JPWO2021065349A1 - - Google Patents

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Publication number
JPWO2021065349A1
JPWO2021065349A1 JP2021550501A JP2021550501A JPWO2021065349A1 JP WO2021065349 A1 JPWO2021065349 A1 JP WO2021065349A1 JP 2021550501 A JP2021550501 A JP 2021550501A JP 2021550501 A JP2021550501 A JP 2021550501A JP WO2021065349 A1 JPWO2021065349 A1 JP WO2021065349A1
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JP
Japan
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JP2021550501A
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JP7491315B2 (ja
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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4038—Image mosaicing, e.g. composing plane images from plane sub-images
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/10—Segmentation; Edge detection
    • G06T7/11—Region-based segmentation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition
    • G06V10/12—Details of acquisition arrangements; Constructional details thereof
    • G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
    • G06V10/141—Control of illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10016—Video; Image sequence
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10141—Special mode during image acquisition
    • G06T2207/10152—Varying illumination
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20212—Image combination
    • G06T2207/20221—Image fusion; Image merging
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30156—Vehicle coating
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30248—Vehicle exterior or interior
    • G06T2207/30252—Vehicle exterior; Vicinity of vehicle
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V2201/00—Indexing scheme relating to image or video recognition or understanding
    • G06V2201/06—Recognition of objects for industrial automation

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
JP2021550501A 2019-10-02 2020-09-04 ワークの表面欠陥検出装置及び検出方法、ワークの表面検査システム並びにプログラム Active JP7491315B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019182098 2019-10-02
JP2019182098 2019-10-02
PCT/JP2020/033629 WO2021065349A1 (ja) 2019-10-02 2020-09-04 ワークの表面欠陥検出装置及び検出方法、ワークの表面検査システム並びにプログラム

Publications (2)

Publication Number Publication Date
JPWO2021065349A1 true JPWO2021065349A1 (ja) 2021-04-08
JP7491315B2 JP7491315B2 (ja) 2024-05-28

Family

ID=75337221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021550501A Active JP7491315B2 (ja) 2019-10-02 2020-09-04 ワークの表面欠陥検出装置及び検出方法、ワークの表面検査システム並びにプログラム

Country Status (4)

Country Link
US (1) US20220292665A1 (ja)
JP (1) JP7491315B2 (ja)
CN (1) CN114450580A (ja)
WO (1) WO2021065349A1 (ja)

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* Cited by examiner, † Cited by third party
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US6445812B1 (en) * 1999-01-22 2002-09-03 Siemens Corporate Research, Inc. Illumination compensation system for industrial inspection
US6829383B1 (en) * 2000-04-28 2004-12-07 Canon Kabushiki Kaisha Stochastic adjustment of differently-illuminated images
JP3784603B2 (ja) * 2000-03-02 2006-06-14 株式会社日立製作所 検査方法及びその装置並びに検査装置における検査条件設定方法
US6627863B2 (en) * 2000-12-15 2003-09-30 Mitutoyo Corporation System and methods to determine the settings of multiple light sources in a vision system
US20020186878A1 (en) * 2001-06-07 2002-12-12 Hoon Tan Seow System and method for multiple image analysis
AU2002344112A1 (en) * 2002-10-18 2004-05-04 Kirin Techno-System Corporation Method and device for preparing reference image in glass bottle inspection device
US7394919B2 (en) * 2004-06-01 2008-07-01 Lumidigm, Inc. Multispectral biometric imaging
US7590276B2 (en) * 2004-12-20 2009-09-15 Mitutoyo Corporation System and method for programming interrupting operations during moving image acquisition sequences in a vision system
JP2007024616A (ja) * 2005-07-14 2007-02-01 Matsushita Electric Ind Co Ltd プラズマディスプレイパネルの点灯画面検査方法
JP4664327B2 (ja) * 2007-05-16 2011-04-06 株式会社日立ハイテクノロジーズ パターン検査方法
EP2177898A1 (en) * 2008-10-14 2010-04-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for selecting an optimized evaluation feature subset for an inspection of free-form surfaces and method for inspecting a free-form surface
SG164292A1 (en) * 2009-01-13 2010-09-29 Semiconductor Technologies & Instruments Pte System and method for inspecting a wafer
SG163442A1 (en) * 2009-01-13 2010-08-30 Semiconductor Technologies & Instruments System and method for inspecting a wafer
JP5681021B2 (ja) * 2011-04-01 2015-03-04 アークハリマ株式会社 表面性状測定装置
JP5882072B2 (ja) * 2012-02-06 2016-03-09 株式会社日立ハイテクノロジーズ 欠陥観察方法及びその装置
JP5994419B2 (ja) * 2012-06-21 2016-09-21 富士通株式会社 検査方法及び検査装置
JP6013819B2 (ja) * 2012-07-17 2016-10-25 倉敷紡績株式会社 表面形状検査装置及び表面形状検査方法
DE102013212495A1 (de) * 2013-06-27 2014-12-31 Robert Bosch Gmbh Verfahren und Vorrichtung zur Inspektion einer konturierten Fläche,insbesondere des Unterbodens eines Kraftfahrzeugs
JP6316068B2 (ja) * 2014-03-31 2018-04-25 国立大学法人 東京大学 検査システムおよび検査方法
FR3039660B1 (fr) * 2015-07-30 2017-09-08 Essilor Int Methode de verification d'une caracteristique geometrique et d'une caracteristique optique d'une lentille ophtalmique detouree et dispositif associe
JP6394544B2 (ja) * 2015-09-04 2018-09-26 信越化学工業株式会社 フォトマスクブランクの欠陥検査方法、選別方法及び製造方法
CN105911724B (zh) * 2016-05-23 2018-05-25 京东方科技集团股份有限公司 确定用于检测的光照强度的方法和装置、及光学检测方法和装置
US10596754B2 (en) * 2016-06-03 2020-03-24 The Boeing Company Real time inspection and correction techniques for direct writing systems
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Also Published As

Publication number Publication date
CN114450580A (zh) 2022-05-06
WO2021065349A1 (ja) 2021-04-08
US20220292665A1 (en) 2022-09-15
JP7491315B2 (ja) 2024-05-28

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