JPWO2023032704A1 - - Google Patents

Info

Publication number
JPWO2023032704A1
JPWO2023032704A1 JP2023545444A JP2023545444A JPWO2023032704A1 JP WO2023032704 A1 JPWO2023032704 A1 JP WO2023032704A1 JP 2023545444 A JP2023545444 A JP 2023545444A JP 2023545444 A JP2023545444 A JP 2023545444A JP WO2023032704 A1 JPWO2023032704 A1 JP WO2023032704A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023545444A
Other versions
JPWO2023032704A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023032704A1 publication Critical patent/JPWO2023032704A1/ja
Publication of JPWO2023032704A5 publication Critical patent/JPWO2023032704A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2023545444A 2021-09-03 2022-08-19 Pending JPWO2023032704A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021143582 2021-09-03
PCT/JP2022/031312 WO2023032704A1 (ja) 2021-09-03 2022-08-19 エンコーダ

Publications (2)

Publication Number Publication Date
JPWO2023032704A1 true JPWO2023032704A1 (ja) 2023-03-09
JPWO2023032704A5 JPWO2023032704A5 (ja) 2024-05-27

Family

ID=85412215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023545444A Pending JPWO2023032704A1 (ja) 2021-09-03 2022-08-19

Country Status (3)

Country Link
JP (1) JPWO2023032704A1 (ja)
CN (1) CN117859042A (ja)
WO (1) WO2023032704A1 (ja)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005156549A (ja) * 2003-11-05 2005-06-16 Sendai Nikon:Kk 光学式エンコーダ
JP7013687B2 (ja) * 2017-06-19 2022-02-01 株式会社ニコン エンコーダ装置、駆動装置、ステージ装置、及びロボット装置

Also Published As

Publication number Publication date
WO2023032704A1 (ja) 2023-03-09
CN117859042A (zh) 2024-04-09

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240202