JPWO2023084790A1 - - Google Patents

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Publication number
JPWO2023084790A1
JPWO2023084790A1 JP2023559396A JP2023559396A JPWO2023084790A1 JP WO2023084790 A1 JPWO2023084790 A1 JP WO2023084790A1 JP 2023559396 A JP2023559396 A JP 2023559396A JP 2023559396 A JP2023559396 A JP 2023559396A JP WO2023084790 A1 JPWO2023084790 A1 JP WO2023084790A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2023559396A
Other languages
Japanese (ja)
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JP7721666B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JPWO2023084790A1 publication Critical patent/JPWO2023084790A1/ja
Application granted granted Critical
Publication of JP7721666B2 publication Critical patent/JP7721666B2/ja
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Anticipated expiration legal-status Critical

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00General purpose image data processing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2023559396A 2021-11-15 2021-11-15 3次元計測システム、並びにその制御方法及び制御プログラム Active JP7721666B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/041969 WO2023084790A1 (ja) 2021-11-15 2021-11-15 3次元計測システム、並びにその制御方法及び制御プログラム

Publications (2)

Publication Number Publication Date
JPWO2023084790A1 true JPWO2023084790A1 (https=) 2023-05-19
JP7721666B2 JP7721666B2 (ja) 2025-08-12

Family

ID=86335475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023559396A Active JP7721666B2 (ja) 2021-11-15 2021-11-15 3次元計測システム、並びにその制御方法及び制御プログラム

Country Status (2)

Country Link
JP (1) JP7721666B2 (https=)
WO (1) WO2023084790A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009033338A (ja) * 2007-07-25 2009-02-12 Olympus Imaging Corp 撮像装置
JP2013036791A (ja) * 2011-08-05 2013-02-21 Sony Corp 3次元測定装置、3次元測定方法及びプログラム
JP2016045019A (ja) * 2014-08-20 2016-04-04 オムロン株式会社 基板検査装置のティーチング装置及びティーチング方法
JP2019027947A (ja) * 2017-07-31 2019-02-21 株式会社キーエンス 形状測定装置及び形状測定方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009033338A (ja) * 2007-07-25 2009-02-12 Olympus Imaging Corp 撮像装置
JP2013036791A (ja) * 2011-08-05 2013-02-21 Sony Corp 3次元測定装置、3次元測定方法及びプログラム
JP2016045019A (ja) * 2014-08-20 2016-04-04 オムロン株式会社 基板検査装置のティーチング装置及びティーチング方法
JP2019027947A (ja) * 2017-07-31 2019-02-21 株式会社キーエンス 形状測定装置及び形状測定方法

Also Published As

Publication number Publication date
WO2023084790A1 (ja) 2023-05-19
JP7721666B2 (ja) 2025-08-12

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