JPWO2021130846A1 - - Google Patents

Info

Publication number
JPWO2021130846A1
JPWO2021130846A1 JP2021566422A JP2021566422A JPWO2021130846A1 JP WO2021130846 A1 JPWO2021130846 A1 JP WO2021130846A1 JP 2021566422 A JP2021566422 A JP 2021566422A JP 2021566422 A JP2021566422 A JP 2021566422A JP WO2021130846 A1 JPWO2021130846 A1 JP WO2021130846A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021566422A
Other versions
JP7212801B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021130846A1 publication Critical patent/JPWO2021130846A1/ja
Application granted granted Critical
Publication of JP7212801B2 publication Critical patent/JP7212801B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3473—Safety means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
JP2021566422A 2019-12-24 2019-12-24 プラズマ装置 Active JP7212801B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/050549 WO2021130846A1 (ja) 2019-12-24 2019-12-24 プラズマ装置

Publications (2)

Publication Number Publication Date
JPWO2021130846A1 true JPWO2021130846A1 (ja) 2021-07-01
JP7212801B2 JP7212801B2 (ja) 2023-01-25

Family

ID=76575769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021566422A Active JP7212801B2 (ja) 2019-12-24 2019-12-24 プラズマ装置

Country Status (4)

Country Link
JP (1) JP7212801B2 (ja)
CN (1) CN114747299A (ja)
DE (1) DE112019008000T5 (ja)
WO (1) WO2021130846A1 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007220586A (ja) * 2006-02-20 2007-08-30 Noritsu Koki Co Ltd プラズマ発生装置およびそれを用いるワーク処理装置
WO2018185834A1 (ja) * 2017-04-04 2018-10-11 株式会社Ｆｕｊｉ プラズマ発生装置
JP2019127933A (ja) * 2018-01-26 2019-08-01 ダイハツ工業株式会社 プラズマリアクター用電源システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004079453A (ja) 2002-08-22 2004-03-11 Matsushita Electric Ind Co Ltd プラズマ処理方法
IN2014KN03122A (ja) * 2012-09-05 2015-05-08 Kyosan Electric Mfg
JP2018117033A (ja) * 2017-01-18 2018-07-26 ルネサスエレクトロニクス株式会社 半導体製造装置および半導体製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007220586A (ja) * 2006-02-20 2007-08-30 Noritsu Koki Co Ltd プラズマ発生装置およびそれを用いるワーク処理装置
WO2018185834A1 (ja) * 2017-04-04 2018-10-11 株式会社Ｆｕｊｉ プラズマ発生装置
JP2019127933A (ja) * 2018-01-26 2019-08-01 ダイハツ工業株式会社 プラズマリアクター用電源システム

Also Published As

Publication number Publication date
DE112019008000T5 (de) 2022-10-27
CN114747299A (zh) 2022-07-12
WO2021130846A1 (ja) 2021-07-01
JP7212801B2 (ja) 2023-01-25

Similar Documents

Publication Publication Date Title
BR112019017762A2 (ja)
BR112021017339A2 (ja)
BR112021018450A2 (ja)
BR112021013854A2 (ja)
BR112021017939A2 (ja)
BR112021017738A2 (ja)
BR112021017892A2 (ja)
BR112019016141A2 (ja)
BR112021017782A2 (ja)
BR112021008711A2 (ja)
BR112019016138A2 (ja)
BR112019016142A2 (ja)
BR112021018168A2 (ja)
BR112021017728A2 (ja)
AU2020104490A5 (ja)
BR112021018452A2 (ja)
BR112021017234A2 (ja)
BR112021017703A2 (ja)
BR112021017173A2 (ja)
BR112021018102A2 (ja)
BR112021017083A2 (ja)
BR112021017637A2 (ja)
BR112021015080A2 (ja)
BR112021012348A2 (ja)
BR112021018250A2 (ja)

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220311

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20221227

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230113

R150 Certificate of patent or registration of utility model

Ref document number: 7212801

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150