JPWO2021172588A1 - - Google Patents

Info

Publication number
JPWO2021172588A1
JPWO2021172588A1 JP2022503388A JP2022503388A JPWO2021172588A1 JP WO2021172588 A1 JPWO2021172588 A1 JP WO2021172588A1 JP 2022503388 A JP2022503388 A JP 2022503388A JP 2022503388 A JP2022503388 A JP 2022503388A JP WO2021172588 A1 JPWO2021172588 A1 JP WO2021172588A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022503388A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021172588A1 publication Critical patent/JPWO2021172588A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2022503388A 2020-02-28 2021-03-01 Pending JPWO2021172588A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020032569 2020-02-28
PCT/JP2021/007722 WO2021172588A1 (en) 2020-02-28 2021-03-01 Sensor device and method for manufacturing same

Publications (1)

Publication Number Publication Date
JPWO2021172588A1 true JPWO2021172588A1 (en) 2021-09-02

Family

ID=77491660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022503388A Pending JPWO2021172588A1 (en) 2020-02-28 2021-03-01

Country Status (2)

Country Link
JP (1) JPWO2021172588A1 (en)
WO (1) WO2021172588A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023188760A1 (en) * 2022-03-31 2023-10-05 太陽誘電株式会社 Detection device and production method for same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004361269A (en) * 2003-06-05 2004-12-24 Canon Inc Multichannel sensor and method for manufacturing the same and biosensor system and method for manufacturing the same
DE102004005668B4 (en) * 2004-02-05 2021-09-16 Snaptrack, Inc. Electrical component and manufacturing process
JP4556637B2 (en) * 2004-11-22 2010-10-06 ソニー株式会社 Functional element body
JP2007104458A (en) * 2005-10-06 2007-04-19 Ube Ind Ltd Thin-film piezo-resonator device and its manufacturing method
JP2008160655A (en) * 2006-12-26 2008-07-10 Matsushita Electric Ind Co Ltd Method for manufacturing piezoelectric thin film resonator
JP6368091B2 (en) * 2014-01-07 2018-08-01 太陽誘電株式会社 module
JP6494545B2 (en) * 2016-02-23 2019-04-03 太陽誘電株式会社 Duplexer
EP3497439B1 (en) * 2016-08-11 2023-12-20 Qorvo US, Inc. Acoustic resonator device with controlled placement of functionalization material
JP6469736B2 (en) * 2017-01-17 2019-02-13 太陽誘電株式会社 Sensor circuit and sensing method

Also Published As

Publication number Publication date
WO2021172588A1 (en) 2021-09-02

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Legal Events

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