JPWO2022172372A1 - - Google Patents

Info

Publication number
JPWO2022172372A1
JPWO2022172372A1 JP2022581089A JP2022581089A JPWO2022172372A1 JP WO2022172372 A1 JPWO2022172372 A1 JP WO2022172372A1 JP 2022581089 A JP2022581089 A JP 2022581089A JP 2022581089 A JP2022581089 A JP 2022581089A JP WO2022172372 A1 JPWO2022172372 A1 JP WO2022172372A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022581089A
Other versions
JPWO2022172372A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022172372A1 publication Critical patent/JPWO2022172372A1/ja
Publication of JPWO2022172372A5 publication Critical patent/JPWO2022172372A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0006—Interconnects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00095—Interconnects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
JP2022581089A 2021-02-10 2021-02-10 Pending JPWO2022172372A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/005040 WO2022172372A1 (ja) 2021-02-10 2021-02-10 Ｍｅｍｓ素子、光走査装置、測距装置およびｍｅｍｓ素子の製造方法

Publications (2)

Publication Number Publication Date
JPWO2022172372A1 true JPWO2022172372A1 (ja) 2022-08-18
JPWO2022172372A5 JPWO2022172372A5 (ja) 2023-08-22

Family

ID=82838495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022581089A Pending JPWO2022172372A1 (ja) 2021-02-10 2021-02-10

Country Status (4)

Country Link
JP (1) JPWO2022172372A1 (ja)
CN (1) CN116888065A (ja)
DE (1) DE112021007048T5 (ja)
WO (1) WO2022172372A1 (ja)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3425814B2 (ja) * 1994-12-28 2003-07-14 日本信号株式会社 電磁アクチュエータ及びその製造方法
WO2004103892A1 (ja) * 2003-04-25 2004-12-02 Fujitsu Limited マイクロ構造体の製造方法およびマイクロ構造体
JP5634670B2 (ja) 2008-10-20 2014-12-03 日本信号株式会社 プレーナ型アクチュエータ

Also Published As

Publication number Publication date
DE112021007048T5 (de) 2024-02-22
CN116888065A (zh) 2023-10-13
WO2022172372A1 (ja) 2022-08-18

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Legal Events

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