JPWO2022180839A1 - - Google Patents

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Publication number
JPWO2022180839A1
JPWO2022180839A1 JP2023501999A JP2023501999A JPWO2022180839A1 JP WO2022180839 A1 JPWO2022180839 A1 JP WO2022180839A1 JP 2023501999 A JP2023501999 A JP 2023501999A JP 2023501999 A JP2023501999 A JP 2023501999A JP WO2022180839 A1 JPWO2022180839 A1 JP WO2022180839A1
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JP
Japan
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JP2023501999A
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JP7564486B2 (ja
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
JP2023501999A 2021-02-26 2021-02-26 光導波路デバイスの製造方法および製造システム Active JP7564486B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/007527 WO2022180839A1 (ja) 2021-02-26 2021-02-26 光導波路デバイスの製造方法および製造システム

Publications (2)

Publication Number Publication Date
JPWO2022180839A1 true JPWO2022180839A1 (ja) 2022-09-01
JP7564486B2 JP7564486B2 (ja) 2024-10-09

Family

ID=83048720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023501999A Active JP7564486B2 (ja) 2021-02-26 2021-02-26 光導波路デバイスの製造方法および製造システム

Country Status (2)

Country Link
JP (1) JP7564486B2 (ja)
WO (1) WO2022180839A1 (ja)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6413867B1 (en) 1999-12-23 2002-07-02 Applied Materials, Inc. Film thickness control using spectral interferometry
JP2003232948A (ja) * 2001-12-03 2003-08-22 Furukawa Electric Co Ltd:The 光導波路の製造方法およびその製造方法を用いた光導波路デバイスならびに導波路型光合分波器
JP2004206016A (ja) 2002-12-26 2004-07-22 Hitachi Chem Co Ltd 光導波路構造及びその製造方法
US8200448B2 (en) 2008-02-21 2012-06-12 Southwell William H Optical monitor for rugate filter deposition
JPWO2015111600A1 (ja) 2014-01-24 2017-03-23 技術研究組合光電子融合基盤技術研究所 光学デバイスの製造方法及び光学デバイス

Also Published As

Publication number Publication date
JP7564486B2 (ja) 2024-10-09
WO2022180839A1 (ja) 2022-09-01

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