JPWO2021193611A1 - - Google Patents

Info

Publication number
JPWO2021193611A1
JPWO2021193611A1 JP2022510532A JP2022510532A JPWO2021193611A1 JP WO2021193611 A1 JPWO2021193611 A1 JP WO2021193611A1 JP 2022510532 A JP2022510532 A JP 2022510532A JP 2022510532 A JP2022510532 A JP 2022510532A JP WO2021193611 A1 JPWO2021193611 A1 JP WO2021193611A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022510532A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021193611A1 publication Critical patent/JPWO2021193611A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2022510532A 2020-03-25 2021-03-23 Pending JPWO2021193611A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020054663 2020-03-25
PCT/JP2021/011940 WO2021193611A1 (ja) 2020-03-25 2021-03-23 光学反射素子及び光制御システム

Publications (1)

Publication Number Publication Date
JPWO2021193611A1 true JPWO2021193611A1 (ja) 2021-09-30

Family

ID=77890419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022510532A Pending JPWO2021193611A1 (ja) 2020-03-25 2021-03-23

Country Status (4)

Country Link
US (1) US20230003997A1 (ja)
JP (1) JPWO2021193611A1 (ja)
CN (1) CN115210628A (ja)
WO (1) WO2021193611A1 (ja)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4929965B2 (ja) * 2006-10-12 2012-05-09 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP2009223115A (ja) * 2008-03-18 2009-10-01 Panasonic Corp 光学反射素子
TW201344240A (zh) * 2012-04-19 2013-11-01 Touch Micro System Tech 環狀結構及其相關微掃瞄鏡

Also Published As

Publication number Publication date
WO2021193611A1 (ja) 2021-09-30
CN115210628A (zh) 2022-10-18
US20230003997A1 (en) 2023-01-05

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230906