JPWO2021117203A1 - - Google Patents

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Publication number
JPWO2021117203A1
JPWO2021117203A1 JP2021563549A JP2021563549A JPWO2021117203A1 JP WO2021117203 A1 JPWO2021117203 A1 JP WO2021117203A1 JP 2021563549 A JP2021563549 A JP 2021563549A JP 2021563549 A JP2021563549 A JP 2021563549A JP WO2021117203 A1 JPWO2021117203 A1 JP WO2021117203A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021563549A
Other versions
JPWO2021117203A5 (ja
JP7070809B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of JPWO2021117203A1 publication Critical patent/JPWO2021117203A1/ja
Publication of JPWO2021117203A5 publication Critical patent/JPWO2021117203A5/ja
Application granted granted Critical
Publication of JP7070809B2 publication Critical patent/JP7070809B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/28—Adhesion force microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
JP2021563549A 2019-12-12 2019-12-12 表面分析方法、表面分析システム、および表面分析プログラム Active JP7070809B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/048822 WO2021117203A1 (ja) 2019-12-12 2019-12-12 表面分析方法、表面分析システム、および表面分析プログラム

Publications (3)

Publication Number Publication Date
JPWO2021117203A1 true JPWO2021117203A1 (ja) 2021-06-17
JPWO2021117203A5 JPWO2021117203A5 (ja) 2022-05-02
JP7070809B2 JP7070809B2 (ja) 2022-05-18

Family

ID=76330078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021563549A Active JP7070809B2 (ja) 2019-12-12 2019-12-12 表面分析方法、表面分析システム、および表面分析プログラム

Country Status (3)

Country Link
JP (1) JP7070809B2 (ja)
KR (1) KR20220103732A (ja)
WO (1) WO2021117203A1 (ja)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0972925A (ja) * 1995-09-05 1997-03-18 Nikon Corp 走査型顕微鏡
JPH1144696A (ja) * 1997-07-28 1999-02-16 Nikon Corp 撓み検出機構および走査型プローブ顕微鏡
JP2000230933A (ja) * 1999-02-12 2000-08-22 Nikon Corp プローブ顕微鏡およびそのプローブ顕微鏡を用いた表面性状分析方法
JP2005283433A (ja) * 2004-03-30 2005-10-13 Canon Inc 試料と相互作用する探針を有するプローブ、該プローブの製造方法、該プローブを用いた分子間の相互作用の測定方法及び測定装置
US20070089498A1 (en) * 2005-09-29 2007-04-26 Chanmin Su Method and apparatus of high speed property mapping
JP2013545110A (ja) * 2010-12-10 2013-12-19 ウニヴェルズィテート バーゼル Ａｆｍにより癌進行を病期分類する方法
JP2018178016A (ja) * 2017-04-18 2018-11-15 住友ゴム工業株式会社 力学物性測定方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0972925A (ja) * 1995-09-05 1997-03-18 Nikon Corp 走査型顕微鏡
JPH1144696A (ja) * 1997-07-28 1999-02-16 Nikon Corp 撓み検出機構および走査型プローブ顕微鏡
JP2000230933A (ja) * 1999-02-12 2000-08-22 Nikon Corp プローブ顕微鏡およびそのプローブ顕微鏡を用いた表面性状分析方法
JP2005283433A (ja) * 2004-03-30 2005-10-13 Canon Inc 試料と相互作用する探針を有するプローブ、該プローブの製造方法、該プローブを用いた分子間の相互作用の測定方法及び測定装置
US20070089498A1 (en) * 2005-09-29 2007-04-26 Chanmin Su Method and apparatus of high speed property mapping
JP2013545110A (ja) * 2010-12-10 2013-12-19 ウニヴェルズィテート バーゼル Ａｆｍにより癌進行を病期分類する方法
JP2018178016A (ja) * 2017-04-18 2018-11-15 住友ゴム工業株式会社 力学物性測定方法

Also Published As

Publication number Publication date
WO2021117203A1 (ja) 2021-06-17
KR20220103732A (ko) 2022-07-22
JP7070809B2 (ja) 2022-05-18

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