JPWO2021176865A1 - - Google Patents

Info

Publication number
JPWO2021176865A1
JPWO2021176865A1 JP2022505012A JP2022505012A JPWO2021176865A1 JP WO2021176865 A1 JPWO2021176865 A1 JP WO2021176865A1 JP 2022505012 A JP2022505012 A JP 2022505012A JP 2022505012 A JP2022505012 A JP 2022505012A JP WO2021176865 A1 JPWO2021176865 A1 JP WO2021176865A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022505012A
Other versions
JP7231106B2 (ja
JPWO2021176865A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021176865A1 publication Critical patent/JPWO2021176865A1/ja
Publication of JPWO2021176865A5 publication Critical patent/JPWO2021176865A5/ja
Application granted granted Critical
Publication of JP7231106B2 publication Critical patent/JP7231106B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/14—Stack holders or separators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/22—Heat or fire protection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/30—Modular constructions

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Memory System Of A Hierarchy Structure (AREA)
  • Inorganic Insulating Materials (AREA)
JP2022505012A 2020-03-05 2021-01-19 保管棚 Active JP7231106B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020037929 2020-03-05
JP2020037929 2020-03-05
PCT/JP2021/001632 WO2021176865A1 (ja) 2020-03-05 2021-01-19 保管棚

Publications (3)

Publication Number Publication Date
JPWO2021176865A1 true JPWO2021176865A1 (ja) 2021-09-10
JPWO2021176865A5 JPWO2021176865A5 (ja) 2022-08-26
JP7231106B2 JP7231106B2 (ja) 2023-03-01

Family

ID=77613098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022505012A Active JP7231106B2 (ja) 2020-03-05 2021-01-19 保管棚

Country Status (8)

Country Link
US (1) US20230134774A1 (ja)
EP (1) EP4112506A4 (ja)
JP (1) JP7231106B2 (ja)
KR (1) KR20220103789A (ja)
CN (1) CN115175867A (ja)
IL (1) IL295872A (ja)
TW (1) TW202139334A (ja)
WO (1) WO2021176865A1 (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015166710A1 (ja) * 2014-04-28 2015-11-05 村田機械株式会社 パージ装置及びパージ方法
JP2015533026A (ja) * 2012-10-31 2015-11-16 株式会社ダイフク ウェハパージ可能な天井保管装置（ａｐｐａｒａｔｕｓｆｏｒｓｔｏｃｋｉｎｇａｎｄｐｕｒｇｉｎｇｗａｆｅｒａｔｃｅｉｌｉｎｇ）
WO2018150698A1 (ja) * 2017-02-20 2018-08-23 村田機械株式会社 パージストッカ
JP2019108220A (ja) * 2017-12-20 2019-07-04 株式会社ダイフク 保管設備
WO2020017137A1 (ja) * 2018-07-20 2020-01-23 村田機械株式会社 保管棚及び保管棚の設置方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4144970B2 (ja) * 1999-05-18 2008-09-03 株式会社日立国際電気 半導体製造方法及びその装置
US6506009B1 (en) * 2000-03-16 2003-01-14 Applied Materials, Inc. Apparatus for storing and moving a cassette
CN103086108A (zh) * 2011-11-08 2013-05-08 南通金恒不锈钢制管有限公司 一种改进的货架
US9875921B2 (en) * 2015-05-07 2018-01-23 Fabmatics Gmbh Flexible purge management system
CN106477229A (zh) * 2015-08-26 2017-03-08 衡阳华瑞电气有限公司 一种u形管放置架

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015533026A (ja) * 2012-10-31 2015-11-16 株式会社ダイフク ウェハパージ可能な天井保管装置（ａｐｐａｒａｔｕｓｆｏｒｓｔｏｃｋｉｎｇａｎｄｐｕｒｇｉｎｇｗａｆｅｒａｔｃｅｉｌｉｎｇ）
WO2015166710A1 (ja) * 2014-04-28 2015-11-05 村田機械株式会社 パージ装置及びパージ方法
WO2018150698A1 (ja) * 2017-02-20 2018-08-23 村田機械株式会社 パージストッカ
JP2019108220A (ja) * 2017-12-20 2019-07-04 株式会社ダイフク 保管設備
WO2020017137A1 (ja) * 2018-07-20 2020-01-23 村田機械株式会社 保管棚及び保管棚の設置方法

Also Published As

Publication number Publication date
IL295872A (en) 2022-10-01
KR20220103789A (ko) 2022-07-22
WO2021176865A1 (ja) 2021-09-10
CN115175867A (zh) 2022-10-11
EP4112506A4 (en) 2024-04-03
EP4112506A1 (en) 2023-01-04
TW202139334A (zh) 2021-10-16
JP7231106B2 (ja) 2023-03-01
US20230134774A1 (en) 2023-05-04

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