JP7528939B2 - 検査装置、検査方法、位置決め方法、およびプログラム - Google Patents
検査装置、検査方法、位置決め方法、およびプログラム Download PDFInfo
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- JP7528939B2 JP7528939B2 JP2021532783A JP2021532783A JP7528939B2 JP 7528939 B2 JP7528939 B2 JP 7528939B2 JP 2021532783 A JP2021532783 A JP 2021532783A JP 2021532783 A JP2021532783 A JP 2021532783A JP 7528939 B2 JP7528939 B2 JP 7528939B2
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- inspection
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- 238000007689 inspection Methods 0.000 title claims description 384
- 238000000034 method Methods 0.000 title claims description 30
- 238000005259 measurement Methods 0.000 claims description 302
- 230000007547 defect Effects 0.000 claims description 103
- 238000004364 calculation method Methods 0.000 claims description 27
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- 238000013135 deep learning Methods 0.000 claims description 17
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- 238000003860 storage Methods 0.000 claims description 9
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- 230000008569 process Effects 0.000 description 13
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- 230000008859 change Effects 0.000 description 2
- 238000010219 correlation analysis Methods 0.000 description 2
- 239000003550 marker Substances 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
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- 230000010354 integration Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Human Computer Interaction (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019131635 | 2019-07-17 | ||
| JP2019131635 | 2019-07-17 | ||
| PCT/JP2020/026010 WO2021010181A1 (ja) | 2019-07-17 | 2020-07-02 | 検査装置、検査方法、位置決め方法、およびプログラム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021010181A1 JPWO2021010181A1 (https=) | 2021-01-21 |
| JPWO2021010181A5 JPWO2021010181A5 (https=) | 2024-02-07 |
| JP7528939B2 true JP7528939B2 (ja) | 2024-08-06 |
Family
ID=74210477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021532783A Active JP7528939B2 (ja) | 2019-07-17 | 2020-07-02 | 検査装置、検査方法、位置決め方法、およびプログラム |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7528939B2 (https=) |
| WO (1) | WO2021010181A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230241771A1 (en) * | 2022-02-02 | 2023-08-03 | Intrinsic Innovation Llc | Object placement |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023127021A1 (ja) * | 2021-12-27 | 2023-07-06 | 株式会社ニコン | 制御装置、制御システム、ロボットシステム、制御方法及びコンピュータプログラム |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001255279A (ja) | 2001-01-09 | 2001-09-21 | Hitachi Ltd | パターン欠陥検査方法およびその装置 |
| JP2007240434A (ja) | 2006-03-10 | 2007-09-20 | Omron Corp | 表面状態の検査方法および表面状態検査装置 |
| JP2007248241A (ja) | 2006-03-15 | 2007-09-27 | Omron Corp | 表面状態の検査方法および表面状態検査装置 |
| JP2008292430A (ja) | 2007-05-28 | 2008-12-04 | Panasonic Electric Works Co Ltd | 外観検査方法および外観検査装置 |
| WO2015008373A1 (ja) | 2013-07-19 | 2015-01-22 | 富士通株式会社 | 情報処理装置、検査範囲の計算方法、及びプログラム |
| JP2015085493A (ja) | 2013-11-01 | 2015-05-07 | セイコーエプソン株式会社 | ロボット、処理装置及び検査方法 |
| JP2017062154A (ja) | 2015-09-24 | 2017-03-30 | アイシン精機株式会社 | 欠陥検出装置及び欠陥検出方法 |
| JP2018004310A (ja) | 2016-06-28 | 2018-01-11 | キヤノン株式会社 | 情報処理装置、計測システム、情報処理方法及びプログラム |
| JP2018194542A (ja) | 2017-05-17 | 2018-12-06 | オムロン株式会社 | 画像処理システム、画像処理装置および画像処理プログラム |
| JP2019002788A (ja) | 2017-06-15 | 2019-01-10 | リョーエイ株式会社 | 金属加工面の検査方法、金属加工面の検査装置 |
-
2020
- 2020-07-02 JP JP2021532783A patent/JP7528939B2/ja active Active
- 2020-07-02 WO PCT/JP2020/026010 patent/WO2021010181A1/ja not_active Ceased
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001255279A (ja) | 2001-01-09 | 2001-09-21 | Hitachi Ltd | パターン欠陥検査方法およびその装置 |
| JP2007240434A (ja) | 2006-03-10 | 2007-09-20 | Omron Corp | 表面状態の検査方法および表面状態検査装置 |
| JP2007248241A (ja) | 2006-03-15 | 2007-09-27 | Omron Corp | 表面状態の検査方法および表面状態検査装置 |
| JP2008292430A (ja) | 2007-05-28 | 2008-12-04 | Panasonic Electric Works Co Ltd | 外観検査方法および外観検査装置 |
| WO2015008373A1 (ja) | 2013-07-19 | 2015-01-22 | 富士通株式会社 | 情報処理装置、検査範囲の計算方法、及びプログラム |
| JP2015085493A (ja) | 2013-11-01 | 2015-05-07 | セイコーエプソン株式会社 | ロボット、処理装置及び検査方法 |
| JP2017062154A (ja) | 2015-09-24 | 2017-03-30 | アイシン精機株式会社 | 欠陥検出装置及び欠陥検出方法 |
| JP2018004310A (ja) | 2016-06-28 | 2018-01-11 | キヤノン株式会社 | 情報処理装置、計測システム、情報処理方法及びプログラム |
| JP2018194542A (ja) | 2017-05-17 | 2018-12-06 | オムロン株式会社 | 画像処理システム、画像処理装置および画像処理プログラム |
| JP2019002788A (ja) | 2017-06-15 | 2019-01-10 | リョーエイ株式会社 | 金属加工面の検査方法、金属加工面の検査装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230241771A1 (en) * | 2022-02-02 | 2023-08-03 | Intrinsic Innovation Llc | Object placement |
| US12330304B2 (en) * | 2022-02-02 | 2025-06-17 | Intrinsic Innovation Llc | Object placement |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2021010181A1 (https=) | 2021-01-21 |
| WO2021010181A1 (ja) | 2021-01-21 |
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