JPWO2022196312A1 - - Google Patents

Info

Publication number
JPWO2022196312A1
JPWO2022196312A1 JP2023506928A JP2023506928A JPWO2022196312A1 JP WO2022196312 A1 JPWO2022196312 A1 JP WO2022196312A1 JP 2023506928 A JP2023506928 A JP 2023506928A JP 2023506928 A JP2023506928 A JP 2023506928A JP WO2022196312 A1 JPWO2022196312 A1 JP WO2022196312A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023506928A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022196312A1 publication Critical patent/JPWO2022196312A1/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Drying Of Solid Materials (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
JP2023506928A 2021-03-17 2022-02-28 Pending JPWO2022196312A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021043807 2021-03-17
PCT/JP2022/008123 WO2022196312A1 (ja) 2021-03-17 2022-02-28 減圧乾燥装置および減圧乾燥方法

Publications (1)

Publication Number Publication Date
JPWO2022196312A1 true JPWO2022196312A1 (ja) 2022-09-22

Family

ID=83321280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023506928A Pending JPWO2022196312A1 (ja) 2021-03-17 2022-02-28

Country Status (4)

Country Link
JP (1) JPWO2022196312A1 (ja)
KR (1) KR20230156036A (ja)
CN (1) CN116917050A (ja)
WO (1) WO2022196312A1 (ja)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3827205B2 (ja) * 2001-11-22 2006-09-27 東京エレクトロン株式会社 基板処理装置および基板処理方法
JP2007090200A (ja) * 2005-09-28 2007-04-12 Seiko Epson Corp 乾燥方法、乾燥装置、および成膜方法、電気光学装置の製造方法、並びに電気光学装置、電子機器
JP2010054070A (ja) * 2008-08-26 2010-03-11 Sharp Corp 減圧乾燥装置
JP2011071013A (ja) * 2009-09-28 2011-04-07 Panasonic Corp 有機ｅｌ装置の機能層の製造装置および製造方法
JP6338507B2 (ja) 2014-10-16 2018-06-06 東京エレクトロン株式会社 液滴吐出装置、液滴吐出方法、プログラム及びコンピュータ記憶媒体
JP6804250B2 (ja) 2016-09-23 2020-12-23 東京エレクトロン株式会社 減圧乾燥装置、および減圧乾燥方法

Also Published As

Publication number Publication date
KR20230156036A (ko) 2023-11-13
WO2022196312A1 (ja) 2022-09-22
CN116917050A (zh) 2023-10-20

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