JPWO2023166657A1 - - Google Patents

Info

Publication number
JPWO2023166657A1
JPWO2023166657A1 JP2022561541A JP2022561541A JPWO2023166657A1 JP WO2023166657 A1 JPWO2023166657 A1 JP WO2023166657A1 JP 2022561541 A JP2022561541 A JP 2022561541A JP 2022561541 A JP2022561541 A JP 2022561541A JP WO2023166657 A1 JPWO2023166657 A1 JP WO2023166657A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022561541A
Other languages
Japanese (ja)
Other versions
JPWO2023166657A5 (en
JP7337469B1 (en
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Application filed filed Critical
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Publication of JP7337469B1 publication Critical patent/JP7337469B1/en
Publication of JPWO2023166657A1 publication Critical patent/JPWO2023166657A1/ja
Publication of JPWO2023166657A5 publication Critical patent/JPWO2023166657A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2022561541A 2022-03-03 2022-03-03 Semiconductor equipment and power conversion equipment Active JP7337469B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/009114 WO2023166657A1 (en) 2022-03-03 2022-03-03 Semiconductor device and power conversion device

Publications (3)

Publication Number Publication Date
JP7337469B1 JP7337469B1 (en) 2023-09-04
JPWO2023166657A1 true JPWO2023166657A1 (en) 2023-09-07
JPWO2023166657A5 JPWO2023166657A5 (en) 2024-02-06

Family

ID=87882047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022561541A Active JP7337469B1 (en) 2022-03-03 2022-03-03 Semiconductor equipment and power conversion equipment

Country Status (2)

Country Link
JP (1) JP7337469B1 (en)
WO (1) WO2023166657A1 (en)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4738562B2 (en) 2000-03-15 2011-08-03 三菱電機株式会社 Manufacturing method of semiconductor device
JP2007134625A (en) 2005-11-14 2007-05-31 Mitsubishi Electric Corp Semiconductor device and its process for fabrication
JP2014003191A (en) 2012-06-20 2014-01-09 Hitachi Ltd Semiconductor device
JP6715567B2 (en) 2014-12-16 2020-07-01 富士電機株式会社 Semiconductor device
DE102014119465B3 (en) 2014-12-22 2016-05-25 Infineon Technologies Ag SEMICONDUCTOR DEVICE WITH STRIPULAR TRENCHGATE STRUCTURES, TRANSISTORMESIS AND DIODE MESAS
JP6253854B1 (en) 2016-03-30 2017-12-27 三菱電機株式会社 Semiconductor device, method for manufacturing the same, and power conversion device
JP6848382B2 (en) * 2016-11-16 2021-03-24 富士電機株式会社 Semiconductor devices and methods for manufacturing semiconductor devices
DE102017108738B4 (en) * 2017-04-24 2022-01-27 Infineon Technologies Ag SiC SEMICONDUCTOR DEVICE WITH AN OFFSET IN A TRENCH BOTTOM AND MANUFACTURING METHOD THEREOF
WO2018225600A1 (en) * 2017-06-06 2018-12-13 三菱電機株式会社 Semiconductor device and power conversion apparatus
JP7029364B2 (en) 2018-08-20 2022-03-03 株式会社東芝 Semiconductor device
JP6991370B2 (en) 2019-01-08 2022-01-12 三菱電機株式会社 Semiconductor equipment and power conversion equipment

Also Published As

Publication number Publication date
WO2023166657A1 (en) 2023-09-07
JP7337469B1 (en) 2023-09-04

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