JPWO2022024999A1 - - Google Patents

Info

Publication number
JPWO2022024999A1
JPWO2022024999A1 JP2022540297A JP2022540297A JPWO2022024999A1 JP WO2022024999 A1 JPWO2022024999 A1 JP WO2022024999A1 JP 2022540297 A JP2022540297 A JP 2022540297A JP 2022540297 A JP2022540297 A JP 2022540297A JP WO2022024999 A1 JPWO2022024999 A1 JP WO2022024999A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022540297A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022024999A1 publication Critical patent/JPWO2022024999A1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00Monitoring the movement or position of the probe
    • G01Q20/04Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/58SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2022540297A 2020-07-31 2021-07-26 Pending JPWO2022024999A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020130552 2020-07-31
PCT/JP2021/027558 WO2022024999A1 (ja) 2020-07-31 2021-07-26 原子間力顕微鏡及び距離制御方法

Publications (1)

Publication Number Publication Date
JPWO2022024999A1 true JPWO2022024999A1 (zh) 2022-02-03

Family

ID=80036450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022540297A Pending JPWO2022024999A1 (zh) 2020-07-31 2021-07-26

Country Status (2)

Country Link
JP (1) JPWO2022024999A1 (zh)
WO (1) WO2022024999A1 (zh)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0887328A (ja) * 1994-09-14 1996-04-02 Res Dev Corp Of Japan 光操作方法
JP2003114185A (ja) * 2001-10-04 2003-04-18 Communication Research Laboratory プローブ位置固定式微小力測定装置及び測定方法
US7617720B2 (en) * 2005-01-06 2009-11-17 National University Corporation Hokkaido University Surface position measuring method and surface position measuring device
US8904560B2 (en) * 2007-05-07 2014-12-02 Bruker Nano, Inc. Closed loop controller and method for fast scanning probe microscopy
US8239968B2 (en) * 2009-07-06 2012-08-07 Georgia Tech Research Corporation Athermal atomic force microscope probes
WO2014132341A1 (ja) * 2013-02-26 2014-09-04 株式会社島津製作所 原子間力顕微鏡を用いた表面電荷密度測定装置

Also Published As

Publication number Publication date
WO2022024999A1 (ja) 2022-02-03

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20220726