JPWO2022180838A1 - - Google Patents
Info
- Publication number
- JPWO2022180838A1 JPWO2022180838A1 JP2023501998A JP2023501998A JPWO2022180838A1 JP WO2022180838 A1 JPWO2022180838 A1 JP WO2022180838A1 JP 2023501998 A JP2023501998 A JP 2023501998A JP 2023501998 A JP2023501998 A JP 2023501998A JP WO2022180838 A1 JPWO2022180838 A1 JP WO2022180838A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/007524 WO2022180838A1 (ja) | 2021-02-26 | 2021-02-26 | 光導波路デバイスの製造方法および製造システム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022180838A1 true JPWO2022180838A1 (ja) | 2022-09-01 |
Family
ID=83048722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023501998A Pending JPWO2022180838A1 (ja) | 2021-02-26 | 2021-02-26 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2022180838A1 (ja) |
| WO (1) | WO2022180838A1 (ja) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6413867B1 (en) * | 1999-12-23 | 2002-07-02 | Applied Materials, Inc. | Film thickness control using spectral interferometry |
| JP2003232948A (ja) * | 2001-12-03 | 2003-08-22 | Furukawa Electric Co Ltd:The | 光導波路の製造方法およびその製造方法を用いた光導波路デバイスならびに導波路型光合分波器 |
| JP2004206016A (ja) * | 2002-12-26 | 2004-07-22 | Hitachi Chem Co Ltd | 光導波路構造及びその製造方法 |
| US8200448B2 (en) * | 2008-02-21 | 2012-06-12 | Southwell William H | Optical monitor for rugate filter deposition |
| JPWO2015111600A1 (ja) * | 2014-01-24 | 2017-03-23 | 技術研究組合光電子融合基盤技術研究所 | 光学デバイスの製造方法及び光学デバイス |
| JP6796048B2 (ja) * | 2017-09-25 | 2020-12-02 | 日本電信電話株式会社 | Ｓｉフォトニクス光回路及びその製造方法 |
-
2021
- 2021-02-26 JP JP2023501998A patent/JPWO2022180838A1/ja active Pending
- 2021-02-26 WO PCT/JP2021/007524 patent/WO2022180838A1/ja active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022180838A1 (ja) | 2022-09-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230608 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240416 |