JPWO2021181482A1 - - Google Patents

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Publication number
JPWO2021181482A1
JPWO2021181482A1 JP2022507017A JP2022507017A JPWO2021181482A1 JP WO2021181482 A1 JPWO2021181482 A1 JP WO2021181482A1 JP 2022507017 A JP2022507017 A JP 2022507017A JP 2022507017 A JP2022507017 A JP 2022507017A JP WO2021181482 A1 JPWO2021181482 A1 JP WO2021181482A1
Authority
JP
Japan
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Application number
JP2022507017A
Other versions
JP7288141B2 (ja
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Publication of JPWO2021181482A1 publication Critical patent/JPWO2021181482A1/ja
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Publication of JP7288141B2 publication Critical patent/JP7288141B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals
    • G02B7/365—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals by analysis of the spatial frequency components of the image

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
JP2022507017A 2020-03-09 2020-03-09 顕微鏡画像撮像方法および顕微鏡画像撮像装置 Active JP7288141B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/010101 WO2021181482A1 (ja) 2020-03-09 2020-03-09 顕微鏡画像撮像方法および顕微鏡画像撮像装置

Publications (2)

Publication Number Publication Date
JPWO2021181482A1 true JPWO2021181482A1 (ja) 2021-09-16
JP7288141B2 JP7288141B2 (ja) 2023-06-06

Family

ID=77671280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022507017A Active JP7288141B2 (ja) 2020-03-09 2020-03-09 顕微鏡画像撮像方法および顕微鏡画像撮像装置

Country Status (3)

Country Link
US (1) US12085704B2 (ja)
JP (1) JP7288141B2 (ja)
WO (1) WO2021181482A1 (ja)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08248100A (ja) * 1995-03-13 1996-09-27 Fujitsu Ltd プロービング方法及び装置
JP2000294608A (ja) * 1999-04-02 2000-10-20 Tokyo Seimitsu Co Ltd 表面画像投影装置及び方法
JP2001280952A (ja) * 2000-03-31 2001-10-10 Omron Corp 光学式変位計
JP2001305420A (ja) * 2000-04-24 2001-10-31 Shigeki Kasahara 顕微鏡のオートフォーカス装置
JP2008216248A (ja) * 2007-02-28 2008-09-18 Vistec Semiconductor Systems Gmbh ウエハ縁端部の上部表面の欠陥の高分解能画像を取得する方法
JP2018054968A (ja) * 2016-09-30 2018-04-05 富士フイルム株式会社 観察装置および方法並びに観察装置制御プログラム
WO2019098018A1 (ja) * 2017-11-17 2019-05-23 富士フイルム株式会社 観察装置および方法並びに観察装置制御プログラム

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08248100A (ja) * 1995-03-13 1996-09-27 Fujitsu Ltd プロービング方法及び装置
JP2000294608A (ja) * 1999-04-02 2000-10-20 Tokyo Seimitsu Co Ltd 表面画像投影装置及び方法
JP2001280952A (ja) * 2000-03-31 2001-10-10 Omron Corp 光学式変位計
JP2001305420A (ja) * 2000-04-24 2001-10-31 Shigeki Kasahara 顕微鏡のオートフォーカス装置
JP2008216248A (ja) * 2007-02-28 2008-09-18 Vistec Semiconductor Systems Gmbh ウエハ縁端部の上部表面の欠陥の高分解能画像を取得する方法
JP2018054968A (ja) * 2016-09-30 2018-04-05 富士フイルム株式会社 観察装置および方法並びに観察装置制御プログラム
WO2019098018A1 (ja) * 2017-11-17 2019-05-23 富士フイルム株式会社 観察装置および方法並びに観察装置制御プログラム

Also Published As

Publication number Publication date
JP7288141B2 (ja) 2023-06-06
US12085704B2 (en) 2024-09-10
WO2021181482A1 (ja) 2021-09-16
US20230100225A1 (en) 2023-03-30

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