JPWO2022238794A1 - - Google Patents

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Publication number
JPWO2022238794A1
JPWO2022238794A1 JP2023520559A JP2023520559A JPWO2022238794A1 JP WO2022238794 A1 JPWO2022238794 A1 JP WO2022238794A1 JP 2023520559 A JP2023520559 A JP 2023520559A JP 2023520559 A JP2023520559 A JP 2023520559A JP WO2022238794 A1 JPWO2022238794 A1 JP WO2022238794A1
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JP
Japan
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Pending
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JP2023520559A
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Japanese (ja)
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    • HELECTRICITY
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
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    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
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    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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    • H01L21/822Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
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    • H01L21/822Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
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    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Thin Film Transistor (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP2023520559A 2021-05-12 2022-04-25 Pending JPWO2022238794A1 (ko)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2021081237 2021-05-12
JP2021086042 2021-05-21
JP2021100127 2021-06-16
JP2021113387 2021-07-08
JP2021122705 2021-07-27
JP2021176861 2021-10-28
JP2021194212 2021-11-30
PCT/IB2022/053801 WO2022238794A1 (ja) 2021-05-12 2022-04-25 半導体装置

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Publication Number Publication Date
JPWO2022238794A1 true JPWO2022238794A1 (ko) 2022-11-17

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JP2023520559A Pending JPWO2022238794A1 (ko) 2021-05-12 2022-04-25

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JP (1) JPWO2022238794A1 (ko)
KR (1) KR20240007178A (ko)
TW (1) TW202301695A (ko)
WO (1) WO2022238794A1 (ko)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011077967A1 (en) 2009-12-25 2011-06-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
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