JPWO2023248355A5 - - Google Patents
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- JPWO2023248355A5 JPWO2023248355A5 JP2024528155A JP2024528155A JPWO2023248355A5 JP WO2023248355 A5 JPWO2023248355 A5 JP WO2023248355A5 JP 2024528155 A JP2024528155 A JP 2024528155A JP 2024528155 A JP2024528155 A JP 2024528155A JP WO2023248355 A5 JPWO2023248355 A5 JP WO2023248355A5
- Authority
- JP
- Japan
- Prior art keywords
- conformity
- learning
- model
- unit
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 24
- 238000011156 evaluation Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000013480 data collection Methods 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000004075 alteration Effects 0.000 claims 1
- 238000011017 operating method Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/024750 WO2023248355A1 (ja) | 2022-06-21 | 2022-06-21 | 不適合検出装置、および、不適合検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023248355A1 JPWO2023248355A1 (https=) | 2023-12-28 |
| JPWO2023248355A5 true JPWO2023248355A5 (https=) | 2025-02-19 |
Family
ID=89379603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024528155A Pending JPWO2023248355A1 (https=) | 2022-06-21 | 2022-06-21 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20250356476A1 (https=) |
| JP (1) | JPWO2023248355A1 (https=) |
| KR (1) | KR20240163122A (https=) |
| CN (1) | CN119317938A (https=) |
| TW (2) | TW202507649A (https=) |
| WO (1) | WO2023248355A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2025177678A (ja) * | 2024-05-24 | 2025-12-05 | 浜松ホトニクス株式会社 | 学習方法、推論モデル、ノイズ低減方法、ノイズ低減システム及びノイズ低減プログラム |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7190842B2 (ja) * | 2017-11-02 | 2022-12-16 | キヤノン株式会社 | 情報処理装置、情報処理装置の制御方法及びプログラム |
| JP7122625B2 (ja) * | 2018-07-02 | 2022-08-22 | パナソニックＩｐマネジメント株式会社 | 学習データ収集装置、学習データ収集システム、及び学習データ収集方法 |
| EP3618077A1 (en) * | 2018-08-27 | 2020-03-04 | Koninklijke Philips N.V. | Generating metadata for trained model |
| KR102654003B1 (ko) * | 2018-12-21 | 2024-04-04 | 주식회사 히타치하이테크 | 화상 인식 장치 및 방법 |
| CN114245933B (zh) * | 2019-09-06 | 2025-11-18 | 株式会社日立高新技术 | 制程信息提示系统、制程错误推定系统 |
| JPWO2021095256A1 (https=) * | 2019-11-15 | 2021-05-20 | ||
| US11544838B2 (en) * | 2020-03-21 | 2023-01-03 | Kla Corporation | Systems and methods of high-resolution review for semiconductor inspection in backend and wafer level packaging |
| US12051183B2 (en) * | 2020-04-30 | 2024-07-30 | KLA Corp. | Training a machine learning model to generate higher resolution images from inspection images |
| US11769242B2 (en) * | 2020-05-21 | 2023-09-26 | Kla Corporation | Mode selection and defect detection training |
| US11776108B2 (en) * | 2020-08-05 | 2023-10-03 | KLA Corp. | Deep learning based defect detection |
| CN114095662B (zh) * | 2022-01-20 | 2022-07-05 | 荣耀终端有限公司 | 拍摄指引方法及电子设备 |
-
2022
- 2022-06-21 WO PCT/JP2022/024750 patent/WO2023248355A1/ja not_active Ceased
- 2022-06-21 CN CN202280096731.3A patent/CN119317938A/zh active Pending
- 2022-06-21 KR KR1020247034296A patent/KR20240163122A/ko active Pending
- 2022-06-21 US US18/872,877 patent/US20250356476A1/en active Pending
- 2022-06-21 JP JP2024528155A patent/JPWO2023248355A1/ja active Pending
-
2023
- 2023-05-18 TW TW113137128A patent/TW202507649A/zh unknown
- 2023-05-18 TW TW112118457A patent/TWI856660B/zh active
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