JPWO2022265030A1 - - Google Patents

Info

Publication number
JPWO2022265030A1
JPWO2022265030A1 JP2023530365A JP2023530365A JPWO2022265030A1 JP WO2022265030 A1 JPWO2022265030 A1 JP WO2022265030A1 JP 2023530365 A JP2023530365 A JP 2023530365A JP 2023530365 A JP2023530365 A JP 2023530365A JP WO2022265030 A1 JPWO2022265030 A1 JP WO2022265030A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2023530365A
Other languages
Japanese (ja)
Other versions
JPWO2022265030A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022265030A1 publication Critical patent/JPWO2022265030A1/ja
Publication of JPWO2022265030A5 publication Critical patent/JPWO2022265030A5/ja
Abandoned legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/18Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/40Treatment after imagewise removal, e.g. baking

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Laminated Bodies (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP2023530365A 2021-06-18 2022-06-15 Abandoned JPWO2022265030A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021101336 2021-06-18
PCT/JP2022/023875 WO2022265030A1 (ja) 2021-06-18 2022-06-15 永久膜の製造方法、積層体の製造方法、及び、デバイスの製造方法、並びに、永久膜

Publications (2)

Publication Number Publication Date
JPWO2022265030A1 true JPWO2022265030A1 (https=) 2022-12-22
JPWO2022265030A5 JPWO2022265030A5 (https=) 2024-03-21

Family

ID=84527565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023530365A Abandoned JPWO2022265030A1 (https=) 2021-06-18 2022-06-15

Country Status (3)

Country Link
JP (1) JPWO2022265030A1 (https=)
TW (1) TW202311304A (https=)
WO (1) WO2022265030A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250151361A (ko) * 2023-03-08 2025-10-21 가부시끼가이샤 레조낙 감광성 수지 조성물, 감광성 수지 필름, 다층 프린트 배선판 및 반도체 패키지, 및 다층 프린트 배선판의 제조 방법
TWI886465B (zh) * 2023-04-12 2025-06-11 奇美實業股份有限公司 感光性樹脂組成物、硬化膜圖案及其製作方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013115170A (ja) * 2011-11-28 2013-06-10 Hitachi Chemical Co Ltd プリント配線板及びその製造方法並びに感光性樹脂組成物

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014204023A (ja) * 2013-04-08 2014-10-27 日立化成株式会社 導体配線を有する構造体の製造方法、その方法により製造された導体配線を有する構造体、熱硬化性樹脂組成物、樹脂フィルム、感光性樹脂組成物及びドライフィルムレジスト
TWI625232B (zh) * 2016-02-26 2018-06-01 富士軟片股份有限公司 積層體、積層體的製造方法、半導體元件以及半導體元件的製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013115170A (ja) * 2011-11-28 2013-06-10 Hitachi Chemical Co Ltd プリント配線板及びその製造方法並びに感光性樹脂組成物

Also Published As

Publication number Publication date
TW202311304A (zh) 2023-03-16
WO2022265030A1 (ja) 2022-12-22

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