JPWO2025079493A1 - - Google Patents
Info
- Publication number
- JPWO2025079493A1 JPWO2025079493A1 JP2025511362A JP2025511362A JPWO2025079493A1 JP WO2025079493 A1 JPWO2025079493 A1 JP WO2025079493A1 JP 2025511362 A JP2025511362 A JP 2025511362A JP 2025511362 A JP2025511362 A JP 2025511362A JP WO2025079493 A1 JPWO2025079493 A1 JP WO2025079493A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023176717 | 2023-10-12 | ||
| PCT/JP2024/035427 WO2025079493A1 (ja) | 2023-10-12 | 2024-10-03 | モリブデンを含む粉末およびターゲット |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2025079493A1 true JPWO2025079493A1 (https=) | 2025-04-17 |
Family
ID=95395302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025511362A Pending JPWO2025079493A1 (https=) | 2023-10-12 | 2024-10-03 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2025079493A1 (https=) |
| WO (1) | WO2025079493A1 (https=) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005314714A (ja) * | 2004-04-27 | 2005-11-10 | Japan New Metals Co Ltd | スパッタリング用高純度金属Ｍｏ焼結ターゲットの製造に原料粉末として用いるのに適した高純度金属Ｍｏ粗粒粉末 |
| WO2019176962A1 (ja) * | 2018-03-13 | 2019-09-19 | Ｊｘ金属株式会社 | スパッタリングターゲット及び、スパッタリングターゲットの製造方法 |
| WO2023063204A1 (ja) * | 2021-10-13 | 2023-04-20 | 株式会社アライドマテリアル | モリブデンを含む粉末 |
-
2024
- 2024-10-03 JP JP2025511362A patent/JPWO2025079493A1/ja active Pending
- 2024-10-03 WO PCT/JP2024/035427 patent/WO2025079493A1/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005314714A (ja) * | 2004-04-27 | 2005-11-10 | Japan New Metals Co Ltd | スパッタリング用高純度金属Ｍｏ焼結ターゲットの製造に原料粉末として用いるのに適した高純度金属Ｍｏ粗粒粉末 |
| WO2019176962A1 (ja) * | 2018-03-13 | 2019-09-19 | Ｊｘ金属株式会社 | スパッタリングターゲット及び、スパッタリングターゲットの製造方法 |
| WO2023063204A1 (ja) * | 2021-10-13 | 2023-04-20 | 株式会社アライドマテリアル | モリブデンを含む粉末 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2025079493A1 (ja) | 2025-04-17 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250220 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20260324 |
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| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20260423 |