JPWO2022030146A1 - - Google Patents

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Publication number
JPWO2022030146A1
JPWO2022030146A1 JP2022541159A JP2022541159A JPWO2022030146A1 JP WO2022030146 A1 JPWO2022030146 A1 JP WO2022030146A1 JP 2022541159 A JP2022541159 A JP 2022541159A JP 2022541159 A JP2022541159 A JP 2022541159A JP WO2022030146 A1 JPWO2022030146 A1 JP WO2022030146A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022541159A
Other versions
JP7395001B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022030146A1 publication Critical patent/JPWO2022030146A1/ja
Application granted granted Critical
Publication of JP7395001B2 publication Critical patent/JP7395001B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
JP2022541159A 2020-08-04 2021-06-29 マイクロミラーデバイス及び光走査装置 Active JP7395001B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020132638 2020-08-04
JP2020132638 2020-08-04
PCT/JP2021/024536 WO2022030146A1 (ja) 2020-08-04 2021-06-29 マイクロミラーデバイス及び光走査装置

Publications (2)

Publication Number Publication Date
JPWO2022030146A1 true JPWO2022030146A1 (ja) 2022-02-10
JP7395001B2 JP7395001B2 (ja) 2023-12-08

Family

ID=80117980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022541159A Active JP7395001B2 (ja) 2020-08-04 2021-06-29 マイクロミラーデバイス及び光走査装置

Country Status (5)

Country Link
US (1) US20230185081A1 (ja)
EP (1) EP4194926A4 (ja)
JP (1) JP7395001B2 (ja)
CN (1) CN116057449A (ja)
WO (1) WO2022030146A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024062856A1 (ja) * 2022-09-20 2024-03-28 富士フイルム株式会社 マイクロミラーデバイス及び光走査装置
WO2024070417A1 (ja) * 2022-09-28 2024-04-04 富士フイルム株式会社 マイクロミラーデバイス及び光走査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011161943A1 (ja) * 2010-06-24 2011-12-29 パナソニック株式会社 光学反射素子
WO2013168385A1 (ja) * 2012-05-07 2013-11-14 パナソニック株式会社 光学反射素子
US20180180873A1 (en) * 2016-12-28 2018-06-28 Stmicroelectronics S.R.L. Mems device with piezoelectric actuation, a projective mems system including the mems device and related control method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6492914B2 (ja) 2015-04-15 2019-04-03 株式会社デンソー 光走査装置
JP6581002B2 (ja) 2016-01-25 2019-09-25 スタンレー電気株式会社 前照灯装置
WO2018230065A1 (ja) * 2017-06-13 2018-12-20 三菱電機株式会社 光走査装置および光走査装置の調整方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011161943A1 (ja) * 2010-06-24 2011-12-29 パナソニック株式会社 光学反射素子
WO2013168385A1 (ja) * 2012-05-07 2013-11-14 パナソニック株式会社 光学反射素子
US20180180873A1 (en) * 2016-12-28 2018-06-28 Stmicroelectronics S.R.L. Mems device with piezoelectric actuation, a projective mems system including the mems device and related control method

Also Published As

Publication number Publication date
EP4194926A4 (en) 2024-01-10
CN116057449A (zh) 2023-05-02
JP7395001B2 (ja) 2023-12-08
EP4194926A1 (en) 2023-06-14
WO2022030146A1 (ja) 2022-02-10
US20230185081A1 (en) 2023-06-15

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