JPWO2021117203A5 - - Google Patents
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- JPWO2021117203A5 JPWO2021117203A5 JP2021563549A JP2021563549A JPWO2021117203A5 JP WO2021117203 A5 JPWO2021117203 A5 JP WO2021117203A5 JP 2021563549 A JP2021563549 A JP 2021563549A JP 2021563549 A JP2021563549 A JP 2021563549A JP WO2021117203 A5 JPWO2021117203 A5 JP WO2021117203A5
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- sample
- probe
- sample surface
- curve
- distance
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- 239000000523 sample Substances 0.000 claims 52
- 238000000418 atomic force spectrum Methods 0.000 claims 11
- 238000005211 surface analysis Methods 0.000 claims 10
- 238000000034 method Methods 0.000 claims 9
- 238000005259 measurement Methods 0.000 claims 6
- 239000011368 organic material Substances 0.000 claims 3
- 238000004458 analytical method Methods 0.000 claims 2
- 230000000704 physical effect Effects 0.000 claims 2
- 239000007864 aqueous solution Substances 0.000 claims 1
- 239000000843 powder Substances 0.000 claims 1
Claims (11)
前記探針と前記試料表面との間の距離である探針－表面間距離によって前記フォースカーブを一階微分することで微分曲線を算出するステップと、
前記微分曲線に基づいて、前記試料表面に接触していた前記探針が該試料表面から離れていくときの複数のピークを識別するステップと、
前記複数のピークの中から、前記試料表面から最も離れたピークを最遠のピークとして識別するステップと、
前記試料表面から、前記最遠のピークまでの距離を、前記試料表面を形成する有機材料の破断長として算出するステップと、
前記破断長を出力するステップと
を含む表面分析方法。 Steps to obtain a force curve based on measurement of the sample surface with a scanning probe microscope equipped with a probe,
A step of calculating a differential curve by first-order differentializing the force curve according to the distance between the probe and the surface of the sample, which is the distance between the probe and the surface of the sample.
A step of identifying a plurality of peaks when the probe that was in contact with the sample surface moves away from the sample surface based on the differential curve.
A step of identifying the peak farthest from the sample surface as the farthest peak from the plurality of peaks.
The step of calculating the distance from the sample surface to the farthest peak as the breaking length of the organic material forming the sample surface, and
A surface analysis method including the step of outputting the breaking length.
前記走査型プローブ顕微鏡の圧電素子の稼働量と前記走査型プローブ顕微鏡の検出器の電圧との関係を示す電圧－稼働量曲線を取得するステップと、
前記電圧－稼働量曲線を前記フォースカーブに変換するステップとを含む、
請求項１に記載の表面分析方法。 The step to acquire the force curve is
A step of acquiring a voltage-operating amount curve showing the relationship between the operating amount of the piezoelectric element of the scanning probe microscope and the voltage of the detector of the scanning probe microscope, and
Including the step of converting the voltage-working amount curve into the force curve.
The surface analysis method according to claim 1.
前記探針を有するカンチレバーのばねたわみ量を前記稼働量から減ずることで前記探針－表面間距離を算出するステップと、
前記カンチレバーのばね定数に前記ばねたわみ量を乗ずることで、前記探針に作用する力を算出するステップとを含む、
請求項２に記載の表面分析方法。 The step of converting the voltage-operating amount curve into the force curve is
A step of calculating the distance between the probe and the surface by reducing the amount of spring deflection of the cantilever having the probe from the operating amount, and
A step of calculating a force acting on the probe by multiplying the spring constant of the cantilever by the amount of the spring deflection is included.
The surface analysis method according to claim 2.
複数の前記フォースカーブのそれぞれについて前記破断長を算出するステップと、
複数の前記破断長を出力するステップと
をさらに含む請求項１～３のいずれか一項に記載の表面分析方法。 The step of acquiring the force curve at each of the plurality of measurement points on the sample surface, and
A step of calculating the breaking length for each of the plurality of force curves, and
The surface analysis method according to any one of claims 1 to 3, further comprising a plurality of steps for outputting the breaking length.
請求項４に記載の表面分析方法。 The step of outputting the plurality of break lengths includes a step of outputting the distribution of the break lengths on the sample surface.
The surface analysis method according to claim 4.
請求項４または５に記載の表面分析方法。 The step of outputting the plurality of break lengths includes a step of storing the plurality of break lengths in a database.
The surface analysis method according to claim 4 or 5.
前記破断長と前記追加の物性量との組合せに基づく分析を実行するステップと、
前記分析の結果を出力するステップと
をさらに含む請求項１～６のいずれか一項に記載の表面分析方法。 The step of obtaining an additional physical property quantity based on the measurement of the sample surface by the scanning probe microscope, and
A step of performing an analysis based on the combination of the breaking length and the additional physical properties, and
The surface analysis method according to any one of claims 1 to 6, further comprising a step of outputting the result of the analysis.
請求項１～７のいずれか一項に記載の表面分析方法。 Measurement of the sample surface comprises contacting the probe with the sample surface in aqueous solution.
The surface analysis method according to any one of claims 1 to 7.
請求項１～８のいずれか一項に記載の表面分析方法。 The surface of the sample is the surface of the powder.
The surface analysis method according to any one of claims 1 to 8.
前記少なくとも一つのプロセッサが、
探針を備える走査型プローブ顕微鏡による試料表面の測定に基づくフォースカーブを取得し、
前記探針と前記試料表面との間の距離である探針－表面間距離によって前記フォースカーブを一階微分することで微分曲線を算出し、
前記微分曲線に基づいて、前記試料表面に接触していた前記探針が該試料表面から離れていくときの複数のピークを識別し、
前記複数のピークの中から、前記試料表面から最も離れたピークを最遠のピークとして識別し、
前記試料表面から、前記最遠のピークまでの距離を、前記試料表面を形成する有機材料の破断長として算出し、
前記破断長を出力する、
表面分析システム。 Equipped with at least one processor
The at least one processor
Obtain a force curve based on the measurement of the sample surface with a scanning probe microscope equipped with a probe.
A differential curve is calculated by first-order differentiating the force curve according to the distance between the probe and the surface of the sample, which is the distance between the probe and the surface of the sample.
Based on the differential curve, a plurality of peaks when the probe that was in contact with the sample surface moves away from the sample surface are identified.
From the plurality of peaks, the peak farthest from the sample surface is identified as the farthest peak.
The distance from the sample surface to the farthest peak was calculated as the breaking length of the organic material forming the sample surface.
Output the breaking length,
Surface analysis system.
前記探針と前記試料表面との間の距離である探針－表面間距離によって前記フォースカーブを一階微分することで微分曲線を算出するステップと、
前記微分曲線に基づいて、前記試料表面に接触していた前記探針が該試料表面から離れていくときの複数のピークを識別するステップと、
前記複数のピークの中から、前記試料表面から最も離れたピークを最遠のピークとして識別するステップと、
前記試料表面から、前記最遠のピークまでの距離を、前記試料表面を形成する有機材料の破断長として算出するステップと、
前記破断長を出力するステップと
をコンピュータに実行させる表面分析プログラム。 Steps to obtain a force curve based on measurement of the sample surface with a scanning probe microscope equipped with a probe,
A step of calculating a differential curve by first-order differentializing the force curve according to the distance between the probe and the surface of the sample, which is the distance between the probe and the surface of the sample.
A step of identifying a plurality of peaks when the probe that was in contact with the sample surface moves away from the sample surface based on the differential curve.
A step of identifying the peak farthest from the sample surface as the farthest peak from the plurality of peaks.
The step of calculating the distance from the sample surface to the farthest peak as the breaking length of the organic material forming the sample surface, and
A surface analysis program that causes a computer to perform the step of outputting the breaking length.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/048822 WO2021117203A1 (en) | 2019-12-12 | 2019-12-12 | Surface analysis method, surface analysis system, and surface analysis program |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021117203A1 JPWO2021117203A1 (en) | 2021-06-17 |
| JPWO2021117203A5 true JPWO2021117203A5 (en) | 2022-05-02 |
| JP7070809B2 JP7070809B2 (en) | 2022-05-18 |
Family
ID=76330078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021563549A Active JP7070809B2 (en) | 2019-12-12 | 2019-12-12 | Surface analysis methods, surface analysis systems, and surface analysis programs |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7070809B2 (en) |
| KR (1) | KR20220103732A (en) |
| WO (1) | WO2021117203A1 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0972925A (en) * | 1995-09-05 | 1997-03-18 | Nikon Corp | Scanning type microscope |
| JPH1144696A (en) * | 1997-07-28 | 1999-02-16 | Nikon Corp | Flexure detection mechanism and scanning probe microscope |
| JP2000230933A (en) * | 1999-02-12 | 2000-08-22 | Nikon Corp | Probe microscope and surface property analyzing method using the same |
| JP2005283433A (en) * | 2004-03-30 | 2005-10-13 | Canon Inc | Probe with probe element interacting with sample, manufacturing method of the probe, and measuring method and measuring device for intermolecular action using the probe |
| US7658097B2 (en) * | 2005-09-29 | 2010-02-09 | Veeco Instruments Inc. | Method and apparatus of high speed property mapping |
| EP2649444B1 (en) * | 2010-12-10 | 2015-12-09 | Universität Basel | Method for staging cancer progression by afm |
| JP6852538B2 (en) | 2017-04-18 | 2021-03-31 | 住友ゴム工業株式会社 | Mechanical property measurement method |
-
2019
- 2019-12-12 JP JP2021563549A patent/JP7070809B2/en active Active
- 2019-12-12 KR KR1020227017909A patent/KR20220103732A/en active Search and Examination
- 2019-12-12 WO PCT/JP2019/048822 patent/WO2021117203A1/en active Application Filing
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