JPWO2022264574A1 - - Google Patents
Info
- Publication number
- JPWO2022264574A1 JPWO2022264574A1 JP2023529558A JP2023529558A JPWO2022264574A1 JP WO2022264574 A1 JPWO2022264574 A1 JP WO2022264574A1 JP 2023529558 A JP2023529558 A JP 2023529558A JP 2023529558 A JP2023529558 A JP 2023529558A JP WO2022264574 A1 JPWO2022264574 A1 JP WO2022264574A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021101218 | 2021-06-17 | ||
| PCT/JP2022/011795 WO2022264574A1 (ja) | 2021-06-17 | 2022-03-16 | 熱式流量センサ及び流体制御装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022264574A1 true JPWO2022264574A1 (zh) | 2022-12-22 |
Family
ID=84527009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023529558A Pending JPWO2022264574A1 (zh) | 2021-06-17 | 2022-03-16 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2022264574A1 (zh) |
| TW (1) | TW202300873A (zh) |
| WO (1) | WO2022264574A1 (zh) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59105520A (ja) * | 1982-12-08 | 1984-06-18 | Tokyo Keiso Kk | 熱式質量流量計 |
| JPS63133020A (ja) * | 1986-11-25 | 1988-06-04 | Nippon Tairan Kk | 質量流量センサ |
| JP2763961B2 (ja) * | 1992-04-23 | 1998-06-11 | ジューキ株式会社 | 封筒処理ユニット |
| US11543275B2 (en) * | 2017-03-30 | 2023-01-03 | Fujikin Incorporated | Mass flow sensor, mass flow meter including the mass flow sensor, and mass flow controller including the mass flow sensor |
-
2022
- 2022-03-16 JP JP2023529558A patent/JPWO2022264574A1/ja active Pending
- 2022-03-16 WO PCT/JP2022/011795 patent/WO2022264574A1/ja active Application Filing
- 2022-05-10 TW TW111117391A patent/TW202300873A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022264574A1 (ja) | 2022-12-22 |
| TW202300873A (zh) | 2023-01-01 |