JPWO2021153656A5 - - Google Patents
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- Publication number
- JPWO2021153656A5 JPWO2021153656A5 JP2021574095A JP2021574095A JPWO2021153656A5 JP WO2021153656 A5 JPWO2021153656 A5 JP WO2021153656A5 JP 2021574095 A JP2021574095 A JP 2021574095A JP 2021574095 A JP2021574095 A JP 2021574095A JP WO2021153656 A5 JPWO2021153656 A5 JP WO2021153656A5
- Authority
- JP
- Japan
- Prior art keywords
- mist
- tank
- air
- sludge
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020013033 | 2020-01-29 | ||
| JP2020013033 | 2020-01-29 | ||
| PCT/JP2021/002987 WO2021153656A1 (ja) | 2020-01-29 | 2021-01-28 | 湿式ミスト捕集装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021153656A1 JPWO2021153656A1 (https=) | 2021-08-05 |
| JPWO2021153656A5 true JPWO2021153656A5 (https=) | 2024-02-14 |
| JP7693213B2 JP7693213B2 (ja) | 2025-06-17 |
Family
ID=77078460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021574095A Active JP7693213B2 (ja) | 2020-01-29 | 2021-01-28 | 湿式ミスト捕集装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7693213B2 (https=) |
| TW (1) | TWI800789B (https=) |
| WO (1) | WO2021153656A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116294540B (zh) * | 2023-03-03 | 2025-07-04 | 上海至纯洁净系统科技股份有限公司 | 一种可用在晶圆干燥系统的多气体排放集成化模组及晶圆干燥系统 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3571577B2 (ja) * | 1999-05-18 | 2004-09-29 | アネスト岩田株式会社 | 水洗塗装ブースのスラッジ回収構造 |
| JP2001293319A (ja) * | 2000-04-14 | 2001-10-23 | Mitsubishi Kakoki Kaisha Ltd | オイルミストの回収方法 |
| JP4731105B2 (ja) * | 2003-07-15 | 2011-07-20 | 株式会社大気社 | 液滴捕集装置、及び、それを用いた塗装ブース |
| JP4458862B2 (ja) * | 2004-01-30 | 2010-04-28 | 本田技研工業株式会社 | 未着塗料回収装置 |
| JP2008049286A (ja) * | 2006-08-25 | 2008-03-06 | Anest Iwata Corp | 水洗式捕集装置を備えた塗装室 |
| JP6335830B2 (ja) * | 2015-04-07 | 2018-05-30 | 株式会社大気社 | 液滴捕集装置、及び、その液滴捕集装置を用いた塗装排気洗浄装置 |
| JP2017140585A (ja) * | 2016-02-10 | 2017-08-17 | パナソニック株式会社 | 塗装ミスト捕集装置 |
-
2021
- 2021-01-28 WO PCT/JP2021/002987 patent/WO2021153656A1/ja not_active Ceased
- 2021-01-28 TW TW110103192A patent/TWI800789B/zh not_active IP Right Cessation
- 2021-01-28 JP JP2021574095A patent/JP7693213B2/ja active Active
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