JPWO2021229633A1 - - Google Patents
Info
- Publication number
- JPWO2021229633A1 JPWO2021229633A1 JP2022522094A JP2022522094A JPWO2021229633A1 JP WO2021229633 A1 JPWO2021229633 A1 JP WO2021229633A1 JP 2022522094 A JP2022522094 A JP 2022522094A JP 2022522094 A JP2022522094 A JP 2022522094A JP WO2021229633 A1 JPWO2021229633 A1 JP WO2021229633A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2020/018789 WO2021229633A1 (ja) | 2020-05-11 | 2020-05-11 | プラズマ発生装置、プラズマ発生方法、および制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021229633A1 true JPWO2021229633A1 (ja) | 2021-11-18 |
JP7487296B2 JP7487296B2 (ja) | 2024-05-20 |
Family
ID=78526222
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022522094A Active JP7487296B2 (ja) | 2020-05-11 | 2020-05-11 | プラズマ発生装置、プラズマ発生方法、および制御装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7487296B2 (ja) |
WO (1) | WO2021229633A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11470711B2 (en) * | 2017-05-16 | 2022-10-11 | Fuji Corporation | Plasma generator with connector-cable detector |
EP4207952A1 (en) * | 2022-10-13 | 2023-07-05 | Tantec A/S | Surface treatment system for treating a surface and a method therefore |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1441577A4 (en) | 2002-02-20 | 2008-08-20 | Matsushita Electric Works Ltd | PLASMA PROCESSING DEVICE AND METHOD |
JP4697066B2 (ja) * | 2006-06-22 | 2011-06-08 | パナソニック株式会社 | 電極接合方法及び部品実装装置 |
JP6066859B2 (ja) * | 2013-08-02 | 2017-01-25 | 三菱電機株式会社 | プラズマ処理装置、プラズマ処理方法および接着方法 |
JP6278754B2 (ja) * | 2014-03-06 | 2018-02-14 | 大阪瓦斯株式会社 | ガス処理装置 |
US10034363B2 (en) * | 2015-05-15 | 2018-07-24 | University Of Florida Research Foundation, Inc. | Nitrophobic surface for extreme thrust gain |
WO2019077391A1 (en) * | 2017-10-18 | 2019-04-25 | Giovanni Barco | PROCESS AND APPARATUS FOR PRODUCING REACTIVE OXYGEN AND / OR NITROGEN SPECIES IN A LIQUID OR GASEOUS SOLUTION |
US11632851B2 (en) | 2017-12-20 | 2023-04-18 | Fuji Corporation | Plasma exposure device |
-
2020
- 2020-05-11 JP JP2022522094A patent/JP7487296B2/ja active Active
- 2020-05-11 WO PCT/JP2020/018789 patent/WO2021229633A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP7487296B2 (ja) | 2024-05-20 |
WO2021229633A1 (ja) | 2021-11-18 |
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