JPWO2022215456A1 - - Google Patents
Info
- Publication number
- JPWO2022215456A1 JPWO2022215456A1 JP2023512888A JP2023512888A JPWO2022215456A1 JP WO2022215456 A1 JPWO2022215456 A1 JP WO2022215456A1 JP 2023512888 A JP2023512888 A JP 2023512888A JP 2023512888 A JP2023512888 A JP 2023512888A JP WO2022215456 A1 JPWO2022215456 A1 JP WO2022215456A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/04—Acids; Metal salts or ammonium salts thereof
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
- C08F290/06—Polymers provided for in subclass C08G
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021064980 | 2021-04-06 | ||
| PCT/JP2022/011547 WO2022215456A1 (ja) | 2021-04-06 | 2022-03-15 | フォトレジスト用樹脂、フォトレジストおよび硬化物 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022215456A1 true JPWO2022215456A1 (ja) | 2022-10-13 |
Family
ID=83546058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023512888A Pending JPWO2022215456A1 (ja) | 2021-04-06 | 2022-03-15 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2022215456A1 (ja) |
| KR (1) | KR20230167373A (ja) |
| CN (1) | CN117222944A (ja) |
| TW (1) | TW202307569A (ja) |
| WO (1) | WO2022215456A1 (ja) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10161310A (ja) * | 1996-12-04 | 1998-06-19 | Jsr Corp | 感放射線性樹脂組成物 |
| JP4753036B2 (ja) | 2005-07-25 | 2011-08-17 | 日産化学工業株式会社 | ポジ型感光性樹脂組成物及びそれから得られる硬化膜 |
| JP2007171311A (ja) | 2005-12-19 | 2007-07-05 | Sekisui Chem Co Ltd | レジスト材料、エッチングパターンの形成方法及び導電性パターンの形成方法 |
| JP5155764B2 (ja) * | 2007-08-20 | 2013-03-06 | 富士フイルム株式会社 | ポジ型感光性組成物及びそれを用いたパターン形成方法 |
| JP5664299B2 (ja) * | 2011-02-07 | 2015-02-04 | 東洋インキＳｃホールディングス株式会社 | 感光性着色組成物及びそれを用いたカラーフィルタ |
| KR101612673B1 (ko) | 2015-03-11 | 2016-04-14 | 동우 화인켐 주식회사 | 네가티브형 감광성 수지 조성물 |
| JP2017025236A (ja) | 2015-07-24 | 2017-02-02 | 明和化成株式会社 | ノボラック型フェノール樹脂、その製造方法、及びそれを含むフォトレジスト組成物 |
| TWI709576B (zh) * | 2016-02-23 | 2020-11-11 | 日商迪愛生股份有限公司 | 彩色阻劑組成物、濾色器及彩色阻劑組成物之製造方法 |
| JP6577979B2 (ja) * | 2016-07-21 | 2019-09-18 | 富士フイルム株式会社 | 積層体及び液晶表示装置 |
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2022
- 2022-03-15 CN CN202280026236.5A patent/CN117222944A/zh active Pending
- 2022-03-15 WO PCT/JP2022/011547 patent/WO2022215456A1/ja active Application Filing
- 2022-03-15 TW TW111109429A patent/TW202307569A/zh unknown
- 2022-03-15 JP JP2023512888A patent/JPWO2022215456A1/ja active Pending
- 2022-03-15 KR KR1020237035115A patent/KR20230167373A/ko unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW202307569A (zh) | 2023-02-16 |
| KR20230167373A (ko) | 2023-12-08 |
| WO2022215456A1 (ja) | 2022-10-13 |
| CN117222944A (zh) | 2023-12-12 |