JPWO2021010181A1 - - Google Patents

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Publication number
JPWO2021010181A1
JPWO2021010181A1 JP2021532783A JP2021532783A JPWO2021010181A1 JP WO2021010181 A1 JPWO2021010181 A1 JP WO2021010181A1 JP 2021532783 A JP2021532783 A JP 2021532783A JP 2021532783 A JP2021532783 A JP 2021532783A JP WO2021010181 A1 JPWO2021010181 A1 JP WO2021010181A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2021532783A
Other languages
Japanese (ja)
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JPWO2021010181A5 (https=
JP7528939B2 (ja
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Publication of JPWO2021010181A1 publication Critical patent/JPWO2021010181A1/ja
Publication of JPWO2021010181A5 publication Critical patent/JPWO2021010181A5/ja
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Publication of JP7528939B2 publication Critical patent/JP7528939B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00Controls for manipulators
    • B25J13/08Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Landscapes

  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Human Computer Interaction (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2021532783A 2019-07-17 2020-07-02 検査装置、検査方法、位置決め方法、およびプログラム Active JP7528939B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019131635 2019-07-17
JP2019131635 2019-07-17
PCT/JP2020/026010 WO2021010181A1 (ja) 2019-07-17 2020-07-02 検査装置、検査方法、位置決め方法、およびプログラム

Publications (3)

Publication Number Publication Date
JPWO2021010181A1 true JPWO2021010181A1 (https=) 2021-01-21
JPWO2021010181A5 JPWO2021010181A5 (https=) 2024-02-07
JP7528939B2 JP7528939B2 (ja) 2024-08-06

Family

ID=74210477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021532783A Active JP7528939B2 (ja) 2019-07-17 2020-07-02 検査装置、検査方法、位置決め方法、およびプログラム

Country Status (2)

Country Link
JP (1) JP7528939B2 (https=)
WO (1) WO2021010181A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023127021A1 (ja) * 2021-12-27 2023-07-06 株式会社ニコン 制御装置、制御システム、ロボットシステム、制御方法及びコンピュータプログラム
US12330304B2 (en) * 2022-02-02 2025-06-17 Intrinsic Innovation Llc Object placement

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255279A (ja) * 2001-01-09 2001-09-21 Hitachi Ltd パターン欠陥検査方法およびその装置
JP2007240434A (ja) * 2006-03-10 2007-09-20 Omron Corp 表面状態の検査方法および表面状態検査装置
JP2007248241A (ja) * 2006-03-15 2007-09-27 Omron Corp 表面状態の検査方法および表面状態検査装置
JP2008292430A (ja) * 2007-05-28 2008-12-04 Panasonic Electric Works Co Ltd 外観検査方法および外観検査装置
WO2015008373A1 (ja) * 2013-07-19 2015-01-22 富士通株式会社 情報処理装置、検査範囲の計算方法、及びプログラム
JP2015085493A (ja) * 2013-11-01 2015-05-07 セイコーエプソン株式会社 ロボット、処理装置及び検査方法
JP2017062154A (ja) * 2015-09-24 2017-03-30 アイシン精機株式会社 欠陥検出装置及び欠陥検出方法
JP2018004310A (ja) * 2016-06-28 2018-01-11 キヤノン株式会社 情報処理装置、計測システム、情報処理方法及びプログラム
JP2018194542A (ja) * 2017-05-17 2018-12-06 オムロン株式会社 画像処理システム、画像処理装置および画像処理プログラム
JP2019002788A (ja) * 2017-06-15 2019-01-10 リョーエイ株式会社 金属加工面の検査方法、金属加工面の検査装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255279A (ja) * 2001-01-09 2001-09-21 Hitachi Ltd パターン欠陥検査方法およびその装置
JP2007240434A (ja) * 2006-03-10 2007-09-20 Omron Corp 表面状態の検査方法および表面状態検査装置
JP2007248241A (ja) * 2006-03-15 2007-09-27 Omron Corp 表面状態の検査方法および表面状態検査装置
JP2008292430A (ja) * 2007-05-28 2008-12-04 Panasonic Electric Works Co Ltd 外観検査方法および外観検査装置
WO2015008373A1 (ja) * 2013-07-19 2015-01-22 富士通株式会社 情報処理装置、検査範囲の計算方法、及びプログラム
JP2015085493A (ja) * 2013-11-01 2015-05-07 セイコーエプソン株式会社 ロボット、処理装置及び検査方法
JP2017062154A (ja) * 2015-09-24 2017-03-30 アイシン精機株式会社 欠陥検出装置及び欠陥検出方法
JP2018004310A (ja) * 2016-06-28 2018-01-11 キヤノン株式会社 情報処理装置、計測システム、情報処理方法及びプログラム
JP2018194542A (ja) * 2017-05-17 2018-12-06 オムロン株式会社 画像処理システム、画像処理装置および画像処理プログラム
JP2019002788A (ja) * 2017-06-15 2019-01-10 リョーエイ株式会社 金属加工面の検査方法、金属加工面の検査装置

Also Published As

Publication number Publication date
WO2021010181A1 (ja) 2021-01-21
JP7528939B2 (ja) 2024-08-06

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