JPWO2020249431A5

JPWO2020249431A5 -

Info

Publication number: JPWO2020249431A5
Application number: JP2021573398A
Authority: JP
Publication date: 2023-06-12

Claims

A rotor support configured to rotatably mount a rotor shaft in a vacuum pump, comprising:
a rolling bearing that rotatably supports the shaft;
an insert and at least one elastic damping member surrounding said rolling bearing;
with
The insert comprises inner and outer annular portions connected by a plurality of flexible members configured to flex in a radial plane and constrain movement in an axial plane. , thereby absorbing radial movement of said shaft,
the at least one elastic damping member is formed of an elastomeric material configured to flex both radially and axially;
the at least one elastic damping member configured to support the insert and arranged in series with the insert;
A rotor support, characterized by:

The at least one elastic damping member comprises:
at least one of said at least one elastic damping member is positioned between said inner annular portion of said insert and said rolling bearing;
said outer annular portion of said insert being disposed between at least one of said at least one elastic damping member and said rolling bearing;
arranged in series with the insert in at least one of
2. A rotor support according to claim 1 .

the insert is formed of a rigid material and the flexible member is axially longer than it is wide, thereby providing axial stiffness and radial flexibility;
2. A rotor support according to claim 1 .

the rigid material comprises a metal material or a plastic material;
4. A rotor support according to claim 3 .

i) each of said flexible members comprises an elongate arcuate member substantially concentric with said inner and outer annular portions; and/or
ii) said flexible member comprises a plurality of integral leaf springs that provide radial flexibility;
A rotor support according to any one of claims 1 to 4 .

said rolling bearing comprising an inner race, an outer race and a plurality of rolling elements arranged between said races, said outer race being joined to said insert;
A rotor support according to any one of claims 1 to 5 .

at least one of said at least one elastic damping member is arranged between said insert and said rolling bearing;
A rotor support according to any one of claims 1 to 5 .

the insert is positioned between the rolling bearing and at least one of the at least one elastic damping member;
A rotor support according to any one of claims 1 to 7 .

at least one elastic axial damping member formed of an elastomeric material mounted such that axial movement of said rolling bearing changes compression of said at least one elastic axial damping movement; further comprising a resilient axial damping member;
A rotor support according to any one of the preceding claims .

at least one of said at least one resilient axial damping member is attached to an outer surface of said rotor support extending in a radial plane;
10. A rotor support according to claim 9 with reference to claim 7 .

The insert includes an extension extending radially inwardly from an end of the inner annular member, the surface extending over the rolling bearing, and at least one of the at least one resilient axial member comprising: mounted between a surface of the rolling bearing facing the extension and a surface of the extension facing the rolling bearing;
10. A rotor support according to claim 9 with reference to claim 8 .

said at least one elastic damping member being more axially flexible than said elastic axial damping means;
A rotor support according to claim 9 or 10 .

said elastic axial damping member and said elastic damping member constitute a single member;
A rotor support according to any one of claims 9 to 11 .

the single member comprises an L-shaped member;
14. A rotor support according to claim 13 .

A vacuum pump comprising a rotor including a shaft rotatably mounted within a pump body on a rotor support,
A vacuum pump, wherein the rotor support comprises a rotor support according to any one of claims 1-14 .

i) said at least one elastic damping member or the outer one of said insert is joined to said pump body, or
ii) said at least one elastic damping member comprises at least one O-ring, said at least one O-ring mounted in at least one recess in said pump body;
16. Vacuum pump according to claim 15 .

wherein the vacuum pump comprises a turbomolecular pump;
17. Vacuum pump according to claim 15 or 16 .