JPWO2021241008A1 - - Google Patents

Info

Publication number
JPWO2021241008A1
JPWO2021241008A1 JP2022527548A JP2022527548A JPWO2021241008A1 JP WO2021241008 A1 JPWO2021241008 A1 JP WO2021241008A1 JP 2022527548 A JP2022527548 A JP 2022527548A JP 2022527548 A JP2022527548 A JP 2022527548A JP WO2021241008 A1 JPWO2021241008 A1 JP WO2021241008A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022527548A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021241008A1 publication Critical patent/JPWO2021241008A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2868—Complete testing stations; systems; procedures; software aspects
    • G01R31/287—Procedures; Software aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31712—Input or output aspects
    • G01R31/31715—Testing of input or output circuits; test of circuitry between the I/C pins and the functional core, e.g. testing of input or output driver, receiver, buffer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2022527548A 2020-05-26 2021-04-05 Pending JPWO2021241008A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020091373 2020-05-26
PCT/JP2021/014505 WO2021241008A1 (ja) 2020-05-26 2021-04-05 半導体デバイス検査方法及び半導体デバイス検査装置

Publications (1)

Publication Number Publication Date
JPWO2021241008A1 true JPWO2021241008A1 (ja) 2021-12-02

Family

ID=78744279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022527548A Pending JPWO2021241008A1 (ja) 2020-05-26 2021-04-05

Country Status (6)

Country Link
US (1) US20230184825A1 (ja)
EP (1) EP4148437A4 (ja)
JP (1) JPWO2021241008A1 (ja)
KR (1) KR20230015903A (ja)
CN (1) CN115667955A (ja)
WO (1) WO2021241008A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4917975B2 (ja) * 2007-06-29 2012-04-18 ルネサスエレクトロニクス株式会社 検査故障解析方法及び検査故障解析装置
JP2011047825A (ja) * 2009-08-27 2011-03-10 Renesas Electronics Corp 半導体装置の故障解析装置及び故障解析方法
JP5631484B2 (ja) * 2010-06-08 2014-11-26 ディーシージー システムズ、 インコーポライテッドＤｃｇ Ｓｙｓｔｅｍｓ Ｉｎｃ． ３次元ホットスポット位置特定
CN103688160B (zh) * 2011-07-13 2015-09-30 浜松光子学株式会社 发热点检测方法及发热点检测装置
EP2840387A1 (en) * 2013-08-23 2015-02-25 DCG Systems, Inc. Lock-in thermography method and system for hot spot localization
JP2016014553A (ja) * 2014-07-01 2016-01-28 三菱電機株式会社 故障解析装置
JP6714485B2 (ja) * 2016-09-28 2020-06-24 浜松ホトニクス株式会社 半導体デバイス検査方法及び半導体デバイス検査装置

Also Published As

Publication number Publication date
EP4148437A1 (en) 2023-03-15
US20230184825A1 (en) 2023-06-15
KR20230015903A (ko) 2023-01-31
TW202212852A (zh) 2022-04-01
EP4148437A4 (en) 2024-04-17
WO2021241008A1 (ja) 2021-12-02
CN115667955A (zh) 2023-01-31

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231109

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20241008