JPWO2022137427A5 - - Google Patents

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JPWO2022137427A5
JPWO2022137427A5 JP2022570881A JP2022570881A JPWO2022137427A5 JP WO2022137427 A5 JPWO2022137427 A5 JP WO2022137427A5 JP 2022570881 A JP2022570881 A JP 2022570881A JP 2022570881 A JP2022570881 A JP 2022570881A JP WO2022137427 A5 JPWO2022137427 A5 JP WO2022137427A5
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Japan
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mesh
shows
sample
sams
magnification
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JP2022570881A
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English (en)
Japanese (ja)
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JP7556054B2 (ja
JPWO2022137427A1 (https=
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Priority claimed from PCT/JP2020/048445 external-priority patent/WO2022137427A1/ja
Publication of JPWO2022137427A1 publication Critical patent/JPWO2022137427A1/ja
Publication of JPWO2022137427A5 publication Critical patent/JPWO2022137427A5/ja
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Publication of JP7556054B2 publication Critical patent/JP7556054B2/ja
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JP2022570881A 2020-12-24 2020-12-24 荷電粒子顕微鏡およびステージ Active JP7556054B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/048445 WO2022137427A1 (ja) 2020-12-24 2020-12-24 荷電粒子顕微鏡およびステージ

Publications (3)

Publication Number Publication Date
JPWO2022137427A1 JPWO2022137427A1 (https=) 2022-06-30
JPWO2022137427A5 true JPWO2022137427A5 (https=) 2023-08-18
JP7556054B2 JP7556054B2 (ja) 2024-09-25

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ID=82159273

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Application Number Title Priority Date Filing Date
JP2022570881A Active JP7556054B2 (ja) 2020-12-24 2020-12-24 荷電粒子顕微鏡およびステージ

Country Status (3)

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US (1) US12463004B2 (https=)
JP (1) JP7556054B2 (https=)
WO (1) WO2022137427A1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63139290A (ja) * 1986-12-02 1988-06-11 オリンパス光学工業株式会社 微動機構
JP2000311645A (ja) 1999-04-28 2000-11-07 Hitachi Ltd 電子顕微鏡
JP3986770B2 (ja) * 2001-07-03 2007-10-03 日本電子株式会社 ホルダ支持装置
JP4190832B2 (ja) * 2002-08-22 2008-12-03 日本電子株式会社 透過型電子顕微鏡
JP2005197338A (ja) * 2004-01-05 2005-07-21 Sumitomo Heavy Ind Ltd 位置合わせ方法及び処理装置
JP2010123354A (ja) 2008-11-18 2010-06-03 Hitachi High-Technologies Corp 荷電粒子線装置
JP5331828B2 (ja) 2011-01-14 2013-10-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置
EP2485239A1 (en) * 2011-02-07 2012-08-08 FEI Company Method for centering an optical element in a TEM comprising a contrast enhancing element
JP5953177B2 (ja) * 2011-10-31 2016-07-20 株式会社日立ハイテクノロジーズ 試料ステージ及び荷電粒子装置
JP2025139290A (ja) 2024-03-12 2025-09-26 株式会社北井地所 照明装置

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