

As shown in FIG. 1, the conventional exhaust device is installed in the first air pipe 10, the second air pipe 15, and the first air pipe 10 connected to an air tank. 10) a first solenoid valve 11 for controlling supply and shutoff of air in the air and a first air pipe 10 to control air velocity in the first air pipe 10; The speed adjusting part, the solvent tank on one side and the chemical supply pipe 13 connected to the nozzle (NOZZLE) 12 on the other side, and the chemical supply pipe 13, the first driven by the control of the first speed control unit Installed in the air valve 14 and the second air pipe 15, and installed in the second solenoid valve 16 and the second air pipe 15 to regulate the supply and shut off of the air in the second air pipe 15. And a second speed control unit for controlling the air speed in the second air pipe 15, a solvent supply pipe 17 having a solvent tank connected to one side, and a solvent supply pipe 17 installed in the solvent supply pipe 17. Flux of solvent Installed in the flow meter 18 and the solvent supply pipe 17 to adjust the second air valve 19 driven by the control of the second speed control unit and one side is connected to the solvent supply pipe 17, the lower end of the secondary pipe ( Solvent reaction tank 21 and the secondary exhaust pipe 20 is installed is 20, the upper end is composed of the main exhaust pipe 22 and the storage tank installed on the lower end of the main exhaust pipe 22 formed by connecting the reaction chamber.

Referring to the operation of the conventional exhaust device is as follows.

First, air is supplied to the first air pipe 10 and the second air pipe 15 installed in the air tank, and the air supply and the shutoff of the air are the first solenoid valve 11 and the second solenoid valve 16, respectively. In addition, the speed of the air is controlled by the first speed control unit and the second speed control unit, respectively, the first solenoid valve 11, the first speed control unit and the second solenoid valve 16 and the second speed control, respectively. The first air valve 14 and the second air valve 19 are turned on according to the speed or the amount of air controlled through the unit, so that the chemical and the solvent are supplied to the chemical supply pipe 13 and the solvent supply pipe 17. do.

Here, the first air valve 14 and the second air according to the speed or amount of air controlled through the first solenoid valve 11, the first speed regulating unit, the second solenoid valve 16, and the second speed regulating unit. The degree of opening of the valve 19 is changed, and as a result, the amount of chemical and the amount of solvent supplied to the chemical supply pipe 13 and the solvent supply pipe 17 are different.

As the first air valve 14 is opened by the control of the first solenoid valve 11, the chemical supplied into the chemical supply pipe 13 is injected through the nozzle 12, and the nozzle 12 is in process. At the time, the chemical is sprayed onto the rotating wafer seated on the wafer chuck in the reaction chamber, and the exhaust of the chemical is exhausted through the main exhaust pipe 22 and temporarily stored in the storage tank.

When the process does not proceed, the nozzle 12 is waited in the solvent reaction tank 21, and the chemical is periodically sprayed through the waiting nozzle 12 to prevent the inlet of the nozzle 12 from being deposited by the chemical. do.

In addition, as the second air valve 19 installed in the solvent supply pipe 17 is opened, the solvent is supplied to the solvent reaction tank 21 through the solvent supply pipe 17 to dissolve the chemical sprayed from the nozzle 12 in the air. This prevents the secondary exhaust pipe 20 installed at the bottom of the solvent reaction tank 12 from being blocked.

The solvent and the chemical in the solvent reaction tank 12 is exhausted through the secondary exhaust pipe 20 and temporarily stored in a storage tank installed at the lower end of the main exhaust pipe 22.

However, in the conventional exhaust system, the chemicals exhausted from the solvent reaction tank and the reaction chamber, and the inlet of the main exhaust pipe connected to the storage tank due to the solvent reacted with the chemical are blocked by the chemical, so that the exhaust gas to the storage tank is not smooth. do.

SUMMARY OF THE INVENTION The present invention has been made to solve this problem, and an object of the present invention is to provide an exhaust device that improves the blockage of a main exhaust pipe inlet connected to a storage tank due to chemicals.

According to the present invention, a second solvent supply pipe is installed between the solvent tank and the solvent supply pipe, and one end of the second solvent supply pipe is connected to the inlet of the main exhaust pipe to supply the solvent, and the first solenoid valve and the second solenoid valve are electrically connected to each other. The present invention relates to an exhaust system which prevents the inlet of the main exhaust pipe from being blocked by the chemical by supplying the chemical to the reaction chamber or the solvent reaction tank and simultaneously supplying the solvent to the solvent reaction tank and the main exhaust pipe inlet by connecting and operating the same signal at the same time. .

2 is a communication path for explaining the exhaust device of the present invention, with reference to the accompanying drawings will be described with respect to the exhaust device of the present invention.

As shown in FIG. 2, the exhaust device of the present invention is installed in the first air pipe 30 and the second air pipe 35 and the first air pipe 30 connected to the air tank to control supply and interruption of air. Chemical supply pipe 33 is installed in the first solenoid valve 31, the first air pipe 30, the first speed control unit for controlling the air speed and one end of the chemical tank is connected to the other end nozzle (32) And the first air valve 34 and the second air pipe 35 driven by the control of the first solenoid valve 31 and the first speed regulating unit. It is installed in the second solenoid valve 36 and the second air pipe 35 to control the supply and shutoff, the second speed control unit for controlling the air speed, and the first solvent supply pipe 37 connected to the solvent tank on one side And a flow meter (38) provided in the first solvent supply pipe (37) for adjusting the flow rate of the solvent, and provided in the first solvent supply pipe (37), and the second solenoid valve (36). The second air valve 39 driven by the control of the two-speed control unit and the first solvent supply pipe 37 is connected to one side, the solvent reaction tank 41 is provided with a secondary exhaust pipe 40 at the lower end, and the secondary exhaust pipe at one side 40 is connected, the upper end of the main exhaust pipe 42 is formed by connecting the reaction chamber, the storage tank installed on the lower end of the main exhaust pipe 42, and the chemical removal means formed at the inlet of the main exhaust pipe 42 connected to the storage tank Is done.

In this case, the chemical removing means is provided in the third air pipe 46 and the third air pipe 46 connected to the second air pipe 35 between the second solenoid valve 36 and the second speed control part. , The third speed control unit for controlling the air speed, the second flow meter 38 for adjusting the flow rate of the solvent, the third air valve 45 driven by the control of the second solenoid valve 36 and the third speed control unit. And a second solvent supply pipe 43 provided with a second flow meter 38 and a third air valve 45.

The first solenoid valve 31 and the second solenoid valve 36 are connected to each other so as to be operated simultaneously as an electrical signal.

That is, in the exhaust device of the present invention, when the process does not proceed, that is, when the nozzle 32 into which the chemical is injected is waiting in the solvent reaction tank 41, the nozzle 32 periodically performed in the solvent reaction tank 41 is removed. Along with chemical spraying, solvents are also supplied.

First, when periodically supplying the chemical through the nozzle 32, the first solenoid valve 31 and the second solenoid valve 36 are turned on at the same time through the chemical supply pipe 33 and the first solvent supply pipe 37, respectively After the chemical and the solvent are simultaneously supplied into the reaction tank 41, the first solenoid valve 31 and the second solenoid valve 36 are simultaneously turned off, respectively, through the chemical supply pipe 33 and the first solvent supply pipe 37. Chemical and solvent supplies are shut off.

In addition, during the process, the nozzle 32 is positioned in the upper part of the reaction chamber, and the chemical is injected into the rotating wafer seated on the wafer chuck and exhausted to the main exhaust pipe 42. At this time, the solvent is also supplied with the chemical supply.

That is, the first solenoid valve 31 and the second solenoid valve 36 are turned on at the same time, so that the chemical is connected to the reaction chamber through the chemical supply pipe 33 and the solvent is connected to the storage tank through the second solvent supply pipe 43. It is supplied to the inlet of the main exhaust pipe 42, and when the process is completed, the first solenoid valve 31 and the second solenoid valve 36 are turned off at the same time through the chemical supply pipe 33 and the second solvent supply pipe 43, respectively. Chemical and solvent supplies are shut off.

In the conventional exhaust system, the chemicals exhausted from the solvent reaction tank and the reaction chamber, and the inlet of the main exhaust pipe connected to the storage tank due to the solvent reacted with the chemical are blocked by the chemical, causing the exhaust gas to the storage tank not to be smooth. Accordingly, in order to improve this, in the present invention, by supplying a solvent to the inlet of the main exhaust pipe, the chemical deposited on the inlet of the main exhaust pipe connected to the storage tank is removed, and the first solenoid valve and the second solenoid valve are electrically connected at the same time. The signal can be turned on and off so that the chemical is supplied to the chemical supply pipe while the solvent is supplied to the solvent reaction tank and the inlet of the main exhaust pipe connected to the storage tank.

Therefore, in the exhaust device of the present invention, it is possible to prevent the clogging of the exhaust pipe inlet due to the deposition of chemical aluminum chelate.

Claims (3)

A first air pipe connected to an air tank, a second air pipe, a first solenoid valve installed at the first air pipe to regulate supply and interruption of air in the first air pipe, and to the first air pipe. Is installed, the first speed control unit for controlling the air speed in the first air pipe and a chemical tank at one end and a chemical supply pipe connected to the nozzle at one end, and is installed in the chemical supply pipe, the control of the first speed control unit A first air valve driven by the second air pipe, a second solenoid valve installed in the second air pipe to regulate supply and interruption of air in the second air pipe, and a second air pipe installed in the second air pipe. A second speed control unit for controlling the air speed in the two air pipes, a first solvent supply pipe connected to the solvent tank on one side, a flow meter installed in the solvent supply pipe, to adjust the flow rate of the solvent in the solvent supply pipe, and the solvent Supply pipe Is installed, the second air valve driven by the control of the second speed control unit, and the first solvent supply pipe is connected to one side, the lower end of the solvent reaction tank is installed with a secondary exhaust pipe, the secondary exhaust pipe is connected, In the exhaust device comprising a main exhaust pipe formed by connecting the reaction chamber, and the storage tank installed on the lower end of the main exhaust pipe, the chemical at the inlet of the main exhaust pipe to remove the chemical deposited on the inlet of the main exhaust pipe connected to the storage tank An exhaust device, characterized in that the removal means is added. The method of claim 1, wherein the chemical removing means is installed in the third air pipe and the third air pipe connected between the second solenoid valve and the second speed control unit formed in the second air pipe, A third speed control unit for controlling the air speed in the third air pipe, one end of which is connected to a first solvent supply pipe, and another end of which is connected to an inlet of the main exhaust pipe connected to the storage tank; A second flow rate meter installed in the second solvent supply pipe to adjust the flow rate of the solvent in the second solvent supply pipe, and a second air valve installed in the second solvent supply pipe and driven by the control of the third speed regulating unit; An exhaust device, characterized in that consisting of. The method of claim 1, wherein the first solenoid valve and the second solenoid valve is connected to operate at the same time by an electrical signal, so that the chemical is supplied to the chemical supply pipe at the same time the solvent is the solvent reaction tank and the main exhaust pipe Exhaust device, characterized in that it is supplied to the inlet of.