JPWO2024142970A5 - - Google Patents

Info

Publication number
JPWO2024142970A5
JPWO2024142970A5 JP2024567471A JP2024567471A JPWO2024142970A5 JP WO2024142970 A5 JPWO2024142970 A5 JP WO2024142970A5 JP 2024567471 A JP2024567471 A JP 2024567471A JP 2024567471 A JP2024567471 A JP 2024567471A JP WO2024142970 A5 JPWO2024142970 A5 JP WO2024142970A5
Authority
JP
Japan
Prior art keywords
light
illuminance distribution
control unit
changes
illuminated surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024567471A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024142970A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/044847 external-priority patent/WO2024142970A1/ja
Publication of JPWO2024142970A1 publication Critical patent/JPWO2024142970A1/ja
Publication of JPWO2024142970A5 publication Critical patent/JPWO2024142970A5/ja
Pending legal-status Critical Current

Links

JP2024567471A 2022-12-27 2023-12-14 Pending JPWO2024142970A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022210527 2022-12-27
PCT/JP2023/044847 WO2024142970A1 (ja) 2022-12-27 2023-12-14 照明光学系、露光装置、及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JPWO2024142970A1 JPWO2024142970A1 (https=) 2024-07-04
JPWO2024142970A5 true JPWO2024142970A5 (https=) 2025-08-05

Family

ID=91717328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024567471A Pending JPWO2024142970A1 (https=) 2022-12-27 2023-12-14

Country Status (6)

Country Link
US (1) US20250321497A1 (https=)
JP (1) JPWO2024142970A1 (https=)
KR (1) KR20250110883A (https=)
CN (1) CN120457390A (https=)
TW (1) TW202431029A (https=)
WO (1) WO2024142970A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629189A (ja) * 1992-07-13 1994-02-04 Hitachi Ltd 投影式露光装置およびその方法並びに照明光学装置
JP2001297959A (ja) * 2000-04-11 2001-10-26 Nikon Corp 照明装置及び露光装置
JPWO2005062350A1 (ja) * 2003-12-19 2008-04-17 株式会社ニコン 光束変換素子、露光装置、照明光学系及び露光方法
JP2009258551A (ja) * 2008-04-21 2009-11-05 Nikon Corp 照明装置、露光装置、露光方法及びデバイス製造方法
JP2013201372A (ja) * 2012-03-26 2013-10-03 Nikon Corp 露光装置、露光方法及びデバイス製造方法
JP6651124B2 (ja) 2015-03-28 2020-02-19 株式会社ニコン 照明光学系、露光装置、およびデバイス製造方法

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