JPWO2023190244A5 - - Google Patents

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Publication number
JPWO2023190244A5
JPWO2023190244A5 JP2023550661A JP2023550661A JPWO2023190244A5 JP WO2023190244 A5 JPWO2023190244 A5 JP WO2023190244A5 JP 2023550661 A JP2023550661 A JP 2023550661A JP 2023550661 A JP2023550661 A JP 2023550661A JP WO2023190244 A5 JPWO2023190244 A5 JP WO2023190244A5
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JP
Japan
Prior art keywords
recess
main surface
circuit board
metal
ceramic plate
Prior art date
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Pending
Application number
JP2023550661A
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Japanese (ja)
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JPWO2023190244A1 (en
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Priority claimed from PCT/JP2023/011995 external-priority patent/WO2023190244A1/en
Publication of JPWO2023190244A1 publication Critical patent/JPWO2023190244A1/ja
Publication of JPWO2023190244A5 publication Critical patent/JPWO2023190244A5/ja
Pending legal-status Critical Current

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Claims (10)

セラミック板と、金属板と、前記セラミック板の主面と前記金属板の主面とを接合するろう材層と、を備える回路基板であって、
前記金属板の前記主面の外縁の少なくとも一部に沿って前記金属板に凹部が形成されており、
前記金属板の側面における前記凹部の端縁に直交し、前記金属板の厚さ方向に沿う断面で見たときに、前記凹部の幅Xが0.mm以下であ
前記凹部を構成する前記金属板の壁面の入隅部が前記ろう材層で覆われている、回路基板。
A circuit board comprising a ceramic plate, a metal plate, and a brazing material layer that joins the main surface of the ceramic plate and the main surface of the metal plate,
A recess is formed in the metal plate along at least a part of the outer edge of the main surface of the metal plate,
When viewed in a cross section perpendicular to the edge of the recess on the side surface of the metal plate and along the thickness direction of the metal plate, the width X of the recess is 0. 5 mm or less ,
A circuit board , wherein an inner corner of a wall surface of the metal plate constituting the recess is covered with the brazing material layer .
記断面で見たときに、前記入隅部を覆う前記ろう材層が、前記入隅部から前記凹部の前記端縁に近づくにつれて前記セラミック板の前記主面から離れるように傾斜する傾斜部を有する、請求項1に記載の回路基板。 When viewed in cross section, the brazing material layer covering the corner is inclined away from the main surface of the ceramic plate as it approaches the edge of the recess from the corner. The circuit board according to claim 1, comprising: 前記金属板における前記凹部は、前記金属板の前記主面の外縁の全周にわたって形成されている、請求項1に記載の回路基板。 The circuit board according to claim 1, wherein the recess in the metal plate is formed around the entire outer edge of the main surface of the metal plate. 前記断面において、前記凹部の高さZが0.1mm以上である、請求項1に記載の回路基板。 The circuit board according to claim 1, wherein the height Z of the recessed portion in the cross section is 0.1 mm or more. 前記断面において、前記凹部の幅Xが0.05~0.mm、及び、前記凹部の高さZが0.05~0.4mmである、請求項1に記載の回路基板。 In the cross section, the width X of the recess is 0.05 to 0. The circuit board according to claim 1 , wherein the height Z of the recess is 0.05 to 0.4 mm. 前記断面における前記凹部の投影面積が0.001~0.35mmである、請求項1に記載の回路基板。 The circuit board according to claim 1, wherein the projected area of the recess in the cross section is 0.001 to 0.35 mm 2 . セラミック板と、複数の金属板と、前記セラミック板の主面と前記複数の金属板の主面のそれぞれとを接合する複数のろう材層と、を備え、
前記複数の金属板の少なくとも一つに前記凹部が形成されている、請求項1に記載の回路基板。
A ceramic plate, a plurality of metal plates, and a plurality of brazing filler metal layers bonding the main surface of the ceramic plate and the main surface of the plurality of metal plates,
The circuit board according to claim 1, wherein the recess is formed in at least one of the plurality of metal plates.
一方の主面の外縁の少なくとも一部に沿って凹部が形成されている一つ又は複数の金属板を準備する準備工程と、
セラミック板の主面にろう材を塗布及び乾燥して一つ又は複数の塗布層を設ける塗布乾燥工程と、
前記一つ又は複数の塗布層を挟むようにして前記セラミック板と前記一つ又は複数の金属板とを積層して積層体を作製する積層工程と、
前記積層体を加熱して前記セラミック板と前記一つ又は複数の金属板とが一つ又は複数のろう材層で接合された接合体を得る接合工程と、を有し、
前記金属板の側面における前記凹部の端縁に直交し、前記一つ又は複数の金属板の厚さ方向に沿う断面で見たときに、前記凹部の幅Xが0.mm以下であり、前記凹部を構成する前記金属板の壁面の入隅部が前記ろう材層で覆われており、
前記積層工程において、前記一つ又は複数の金属板の前記一方の主面と前記セラミック板の前記主面とが対向するように前記セラミック板と前記一つ又は複数の金属板とを積層する、回路基板の製造方法。
a preparation step of preparing one or more metal plates in which a recess is formed along at least a part of the outer edge of one main surface;
a coating and drying step of applying and drying a brazing material on the main surface of the ceramic plate to form one or more coating layers;
a laminating step of laminating the ceramic plate and the one or more metal plates so as to sandwich the one or more coating layers to produce a laminate;
a joining step of heating the laminate to obtain a joined body in which the ceramic plate and the one or more metal plates are joined with one or more brazing metal layers,
When viewed in a cross section perpendicular to the edge of the recess on the side surface of the metal plate and along the thickness direction of the one or more metal plates, the width X of the recess is 0. 5 mm or less, and an inner corner of the wall surface of the metal plate constituting the recess is covered with the brazing material layer,
In the laminating step, the ceramic plate and the one or more metal plates are laminated so that the one main surface of the one or more metal plates and the main surface of the ceramic plate face each other. Method of manufacturing circuit boards.
前記準備工程では前記凹部が形成されている複数の金属板を準備し、
前記積層工程では、前記複数の金属板のそれぞれが、前記セラミック板の前記主面における区画線で画定される区画領域毎に独立して設けられた前記積層体を作製し、
前記接合工程の後に、前記接合体における前記セラミック板を前記区画線に沿って分割する分割工程を有する、請求項8に記載の回路基板の製造方法。
In the preparation step, a plurality of metal plates in which the recesses are formed are prepared,
In the laminating step, the laminated body is manufactured in which each of the plurality of metal plates is provided independently for each partition area defined by a partition line on the main surface of the ceramic plate,
9. The method for manufacturing a circuit board according to claim 8, further comprising a dividing step of dividing the ceramic plate in the joined body along the division line after the joining step.
請求項1~7のいずれか一項に記載の回路基板と、当該回路基板の前記金属板に電気的に接続される半導体素子と、を備えるパワーモジュール。 A power module comprising the circuit board according to any one of claims 1 to 7, and a semiconductor element electrically connected to the metal plate of the circuit board.
JP2023550661A 2022-03-31 2023-03-24 Pending JPWO2023190244A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022060336 2022-03-31
PCT/JP2023/011995 WO2023190244A1 (en) 2022-03-31 2023-03-24 Circuit board and method for manufacturing same, and power module

Publications (2)

Publication Number Publication Date
JPWO2023190244A1 JPWO2023190244A1 (en) 2023-10-05
JPWO2023190244A5 true JPWO2023190244A5 (en) 2024-03-08

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Family Applications (1)

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JP2023550661A Pending JPWO2023190244A1 (en) 2022-03-31 2023-03-24

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JP (1) JPWO2023190244A1 (en)
WO (1) WO2023190244A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4926033B2 (en) * 2007-12-25 2012-05-09 京セラ株式会社 Circuit board, package using the same, and electronic device
JP5957862B2 (en) * 2011-12-05 2016-07-27 三菱マテリアル株式会社 Power module substrate
JP2014086581A (en) * 2012-10-24 2014-05-12 Nippon Steel & Sumikin Electronics Devices Inc Package for housing semiconductor element
JP2017011216A (en) * 2015-06-25 2017-01-12 京セラ株式会社 Circuit board and electronic device
JP2022000871A (en) * 2018-07-31 2022-01-04 京セラ株式会社 Electrical circuit board and power module
JP7484268B2 (en) * 2020-03-18 2024-05-16 三菱マテリアル株式会社 METHOD FOR TEMPORARY FIXING OF METAL MEMBER, METHOD FOR MANUFACTURING JOINT BODY, AND METHOD FOR MANUFACTURING INSULATED CIRCUIT BOARD

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