JPWO2025142647A1 - - Google Patents

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Publication number
JPWO2025142647A1
JPWO2025142647A1 JP2025529781A JP2025529781A JPWO2025142647A1 JP WO2025142647 A1 JPWO2025142647 A1 JP WO2025142647A1 JP 2025529781 A JP2025529781 A JP 2025529781A JP 2025529781 A JP2025529781 A JP 2025529781A JP WO2025142647 A1 JPWO2025142647 A1 JP WO2025142647A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2025529781A
Other languages
Japanese (ja)
Other versions
JP7786648B2 (ja
JPWO2025142647A5 (https=
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Publication of JPWO2025142647A1 publication Critical patent/JPWO2025142647A1/ja
Publication of JPWO2025142647A5 publication Critical patent/JPWO2025142647A5/ja
Application granted granted Critical
Publication of JP7786648B2 publication Critical patent/JP7786648B2/ja
Active legal-status Critical Current
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Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/08Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
    • C08F290/14Polymers provided for in subclass C08G
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP2025529781A 2023-12-26 2024-12-17 感光性樹脂組成物、硬化物および半導体装置 Active JP7786648B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023219175 2023-12-26
JP2023219175 2023-12-26
PCT/JP2024/044654 WO2025142647A1 (ja) 2023-12-26 2024-12-17 感光性樹脂組成物、硬化物および半導体装置

Publications (3)

Publication Number Publication Date
JPWO2025142647A1 true JPWO2025142647A1 (https=) 2025-07-03
JPWO2025142647A5 JPWO2025142647A5 (https=) 2025-11-26
JP7786648B2 JP7786648B2 (ja) 2025-12-16

Family

ID=96217730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025529781A Active JP7786648B2 (ja) 2023-12-26 2024-12-17 感光性樹脂組成物、硬化物および半導体装置

Country Status (3)

Country Link
JP (1) JP7786648B2 (https=)
TW (1) TW202542647A (https=)
WO (1) WO2025142647A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018070829A (ja) * 2016-11-02 2018-05-10 東レ株式会社 樹脂組成物

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102371148B1 (ko) * 2016-09-09 2022-03-08 도레이 카부시키가이샤 수지 조성물
JPWO2022270541A1 (https=) * 2021-06-25 2022-12-29
JPWO2024095884A1 (https=) * 2022-10-31 2024-05-10
TWI909442B (zh) * 2023-05-10 2025-12-21 日商旭化成股份有限公司 負型感光性樹脂組合物及硬化浮凸圖案之製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018070829A (ja) * 2016-11-02 2018-05-10 東レ株式会社 樹脂組成物

Also Published As

Publication number Publication date
TW202542647A (zh) 2025-11-01
WO2025142647A1 (ja) 2025-07-03
JP7786648B2 (ja) 2025-12-16

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