JPWO2022265030A1 - - Google Patents

Info

Publication number
JPWO2022265030A1
JPWO2022265030A1 JP2023530365A JP2023530365A JPWO2022265030A1 JP WO2022265030 A1 JPWO2022265030 A1 JP WO2022265030A1 JP 2023530365 A JP2023530365 A JP 2023530365A JP 2023530365 A JP2023530365 A JP 2023530365A JP WO2022265030 A1 JPWO2022265030 A1 JP WO2022265030A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023530365A
Other versions
JPWO2022265030A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022265030A1 publication Critical patent/JPWO2022265030A1/ja
Publication of JPWO2022265030A5 publication Critical patent/JPWO2022265030A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/18—Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20—Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Laminated Bodies (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP2023530365A 2021-06-18 2022-06-15 Pending JPWO2022265030A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021101336 2021-06-18
PCT/JP2022/023875 WO2022265030A1 (ja) 2021-06-18 2022-06-15 永久膜の製造方法、積層体の製造方法、及び、デバイスの製造方法、並びに、永久膜

Publications (2)

Publication Number Publication Date
JPWO2022265030A1 true JPWO2022265030A1 (ja) 2022-12-22
JPWO2022265030A5 JPWO2022265030A5 (ja) 2024-03-21

Family

ID=84527565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023530365A Pending JPWO2022265030A1 (ja) 2021-06-18 2022-06-15

Country Status (3)

Country Link
JP (1) JPWO2022265030A1 (ja)
TW (1) TW202311304A (ja)
WO (1) WO2022265030A1 (ja)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013115170A (ja) * 2011-11-28 2013-06-10 Hitachi Chemical Co Ltd プリント配線板及びその製造方法並びに感光性樹脂組成物
JP2014204023A (ja) * 2013-04-08 2014-10-27 日立化成株式会社 導体配線を有する構造体の製造方法、その方法により製造された導体配線を有する構造体、熱硬化性樹脂組成物、樹脂フィルム、感光性樹脂組成物及びドライフィルムレジスト
TWI625232B (zh) * 2016-02-26 2018-06-01 Fujifilm Corp 積層體、積層體的製造方法、半導體元件以及半導體元件的製造方法

Also Published As

Publication number Publication date
TW202311304A (zh) 2023-03-16
WO2022265030A1 (ja) 2022-12-22

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231211