JPWO2021182644A1 - - Google Patents

Info

Publication number
JPWO2021182644A1
JPWO2021182644A1 JP2022506867A JP2022506867A JPWO2021182644A1 JP WO2021182644 A1 JPWO2021182644 A1 JP WO2021182644A1 JP 2022506867 A JP2022506867 A JP 2022506867A JP 2022506867 A JP2022506867 A JP 2022506867A JP WO2021182644 A1 JPWO2021182644 A1 JP WO2021182644A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022506867A
Other languages
Japanese (ja)
Other versions
JPWO2021182644A5 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021182644A1 publication Critical patent/JPWO2021182644A1/ja
Publication of JPWO2021182644A5 publication Critical patent/JPWO2021182644A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Laser Beam Processing (AREA)
JP2022506867A 2020-03-13 2021-03-12 Pending JPWO2021182644A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020044226 2020-03-13
PCT/JP2021/010248 WO2021182644A1 (ja) 2020-03-13 2021-03-12 ベーパチャンバおよびベーパチャンバの製造方法

Publications (2)

Publication Number Publication Date
JPWO2021182644A1 true JPWO2021182644A1 (zh) 2021-09-16
JPWO2021182644A5 JPWO2021182644A5 (zh) 2022-11-14

Family

ID=77672045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022506867A Pending JPWO2021182644A1 (zh) 2020-03-13 2021-03-12

Country Status (2)

Country Link
JP (1) JPWO2021182644A1 (zh)
WO (1) WO2021182644A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024019108A1 (ja) * 2022-07-22 2024-01-25 京セラ株式会社 放熱基板及びベイパーチャンバー

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002316282A (ja) * 2001-04-18 2002-10-29 Matsushita Electric Ind Co Ltd レーザ加工方法及び装置
JP2004154813A (ja) * 2002-11-06 2004-06-03 National Institute Of Advanced Industrial & Technology レーザ加工方法および装置
JP2005313195A (ja) * 2004-04-28 2005-11-10 Miyachi Technos Corp 二波長重畳型レーザ出射ユニット及びレーザ加工装置
JP6588599B1 (ja) * 2018-05-29 2019-10-09 古河電気工業株式会社 ベーパーチャンバ

Also Published As

Publication number Publication date
WO2021182644A1 (ja) 2021-09-16

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220708

A621 Written request for application examination

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Effective date: 20240226