JPWO2023053340A1 - - Google Patents

Info

Publication number
JPWO2023053340A1
JPWO2023053340A1 JP2023550907A JP2023550907A JPWO2023053340A1 JP WO2023053340 A1 JPWO2023053340 A1 JP WO2023053340A1 JP 2023550907 A JP2023550907 A JP 2023550907A JP 2023550907 A JP2023550907 A JP 2023550907A JP WO2023053340 A1 JPWO2023053340 A1 JP WO2023053340A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023550907A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023053340A1 publication Critical patent/JPWO2023053340A1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2023550907A 2021-09-30 2021-09-30 Pending JPWO2023053340A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/036132 WO2023053340A1 (ja) 2021-09-30 2021-09-30 硬質被膜、硬質被膜被覆工具、および硬質被膜の製造方法

Publications (1)

Publication Number Publication Date
JPWO2023053340A1 true JPWO2023053340A1 (ja) 2023-04-06

Family

ID=85781579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023550907A Pending JPWO2023053340A1 (ja) 2021-09-30 2021-09-30

Country Status (5)

Country Link
JP (1) JPWO2023053340A1 (ja)
KR (1) KR20240035884A (ja)
CN (1) CN118140006A (ja)
TW (1) TWI830364B (ja)
WO (1) WO2023053340A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5090251U (ja) 1973-12-19 1975-07-30
JPH0524101Y2 (ja) 1986-11-19 1993-06-18
US7960016B2 (en) * 2007-03-23 2011-06-14 Oerlikon Trading Ag, Truebbach Wear resistant hard coating for a workpiece and method for producing the same
KR102421533B1 (ko) * 2018-05-30 2022-07-14 가부시키가이샤 몰디노 피복 절삭 공구 및 그 제조 방법
JP6798534B2 (ja) * 2018-09-11 2020-12-09 株式会社タンガロイ 被覆切削工具
JP7216914B2 (ja) * 2019-03-12 2023-02-02 三菱マテリアル株式会社 高負荷切削加工においてすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
JP7415223B2 (ja) * 2020-02-14 2024-01-17 三菱マテリアル株式会社 強断続切削加工においてすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具

Also Published As

Publication number Publication date
CN118140006A (zh) 2024-06-04
WO2023053340A1 (ja) 2023-04-06
TWI830364B (zh) 2024-01-21
KR20240035884A (ko) 2024-03-18
TW202315957A (zh) 2023-04-16

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240315