JPWO2021176847A5 - - Google Patents
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- Publication number
- JPWO2021176847A5 JPWO2021176847A5 JP2022505007A JP2022505007A JPWO2021176847A5 JP WO2021176847 A5 JPWO2021176847 A5 JP WO2021176847A5 JP 2022505007 A JP2022505007 A JP 2022505007A JP 2022505007 A JP2022505007 A JP 2022505007A JP WO2021176847 A5 JPWO2021176847 A5 JP WO2021176847A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- oxide film
- microstructure according
- filling
- pores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229910052751 metal Inorganic materials 0.000 claims 22
- 239000002184 metal Substances 0.000 claims 22
- 238000004519 manufacturing process Methods 0.000 claims 9
- 239000011148 porous material Substances 0.000 claims 6
- 238000009499 grossing Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052593 corundum Inorganic materials 0.000 claims 1
- 238000001312 dry etching Methods 0.000 claims 1
- 238000000227 grinding Methods 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
Claims (9)
前記構造体に対して、前記酸化膜の前記複数の細孔に金属を充填する充填工程と、
前記充填工程により、前記構造体に対して、前記酸化膜の前記複数の細孔に金属を充填して得られた金属充填部材を、相対湿度１０～３０％の環境に２４時間以上さらす保持工程とを有し、
前記複数の細孔は、平均直径が１μｍ以下である、金属充填微細構造体の製造方法。 a forming step of obtaining a structure having the valve metal member and the oxide film by forming an oxide film having a plurality of pores in a formation region surrounded by a frame portion disposed on the outer edge of the valve metal member; ,
a filling step of filling the plurality of pores of the oxide film with a metal for the structure;
In the filling step, the metal-filled member obtained by filling the plurality of pores of the oxide film with the metal in the structure is exposed to an environment with a relative humidity of 10 to 30% for 24 hours or more. and
A method for producing a metal-filled microstructure, wherein the plurality of pores have an average diameter of 1 μm or less.
前記充填工程は、前記金属層を前記フレーム部上に厚み１００μｍ以下に形成する、請求項１～５のいずれか１項に記載の金属充填微細構造体の製造方法。 The filling step is a step of filling the plurality of pores with the metal by forming a metal layer on the surface of the structure,
6. The method for producing a metal-filled microstructure according to claim 1, wherein said filling step forms said metal layer on said frame portion to a thickness of 100 μm or less.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020039126 | 2020-03-06 | ||
| JP2020039126 | 2020-03-06 | ||
| PCT/JP2021/000672 WO2021176847A1 (en) | 2020-03-06 | 2021-01-12 | Method for manufacturing metal-filled microstructure |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021176847A1 JPWO2021176847A1 (en) | 2021-09-10 |
| JPWO2021176847A5 true JPWO2021176847A5 (en) | 2022-10-27 |
| JP7336584B2 JP7336584B2 (en) | 2023-08-31 |
Family
ID=77613634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022505007A Active JP7336584B2 (en) | 2020-03-06 | 2021-01-12 | Method for manufacturing metal-filled microstructure |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7336584B2 (en) |
| CN (1) | CN115210410A (en) |
| TW (1) | TW202200489A (en) |
| WO (1) | WO2021176847A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021033467A1 (en) * | 2019-08-16 | 2021-02-25 | 富士フイルム株式会社 | Method for producing structure |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010033939A (en) * | 2008-07-30 | 2010-02-12 | Murata Mfg Co Ltd | Ion conductive membrane, manufacturing method for ion conductive membrane, fuel cell, and hydrogen sensor |
| KR101745485B1 (en) * | 2013-08-30 | 2017-06-09 | 후지필름 가부시키가이샤 | Method for manufacturing metal-filled microstructure |
| CN106460221B (en) * | 2014-07-18 | 2021-05-11 | 株式会社Uacj | Surface-treated aluminum material, method for producing same, and surface-treated aluminum material/resin layer assembly |
| JP6644895B2 (en) * | 2016-08-24 | 2020-02-12 | 富士フイルム株式会社 | Storage method |
-
2021
- 2021-01-12 WO PCT/JP2021/000672 patent/WO2021176847A1/en active Application Filing
- 2021-01-12 CN CN202180017274.XA patent/CN115210410A/en active Pending
- 2021-01-12 JP JP2022505007A patent/JP7336584B2/en active Active
- 2021-02-01 TW TW110103713A patent/TW202200489A/en unknown
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