JPWO2021241007A1 - - Google Patents

Info

Publication number
JPWO2021241007A1
JPWO2021241007A1 JP2022527547A JP2022527547A JPWO2021241007A1 JP WO2021241007 A1 JPWO2021241007 A1 JP WO2021241007A1 JP 2022527547 A JP2022527547 A JP 2022527547A JP 2022527547 A JP2022527547 A JP 2022527547A JP WO2021241007 A1 JPWO2021241007 A1 JP WO2021241007A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022527547A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021241007A1 publication Critical patent/JPWO2021241007A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2837—Characterising or performance testing, e.g. of frequency response
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31712—Input or output aspects
    • G01R31/31715—Testing of input or output circuits; test of circuitry between the I/C pins and the functional core, e.g. testing of input or output driver, receiver, buffer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2022527547A 2020-05-26 2021-04-05 Pending JPWO2021241007A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020091377 2020-05-26
PCT/JP2021/014481 WO2021241007A1 (ja) 2020-05-26 2021-04-05 半導体デバイス検査方法及び半導体デバイス検査装置

Publications (1)

Publication Number Publication Date
JPWO2021241007A1 true JPWO2021241007A1 (ja) 2021-12-02

Family

ID=78744275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022527547A Pending JPWO2021241007A1 (ja) 2020-05-26 2021-04-05

Country Status (7)

Country Link
US (1) US20230184827A1 (ja)
EP (1) EP4148438A4 (ja)
JP (1) JPWO2021241007A1 (ja)
KR (1) KR20230015913A (ja)
CN (1) CN115552261A (ja)
TW (1) TW202212853A (ja)
WO (1) WO2021241007A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4917975B2 (ja) * 2007-06-29 2012-04-18 ルネサスエレクトロニクス株式会社 検査故障解析方法及び検査故障解析装置
JP2011047825A (ja) * 2009-08-27 2011-03-10 Renesas Electronics Corp 半導体装置の故障解析装置及び故障解析方法
WO2011156527A1 (en) * 2010-06-08 2011-12-15 Dcg Systems, Inc. Three-dimensional hot spot localization
JP5745629B2 (ja) * 2011-07-13 2015-07-08 浜松ホトニクス株式会社 発熱点検出方法及び発熱点検出装置
EP2840387A1 (en) * 2013-08-23 2015-02-25 DCG Systems, Inc. Lock-in thermography method and system for hot spot localization
JP2016014553A (ja) * 2014-07-01 2016-01-28 三菱電機株式会社 故障解析装置
JP6714485B2 (ja) * 2016-09-28 2020-06-24 浜松ホトニクス株式会社 半導体デバイス検査方法及び半導体デバイス検査装置

Also Published As

Publication number Publication date
EP4148438A4 (en) 2024-04-17
WO2021241007A1 (ja) 2021-12-02
KR20230015913A (ko) 2023-01-31
US20230184827A1 (en) 2023-06-15
TW202212853A (zh) 2022-04-01
EP4148438A1 (en) 2023-03-15
CN115552261A (zh) 2022-12-30

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231110