JPWO2021205970A1 - - Google Patents

Info

Publication number
JPWO2021205970A1
JPWO2021205970A1 JP2021557856A JP2021557856A JPWO2021205970A1 JP WO2021205970 A1 JPWO2021205970 A1 JP WO2021205970A1 JP 2021557856 A JP2021557856 A JP 2021557856A JP 2021557856 A JP2021557856 A JP 2021557856A JP WO2021205970 A1 JPWO2021205970 A1 JP WO2021205970A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021557856A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021205970A1 publication Critical patent/JPWO2021205970A1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
JP2021557856A 2020-04-06 2021-03-31 Pending JPWO2021205970A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020068648 2020-04-06
PCT/JP2021/014067 WO2021205970A1 (ja) 2020-04-06 2021-03-31 ターゲット、焼結体及びこれらの製造方法

Publications (1)

Publication Number Publication Date
JPWO2021205970A1 true JPWO2021205970A1 (zh) 2021-10-14

Family

ID=78024022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021557856A Pending JPWO2021205970A1 (zh) 2020-04-06 2021-03-31

Country Status (3)

Country Link
JP (1) JPWO2021205970A1 (zh)
TW (1) TWI836206B (zh)
WO (1) WO2021205970A1 (zh)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4727664B2 (ja) * 2005-06-15 2011-07-20 Ｊｘ日鉱日石金属株式会社 スパッタリングターゲット用酸化クロム粉末及びスパッタリングターゲット
KR101346472B1 (ko) * 2008-06-06 2014-01-02 이데미쓰 고산 가부시키가이샤 산화물 박막용 스퍼터링 타겟 및 그의 제조 방법
JP2011214136A (ja) * 2010-03-15 2011-10-27 Mitsubishi Materials Corp 薄膜形成用の蒸着材及び該薄膜を備える薄膜シート並びに積層シート
JP2012031346A (ja) * 2010-08-02 2012-02-16 Sumitomo Metal Mining Co Ltd 赤色蛍光体
US9039944B2 (en) * 2011-07-06 2015-05-26 Idemitsu Kosan Co., Ltd. Sputtering target
JP2013139387A (ja) * 2013-03-22 2013-07-18 Sumitomo Electric Ind Ltd Ｉｎ−Ｇａ−Ｚｎ系複合酸化物焼結体の製造方法
CN105917021B (zh) * 2014-03-25 2018-04-17 捷客斯金属株式会社 Sb‑Te基合金烧结体溅射靶
US9941415B2 (en) * 2014-05-23 2018-04-10 Sumitomo Metal Mining Co., Ltd. Oxide sintered body, sputtering target, and oxide semiconductor thin film obtained using sputtering target
JP2019012810A (ja) * 2017-06-29 2019-01-24 Tdk株式会社 磁気抵抗効果素子、磁気ヘッド、センサ、高周波フィルタ及び発振素子
JP2020027896A (ja) * 2018-08-14 2020-02-20 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． 磁気トンネル接合素子及び磁気抵抗メモリ装置

Also Published As

Publication number Publication date
TWI836206B (zh) 2024-03-21
TW202138599A (zh) 2021-10-16
WO2021205970A1 (ja) 2021-10-14

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