JPWO2022201522A1 - - Google Patents

Info

Publication number
JPWO2022201522A1
JPWO2022201522A1 JP2023508396A JP2023508396A JPWO2022201522A1 JP WO2022201522 A1 JPWO2022201522 A1 JP WO2022201522A1 JP 2023508396 A JP2023508396 A JP 2023508396A JP 2023508396 A JP2023508396 A JP 2023508396A JP WO2022201522 A1 JPWO2022201522 A1 JP WO2022201522A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023508396A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022201522A1 publication Critical patent/JPWO2022201522A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2023508396A 2021-03-26 2021-03-26 Pending JPWO2022201522A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/012996 WO2022201522A1 (ja) 2021-03-26 2021-03-26 荷電粒子ビームシステム

Publications (1)

Publication Number Publication Date
JPWO2022201522A1 true JPWO2022201522A1 (ja) 2022-09-29

Family

ID=83396505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023508396A Pending JPWO2022201522A1 (ja) 2021-03-26 2021-03-26

Country Status (4)

Country Link
JP (1) JPWO2022201522A1 (ja)
KR (1) KR20230148236A (ja)
CN (1) CN117043908A (ja)
WO (1) WO2022201522A1 (ja)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3287332B2 (ja) * 1999-04-28 2002-06-04 日本電気株式会社 半導体集積回路の断線故障検出装置及びその断線故障検出方法
US8247769B2 (en) 2008-10-09 2012-08-21 California Institute Of Technology Characterization of nanoscale structures using an ultrafast electron microscope
JP2014098815A (ja) * 2012-11-15 2014-05-29 Ricoh Co Ltd 静電潜像計測装置、静電潜像計測方法、プログラム及び記録媒体
KR102456983B1 (ko) 2018-09-11 2022-10-21 주식회사 히타치하이테크 전자선 장치

Also Published As

Publication number Publication date
TW202238654A (zh) 2022-10-01
WO2022201522A1 (ja) 2022-09-29
CN117043908A (zh) 2023-11-10
KR20230148236A (ko) 2023-10-24

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Legal Events

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Effective date: 20230920

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