JPWO2021024865A1 - - Google Patents

Info

Publication number
JPWO2021024865A1
JPWO2021024865A1 JP2021537250A JP2021537250A JPWO2021024865A1 JP WO2021024865 A1 JPWO2021024865 A1 JP WO2021024865A1 JP 2021537250 A JP2021537250 A JP 2021537250A JP 2021537250 A JP2021537250 A JP 2021537250A JP WO2021024865 A1 JPWO2021024865 A1 JP WO2021024865A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021537250A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021024865A1 publication Critical patent/JPWO2021024865A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/308—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2021537250A 2019-08-06 2020-07-28 Pending JPWO2021024865A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019144234 2019-08-06
PCT/JP2020/028931 WO2021024865A1 (ja) 2019-08-06 2020-07-28 圧電素子

Publications (1)

Publication Number Publication Date
JPWO2021024865A1 true JPWO2021024865A1 (ja) 2021-02-11

Family

ID=74503622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021537250A Pending JPWO2021024865A1 (ja) 2019-08-06 2020-07-28

Country Status (7)

Country Link
US (1) US11770657B2 (ja)
JP (1) JPWO2021024865A1 (ja)
KR (1) KR20220043126A (ja)
CN (1) CN114207854A (ja)
DE (1) DE112020003726T5 (ja)
TW (1) TWI792029B (ja)
WO (1) WO2021024865A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023002319A (ja) * 2021-06-22 2023-01-10 株式会社デンソー Ｍｅｍｓデバイス
CN117714963A (zh) * 2022-09-09 2024-03-15 广州乐仪投资有限公司 具有可拉伸膜的mems扬声器、其制造方法以及包括其的电子设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146428A (ja) 1974-10-18 1976-04-20 Diamond Electric Mfg Nenshoseigyosochi
US7104134B2 (en) 2004-03-05 2006-09-12 Agilent Technologies, Inc. Piezoelectric cantilever pressure sensor
TWM261315U (en) * 2004-08-31 2005-04-11 Luen Tz Da Fa Machinery Co Ltd Improved polishing machine
WO2007060768A1 (ja) * 2005-11-24 2007-05-31 Murata Manufacturing Co., Ltd. 電気音響変換器
EP3796671A1 (en) 2008-06-30 2021-03-24 The Regents of the University of Michigan Piezoelectric mems microphone
KR101159734B1 (ko) 2008-12-22 2012-06-28 한국전자통신연구원 압전형 스피커 및 이의 제작방법
JP5491080B2 (ja) * 2009-06-18 2014-05-14 国立大学法人 東京大学 マイクロフォン
KR101286768B1 (ko) 2009-12-08 2013-07-16 한국전자통신연구원 압전형 스피커 및 그 제조 방법
JP5576776B2 (ja) * 2010-03-01 2014-08-20 パナソニック株式会社 圧電スピーカおよびこの圧電スピーカを用いた警報装置
KR20140038397A (ko) * 2011-03-31 2014-03-28 베이커-컬링, 인코퍼레이티드. 간극 제어 구조를 구비한 음향 변환기 및 음향 변환기를 제조하는 방법
JP2017046225A (ja) * 2015-08-27 2017-03-02 株式会社ディスコ Ｂａｗデバイス及びｂａｗデバイスの製造方法
CN105428520A (zh) * 2015-11-09 2016-03-23 业成光电（深圳）有限公司 压电元件的制造方法及压电基板
JP7353182B2 (ja) 2017-11-21 2023-09-29 日東電工株式会社 圧電スピーカー形成用積層体

Also Published As

Publication number Publication date
CN114207854A (zh) 2022-03-18
WO2021024865A1 (ja) 2021-02-11
KR20220043126A (ko) 2022-04-05
TWI792029B (zh) 2023-02-11
DE112020003726T5 (de) 2022-04-21
US20220279285A1 (en) 2022-09-01
US11770657B2 (en) 2023-09-26
TW202114257A (zh) 2021-04-01

Similar Documents

Publication Publication Date Title
BR112019017762A2 (ja)
BR112021017339A2 (ja)
BR112021013854A2 (ja)
BR112021018450A2 (ja)
BR112019016141A2 (ja)
AU2020104490A4 (ja)
BR112021017782A2 (ja)
BR112019016138A2 (ja)
BR112019016142A2 (ja)
BR112021018168A2 (ja)
BR112021017728A2 (ja)
BR112021008711A2 (ja)
BR112021017234A2 (ja)
BR112021017355A2 (ja)
BR112021017173A2 (ja)
BR112021018102A2 (ja)
BR112021017637A2 (ja)
JPWO2021024865A1 (ja)
BR112021012348A2 (ja)
BR112021018250A2 (ja)
BR112021018093A2 (ja)
BR112021018084A2 (ja)
BR112021017703A2 (ja)
BR112021013944A2 (ja)
BR112021013128A2 (ja)

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230517