JPWO2023145807A1 - - Google Patents
Info
- Publication number
- JPWO2023145807A1 JPWO2023145807A1 JP2023576970A JP2023576970A JPWO2023145807A1 JP WO2023145807 A1 JPWO2023145807 A1 JP WO2023145807A1 JP 2023576970 A JP2023576970 A JP 2023576970A JP 2023576970 A JP2023576970 A JP 2023576970A JP WO2023145807 A1 JPWO2023145807 A1 JP WO2023145807A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022011347 | 2022-01-27 | ||
| JP2022011347 | 2022-01-27 | ||
| JP2022138836 | 2022-08-31 | ||
| JP2022138836 | 2022-08-31 | ||
| PCT/JP2023/002398 WO2023145807A1 (ja) | 2022-01-27 | 2023-01-26 | 電極、積層構造体、電子デバイス、電子機器及びこれらの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023145807A1 true JPWO2023145807A1 (https=) | 2023-08-03 |
| JP7659926B2 JP7659926B2 (ja) | 2025-04-10 |
Family
ID=87471531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023576970A Active JP7659926B2 (ja) | 2022-01-27 | 2023-01-26 | 積層構造体、圧電素子、電子デバイス、電子機器及びシステム |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7659926B2 (https=) |
| TW (1) | TW202406178A (https=) |
| WO (1) | WO2023145807A1 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004006960A (ja) * | 2003-07-24 | 2004-01-08 | Matsushita Electric Ind Co Ltd | 誘電体膜の形成方法 |
| WO2015064341A1 (ja) * | 2013-10-29 | 2015-05-07 | コニカミノルタ株式会社 | 圧電素子、インクジェットヘッド、インクジェットプリンタおよび圧電素子の製造方法 |
| JP2019216181A (ja) * | 2018-06-13 | 2019-12-19 | アドバンストマテリアルテクノロジーズ株式会社 | 膜構造体及びその製造方法 |
| WO2020179210A1 (ja) * | 2019-03-07 | 2020-09-10 | アドバンストマテリアルテクノロジーズ株式会社 | 膜構造体、圧電体膜及び超伝導体膜 |
-
2023
- 2023-01-26 WO PCT/JP2023/002398 patent/WO2023145807A1/ja not_active Ceased
- 2023-01-26 JP JP2023576970A patent/JP7659926B2/ja active Active
- 2023-01-30 TW TW112103075A patent/TW202406178A/zh unknown
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004006960A (ja) * | 2003-07-24 | 2004-01-08 | Matsushita Electric Ind Co Ltd | 誘電体膜の形成方法 |
| WO2015064341A1 (ja) * | 2013-10-29 | 2015-05-07 | コニカミノルタ株式会社 | 圧電素子、インクジェットヘッド、インクジェットプリンタおよび圧電素子の製造方法 |
| JP2019216181A (ja) * | 2018-06-13 | 2019-12-19 | アドバンストマテリアルテクノロジーズ株式会社 | 膜構造体及びその製造方法 |
| WO2020179210A1 (ja) * | 2019-03-07 | 2020-09-10 | アドバンストマテリアルテクノロジーズ株式会社 | 膜構造体、圧電体膜及び超伝導体膜 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202406178A (zh) | 2024-02-01 |
| WO2023145807A1 (ja) | 2023-08-03 |
| JP7659926B2 (ja) | 2025-04-10 |
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