JPWO2024210104A1 - - Google Patents
Info
- Publication number
- JPWO2024210104A1 JPWO2024210104A1 JP2025513129A JP2025513129A JPWO2024210104A1 JP WO2024210104 A1 JPWO2024210104 A1 JP WO2024210104A1 JP 2025513129 A JP2025513129 A JP 2025513129A JP 2025513129 A JP2025513129 A JP 2025513129A JP WO2024210104 A1 JPWO2024210104 A1 JP WO2024210104A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
- H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023060165 | 2023-04-03 | ||
| PCT/JP2024/013504 WO2024210104A1 (ja) | 2023-04-03 | 2024-04-01 | イオン発生装置、イオンビーム照射装置およびイオン取り出し方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024210104A1 true JPWO2024210104A1 (https=) | 2024-10-10 |
Family
ID=92971789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025513129A Pending JPWO2024210104A1 (https=) | 2023-04-03 | 2024-04-01 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2024210104A1 (https=) |
| WO (1) | WO2024210104A1 (https=) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8907300B2 (en) * | 2013-03-14 | 2014-12-09 | Varian Semiconductor Equipment Associates, Inc. | System and method for plasma control using boundary electrode |
| JP6942347B2 (ja) * | 2018-02-09 | 2021-09-29 | 国立研究開発法人量子科学技術研究開発機構 | イオン源装置、粒子線発生装置、およびイオンビーム生成方法 |
-
2024
- 2024-04-01 WO PCT/JP2024/013504 patent/WO2024210104A1/ja not_active Ceased
- 2024-04-01 JP JP2025513129A patent/JPWO2024210104A1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024210104A1 (ja) | 2024-10-10 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20250626 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20250626 |