JPWO2022254747A1 - - Google Patents
Info
- Publication number
- JPWO2022254747A1 JPWO2022254747A1 JP2023525357A JP2023525357A JPWO2022254747A1 JP WO2022254747 A1 JPWO2022254747 A1 JP WO2022254747A1 JP 2023525357 A JP2023525357 A JP 2023525357A JP 2023525357 A JP2023525357 A JP 2023525357A JP WO2022254747 A1 JPWO2022254747 A1 JP WO2022254747A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
Landscapes
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Theoretical Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021093691 | 2021-06-03 | ||
JP2021093691 | 2021-06-03 | ||
PCT/JP2021/043248 WO2022254747A1 (ja) | 2021-06-03 | 2021-11-25 | 外観検査装置、外観検査方法、学習装置および推論装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2022254747A1 true JPWO2022254747A1 (ja) | 2022-12-08 |
JP7483135B2 JP7483135B2 (ja) | 2024-05-14 |
Family
ID=84324051
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023525357A Active JP7483135B2 (ja) | 2021-06-03 | 2021-11-25 | 外観検査装置、および外観検査方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7483135B2 (ja) |
WO (1) | WO2022254747A1 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10221268A (ja) * | 1997-02-05 | 1998-08-21 | Advantest Corp | ウェーハの表面状態検出方法および装置 |
JP2001013261A (ja) * | 1999-06-30 | 2001-01-19 | Mitsubishi Heavy Ind Ltd | 異物検出方法及びその装置 |
JP2016105052A (ja) * | 2014-12-01 | 2016-06-09 | 東レエンジニアリング株式会社 | 基板検査装置 |
JP6626057B2 (ja) * | 2017-09-27 | 2019-12-25 | ファナック株式会社 | 検査装置及び検査システム |
WO2020031984A1 (ja) * | 2018-08-08 | 2020-02-13 | Blue Tag株式会社 | 部品の検査方法及び検査システム |
JP6570211B1 (ja) * | 2019-05-29 | 2019-09-04 | ヴィスコ・テクノロジーズ株式会社 | 外観検査装置 |
-
2021
- 2021-11-25 WO PCT/JP2021/043248 patent/WO2022254747A1/ja active Application Filing
- 2021-11-25 JP JP2023525357A patent/JP7483135B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP7483135B2 (ja) | 2024-05-14 |
WO2022254747A1 (ja) | 2022-12-08 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230628 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240206 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240312 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240402 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240430 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7483135 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |