US20130121858A1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- US20130121858A1 US20130121858A1 US13/625,882 US201213625882A US2013121858A1 US 20130121858 A1 US20130121858 A1 US 20130121858A1 US 201213625882 A US201213625882 A US 201213625882A US 2013121858 A1 US2013121858 A1 US 2013121858A1
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- US
- United States
- Prior art keywords
- elastic member
- outer race
- gap
- vacuum pump
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/059—Roller bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
- F16C27/066—Ball or roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
- F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
- F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/04—Ball or roller bearings, e.g. with resilient rolling bodies
- F16C27/045—Ball or roller bearings, e.g. with resilient rolling bodies with a fluid film, e.g. squeeze film damping
Definitions
- the present invention relates to a vacuum pump, wherein a permanent magnet and a ball bearing are used for a bearing.
- a bearing mechanism of a turbomolecular pump includes a structure using a ball bearing only, a structure using a ball bearing and a permanent magnet, and a magnetic bearing structure using an electromagnet only.
- a constitution as recorded in Japan Domestic Re-publication of PCT International Application Patent No. 2006-001243 is already known for a turbomolecular pump having the structure using a ball bearing and a permanent magnet.
- the rotation frequency of a turbomolecular pump is higher than the resonant frequency (secondary critical speed) of a rotator, so that it is necessary to pass through the resonant frequency (secondary critical speed) when a pump starts and stops.
- the rotator vibrates when passing through the resonant frequency, but in the case of a bearing using an electromagnet, the vibration of a rotary shaft can be actively controlled.
- the vibration cannot be actively controlled. Therefore, in the technology recorded in Japan Domestic Re-publication of PCT International Application Patent No. 2006-001243, a damper to reduce vibration is disposed on a portion where the ball bearing is disposed.
- the present invention provides a vacuum pump, in which a ball bearing is used for supporting a rotor formed with an exhaust function portion, and a motor is used to make the rotor rotate for vacuum exhaustion.
- the vacuum pump includes: a holding mechanism, clamping an outer race of the ball bearing in an axial direction and holding the outer race in a manner that the outer race can move along a radial direction; a housing, formed on a pump seat and accommodating the holding mechanism; and an elastic member, disposed in contact with or close to an outer circumferential side of the outer race.
- the elastic member is a ring-shaped elastic member disposed in the manner of surrounding an outer circumference of the outer race through a gap between the elastic member and the outer circumference of the outer race, and at least oil or grease is injected into the gap.
- the vacuum pump further includes: an outer circumferential side gap formed between an outer circumference of the elastic member and the housing; and oil or grease is injected into the circumferential side gap.
- the elastic member is a ring-shaped elastic member disposed in the manner of contacting with an axial centre of an outer circumferential surface of the outer race and arranged in the manner of forming a gap between the outer circumferential surface of the outer race and the housing, and at least oil or grease is injected into the gap.
- the elastic member is made of metal.
- the holding mechanism includes: a pair of pressure plates respectively arranged at two axial ends of the outer race; and an elastic support member disposed between each of the pair of pressure plates and the housing.
- a ball bearing is used to support a rotor, the structure is simple and the damping effect is improved.
- FIG. 1 is a schematic cross-sectional view of a turbomolecular pump according to an exemplary embodiment of the present invention.
- FIG. 2 is a partial enlarged view of the ball bearing 8 .
- FIG. 3 illustrates the first modified embodiment
- FIG. 4 illustrates the second modified embodiment.
- FIG. 5 illustrates the third modified embodiment.
- FIG. 6A illustrates the fourth modified embodiment.
- FIG. 6B illustrates a protruding portion of the metal elastic member of FIG. 6A .
- FIG. 1 illustrates a vacuum pump of an exemplary embodiment of the present invention, and is a schematic cross-sectional view of a turbomolecular pump.
- a rotary vane 30 and a cylindrical portion 31 used as an exhaust function portion are formed in a rotor 3 .
- a fixed vane 20 is disposed corresponding to the rotary vane 30 .
- a fixed cylinder (not shown in FIG. 1 ) used as a fixed side exhaust function portion is disposed corresponding to the cylindrical portion 31 .
- the rotor 3 is coupled to a shaft 1 , and the shaft 1 is driven to rotate by a motor 4 .
- the rotor 3 coupled to the shaft 1 is rotatably supported by using a magnetic bearing having permanent magnets 6 and 7 and a ball bearing 8 .
- a ball bearing 8 for example, an angular contact ball bearing is used.
- the cylindrical permanent magnet 6 is fixed on the rotor 3 .
- the permanent magnet 7 at a fixed side is held on a magnet seat 11 , and is arranged opposite to an inner circumferential side of the permanent magnet 6 .
- the magnet seat 11 is fixed on a flange plate portion of a pump casing 10 .
- a beam portion of the magnet seat 11 and a spacer ring 5 for positioning the fixed vane 20 are held in a manner of being held between the flange plate portion of the pump casing 10 and a seat 2 .
- a bearing seat 13 for holding a ball bearing 9 is fixed at a centre of the magnet seat 11 .
- the ball bearing 9 is disposed for restraining the vibration of an upper portion of the shaft 1 in a radial direction, and a gap is formed between an inner race of the ball bearing 9 and the shaft 1 .
- the size of the gap is set to be smaller than the size of the gap between the permanent magnet 6 and the permanent magnet 7 . Accordingly, in the case that the rotor 3 rotates and when it passes through the critical speed, the contact between the permanent magnet 6 and the permanent magnet 7 is avoided.
- FIG. 2 is a partial enlarged view of a ball bearing 8 disposed at a lower portion of the shaft 1 .
- the ball bearing 8 is installed on a shaft portion formed at a lower portion of the shaft 1 , and a nut 40 is used to fix an inner race 80 .
- an outer race 81 of the ball bearing 8 is fixed inside a concave portion 22 (called a housing 22 in the following) formed in the seat 2 .
- an outer race 81 is held by a pair of pressure plates 44 and 45 in an axial direction, and an elastic support member 42 is disposed between the housing 22 and the pressure plate 45 and between a housing cover 21 and the pressure plate 44 , respectively.
- the housing cover 21 is fixed on the seat 2 by using a screw.
- a metal member or rubber as elastic as a spring is used for the elastic support member 42 .
- a ring-shaped elastic support member 42 can be used, whereas a gap can be left for arranging multiple elastic support members 42 into a ring shape.
- the outer race 81 is elastically supported by the housing 22 through a holding mechanism 22 (the pressure plates 44 and 45 , the elastic support member 42 ), thereby realizing a structure capable of achieving radial vibration of the ball bearing 8 .
- a holding mechanism 22 the pressure plates 44 and 45 , the elastic support member 42
- the ball bearing 8 can be prevented from inclinations, and a sliding in the radial direction can be achieved.
- a ring-shaped elastic member 41 is disposed in the manner of contacting with an outer circumferential surface of the outer race 81 . Because the outer race 81 held by the pressure plates 44 and 45 is elastically supported by the elastic member 41 and the elastic support member 42 , a rotator vibrates along the radial direction when passing through the critical speed. In addition, through consuming a part of vibration energy during deformations of the elastic member 41 and the elastic support member 42 , the vibration is suppressed.
- the elastic member 41 and the elastic support member 42 used as damping members are directly accommodated inside the housing 22 formed in the seat 2 , so that the number of components can be reduced. Further, because the elastic support member 42 and the pressure plates 44 and 45 are used for axial support for the outer race 81 , compared with the aforementioned structures, the shaft does not incline easily.
- the elastic member 41 and the elastic support member 42 are disposed as a ring shape and also multiple elastic members can be arranged at a circumference centred on the axis of the ball bearing 8 .
- the elastic support member 42 is made of a material such as a rubber-based material, for example, an O-ring used as a sealing member can also be used.
- an O-ring used as a sealing member can also be used.
- the hardness of the O-ring is appropriately selected according to the weight of the rotator or a vibration condition.
- FIG. 4 illustrates the second modified embodiment.
- a gap 47 is formed between an elastic member 46 and an outer race.
- an inner diameter of an elastic member 49 is set to be the size of the gap 47 formed between the elastic member 49 and the outer race 81
- an outer diameter of the elastic member 49 is set between the elastic member 49 and a housing 22 in the manner of forming a gap 48 .
- Each gap is injected with oil.
- the size of the gap of an inner periphery and an outer periphery of the elastic member 49 is set to be about 0.1 mm to 0.2 mm in the same way as in the first variation, and the size of a gap in an axial direction of the elastic member 49 is set to be about 10 ⁇ m to 20 ⁇ m. Therefore, when passing through a critical speed, associated to the case of a shaft 1 vibrating along a radial direction, the elastic member 49 also vibrates along the radial direction, so that the oil injected into gaps 47 and 48 of the inner periphery and the outer periphery of the elastic member 49 exerts the function of an oil film damper. Compared with the case illustrated in FIG.
- the oil is injected into the gap in the implementation manner; however, grease can also be injected in place of oil instead.
- a vibration damping effect can be produced by using grease, and the vibration of a shaft 1 when passing through a critical speed is thereby suppressed.
- the present invention is not limited to a turbomolecular pump, but can also be applied to a vacuum pump having a same bearing structure, for example, a vacuum pump such as a drag pump.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Support Of The Bearing (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Rolling Contact Bearings (AREA)
Abstract
The present invention provides a vacuum pump capable of suppressing the structure from becoming complicated and improving the damping effect. The vacuum pump includes: a holding mechanism for clamping an outer race of the ball bearing in an axial direction and holding the outer race so that the outer race moves along a radial direction; and an elastic member disposed at an outer circumferential side of the outer race. The elastic member is disposed in contact with or close to the outer circumferential side of the outer race. Oil or grease is injected into a gap between the elastic member and the outer race. Through holding the outer race against the elastic member, the elastic member is deformed to suppress vibration. Furthermore, through injecting oil or grease into the gap, the damping effect can be further improved.
Description
- This application claims the priority benefit of Japan application serial no.
- 2011-249507, filed on Nov. 15, 2011. The entirety of the above-mentioned patent application is hereby incorporated by reference herein and made a part of this specification.
- 1. Field of the Invention
- The present invention relates to a vacuum pump, wherein a permanent magnet and a ball bearing are used for a bearing.
- 2. Description of Related Art
- A bearing mechanism of a turbomolecular pump includes a structure using a ball bearing only, a structure using a ball bearing and a permanent magnet, and a magnetic bearing structure using an electromagnet only. A constitution as recorded in Japan Domestic Re-publication of PCT International Application Patent No. 2006-001243 is already known for a turbomolecular pump having the structure using a ball bearing and a permanent magnet.
- Generally, the rotation frequency of a turbomolecular pump is higher than the resonant frequency (secondary critical speed) of a rotator, so that it is necessary to pass through the resonant frequency (secondary critical speed) when a pump starts and stops. The rotator vibrates when passing through the resonant frequency, but in the case of a bearing using an electromagnet, the vibration of a rotary shaft can be actively controlled. However, in the case of the structure using a permanent magnet and a ball bearing, the vibration cannot be actively controlled. Therefore, in the technology recorded in Japan Domestic Re-publication of PCT International Application Patent No. 2006-001243, a damper to reduce vibration is disposed on a portion where the ball bearing is disposed.
- However, in the case of a turbomolecular pump with the constitution of using a permanent magnet and a ball bearing to support the rotator, and when passing through the critical speed, the rotation of the rotator in the portion of the permanent magnet is relatively large. Therefore, according to Japan Domestic Re-publication of PCT International Application Patent No. 2006-001243, an O ring is used to support an axially central portion at the outer circumference of the bearing, the rotary shaft is easy to incline and the damping effect is easily worsened. In addition, according to the damper mechanism recorded in Japan Domestic Re-publication of PCT International Application Patent No. 2006-001243, a double-sleeve structure is disposed outside a ball bearing, and a gel is disposed between two sleeves which are separated by the O ring. However, the structure is complicated and a large number of components are used.
- The present invention provides a vacuum pump, in which a ball bearing is used for supporting a rotor formed with an exhaust function portion, and a motor is used to make the rotor rotate for vacuum exhaustion. The vacuum pump includes: a holding mechanism, clamping an outer race of the ball bearing in an axial direction and holding the outer race in a manner that the outer race can move along a radial direction; a housing, formed on a pump seat and accommodating the holding mechanism; and an elastic member, disposed in contact with or close to an outer circumferential side of the outer race.
- According to an exemplary embodiment of the present invention, the elastic member is a ring-shaped elastic member disposed in the manner of surrounding an outer circumference of the outer race through a gap between the elastic member and the outer circumference of the outer race, and at least oil or grease is injected into the gap.
- According to an exemplary embodiment of the present invention, the vacuum pump further includes: an outer circumferential side gap formed between an outer circumference of the elastic member and the housing; and oil or grease is injected into the circumferential side gap.
- According to an exemplary embodiment of the present invention, the elastic member is a ring-shaped elastic member disposed in the manner of contacting with an axial centre of an outer circumferential surface of the outer race and arranged in the manner of forming a gap between the outer circumferential surface of the outer race and the housing, and at least oil or grease is injected into the gap.
- According to an exemplary embodiment of the present invention, the elastic member is made of metal.
- According to an exemplary embodiment of the present invention, the holding mechanism includes: a pair of pressure plates respectively arranged at two axial ends of the outer race; and an elastic support member disposed between each of the pair of pressure plates and the housing.
- According to the present invention, in the vacuum pump of the embodiment, a ball bearing is used to support a rotor, the structure is simple and the damping effect is improved.
-
FIG. 1 is a schematic cross-sectional view of a turbomolecular pump according to an exemplary embodiment of the present invention. -
FIG. 2 is a partial enlarged view of the ball bearing 8. -
FIG. 3 illustrates the first modified embodiment. -
FIG. 4 illustrates the second modified embodiment. -
FIG. 5 illustrates the third modified embodiment. -
FIG. 6A illustrates the fourth modified embodiment. -
FIG. 6B illustrates a protruding portion of the metal elastic member ofFIG. 6A . - In the following, the exemplary embodiments of the present invention are illustrated with reference to the accompanying drawings.
FIG. 1 illustrates a vacuum pump of an exemplary embodiment of the present invention, and is a schematic cross-sectional view of a turbomolecular pump. Arotary vane 30 and acylindrical portion 31 used as an exhaust function portion are formed in arotor 3. A fixed vane 20 is disposed corresponding to therotary vane 30. In addition, a fixed cylinder (not shown inFIG. 1 ) used as a fixed side exhaust function portion is disposed corresponding to thecylindrical portion 31. - The
rotor 3 is coupled to ashaft 1, and theshaft 1 is driven to rotate by a motor 4. Therotor 3 coupled to theshaft 1 is rotatably supported by using a magnetic bearing havingpermanent magnets permanent magnet 6 is fixed on therotor 3. On the other hand, thepermanent magnet 7 at a fixed side is held on amagnet seat 11, and is arranged opposite to an inner circumferential side of thepermanent magnet 6. - The
magnet seat 11 is fixed on a flange plate portion of apump casing 10. In an example shown inFIG. 1 , a beam portion of themagnet seat 11 and aspacer ring 5 for positioning the fixed vane 20 are held in a manner of being held between the flange plate portion of thepump casing 10 and aseat 2. Abearing seat 13 for holding a ball bearing 9 is fixed at a centre of themagnet seat 11. - The ball bearing 9 is disposed for restraining the vibration of an upper portion of the
shaft 1 in a radial direction, and a gap is formed between an inner race of the ball bearing 9 and theshaft 1. The size of the gap is set to be smaller than the size of the gap between thepermanent magnet 6 and thepermanent magnet 7. Accordingly, in the case that therotor 3 rotates and when it passes through the critical speed, the contact between thepermanent magnet 6 and thepermanent magnet 7 is avoided. -
FIG. 2 is a partial enlarged view of a ball bearing 8 disposed at a lower portion of theshaft 1. The ball bearing 8 is installed on a shaft portion formed at a lower portion of theshaft 1, and anut 40 is used to fix aninner race 80. On the other hand, anouter race 81 of the ball bearing 8 is fixed inside a concave portion 22 (called ahousing 22 in the following) formed in theseat 2. - In the
housing 22, anouter race 81 is held by a pair ofpressure plates elastic support member 42 is disposed between thehousing 22 and thepressure plate 45 and between ahousing cover 21 and thepressure plate 44, respectively. Thehousing cover 21 is fixed on theseat 2 by using a screw. For theelastic support member 42, a metal member or rubber as elastic as a spring is used. In addition, as for the shape, a ring-shapedelastic support member 42 can be used, whereas a gap can be left for arranging multipleelastic support members 42 into a ring shape. - In this way, the
outer race 81 is elastically supported by thehousing 22 through a holding mechanism 22 (thepressure plates elastic support member 42, through arranging theelastic support member 42 into a flat shape in the axial direction, theball bearing 8 can be prevented from inclinations, and a sliding in the radial direction can be achieved. - In the
housing 22, a ring-shapedelastic member 41 is disposed in the manner of contacting with an outer circumferential surface of theouter race 81. Because theouter race 81 held by thepressure plates elastic member 41 and theelastic support member 42, a rotator vibrates along the radial direction when passing through the critical speed. In addition, through consuming a part of vibration energy during deformations of theelastic member 41 and theelastic support member 42, the vibration is suppressed. - In addition, it is set that the
elastic member 41 and theelastic support member 42 used as damping members are directly accommodated inside thehousing 22 formed in theseat 2, so that the number of components can be reduced. Further, because theelastic support member 42 and thepressure plates outer race 81, compared with the aforementioned structures, the shaft does not incline easily. - In addition, in the example, the
elastic member 41 and theelastic support member 42 are disposed as a ring shape and also multiple elastic members can be arranged at a circumference centred on the axis of theball bearing 8. Theelastic support member 42 is made of a material such as a rubber-based material, for example, an O-ring used as a sealing member can also be used. For example, in the case that an O-ring is used, the hardness of the O-ring is appropriately selected according to the weight of the rotator or a vibration condition. -
FIG. 3 illustrates the first modified embodiment. In addition, same reference numerals are given to the part of same constituting elements shown inFIG. 2 , and in the following, the different parts are illustrated in the following. In the modified embodiment, as shown inFIG. 2 , anelastic member 41 is formed in a manner of constantly contacting with anouter race 81 of aball bearing 8. On the other hand, in the first modified embodiment shown inFIG. 3 , aslight gap 47 is formed between anelastic member 46 and theouter race 81, and thegap 47 is injected with oil which exerts the function of an oil film damper. In this case, oil should at least be injected into thegap 47, but oil can also be injected into the gap at an upper portion of theelastic member 46. - If a
shaft 1 vibrates along a radial direction when passing through a critical speed, the oil injected into thegap 47 exerts the function of a damper, so that a damping effect can be improved. The size of thegap 47 is about 0.1 mm to 0.2 mm. In the case of large vibration as that when passing through the critical speed, theouter race 81 contacts with theelastic member 46 and causes a deformation of theelastic member 46, so that theelastic member 46 also exerts the function of a damper. -
FIG. 4 illustrates the second modified embodiment. In the first modified embodiment shown inFIG. 3 , agap 47 is formed between anelastic member 46 and an outer race. However, in the modified embodiment shown inFIG. 4 , an inner diameter of anelastic member 49 is set to be the size of thegap 47 formed between theelastic member 49 and theouter race 81, and an outer diameter of theelastic member 49 is set between theelastic member 49 and ahousing 22 in the manner of forming agap 48. Each gap is injected with oil. - The size of the gap of an inner periphery and an outer periphery of the
elastic member 49 is set to be about 0.1 mm to 0.2 mm in the same way as in the first variation, and the size of a gap in an axial direction of theelastic member 49 is set to be about 10 μm to 20 μm. Therefore, when passing through a critical speed, associated to the case of ashaft 1 vibrating along a radial direction, theelastic member 49 also vibrates along the radial direction, so that the oil injected intogaps elastic member 49 exerts the function of an oil film damper. Compared with the case illustrated inFIG. 3 , the damping effect is improved to a degree of forming thegap 48. In addition, when vibration amplitude of theshaft 1 is relatively large, not only theelastic member 49 vibrates, but also theouter race 81 contacts against theelastic member 49 and causes a deformation. -
FIG. 5 illustrates the third modified embodiment. In the third modified embodiment, a ring-shapedelastic member 50 is disposed in a manner of contacting with approximately an axial centre of anouter race 81 of aball bearing 8. Agap 51 is formed at two axial ends of theelastic member 50, and thegap 51 is injected with oil which exerts the function of an oil film damper. In this case, theelastic member 50 and the oil of thegap 51 exert the function of a damper at the same time. In addition, although theelastic member 50 is arranged at the axial centre of theouter race 81 of theball bearing 8 in the same manner as in the structure recorded in Japan Domestic Re-publication of PCT International Application Patent No. 2006-001243, the oil injected into thegap 51 exerts the function of the damper, so that the bearing can be prevented from inclinations. -
FIG. 6 illustrates the fourth modified embodiment. InFIG. 2 toFIG. 5 , anelastic member 41 such as an O-ring is disposed on the outer circumferential side of thebearing 8, but a material of the elastic member is not limited to a rubber material or elastic resin, which, for example, can also be a metal.FIG. 6A refers to an example of a metalelastic member 52, which is formed into a ring shape from a metal corrugated board. A ring-shaped member denoted by chain double-dashed lines is a member denoted by overlapping theelastic member 41 inFIG. 2 and the metalelastic member 52. - In the case of a large pump, the weight of a rotator also increases, so that in the case that vibration becomes large, the amount of deformation becomes excessively large when using the elastic member made of a rubber material. Therefore, the metal
elastic member 52 is preferably used. In addition, inFIG. 6A , an example in which the metalelastic member 52 is used in place of theelastic member 41 is taken for illustration.Elastic members FIG. 3 toFIG. 5 can also be replaced, and the metal elastic member of the shape shown inFIG. 6A andFIG. 6B is used. - In the case that the metal elastic member is used in place of the
elastic members housing 22 and an outer circumferential surface of anouter race 81 contact with the metalelastic member 52, but through injecting oil into a wavy gap, and the oil can exert the function of an oil film damper. The metal elastic members have various structures. For example, as shown inFIG. 6B , multiple protrudingportions 53 a can be formed around an outer circumferential surface of a ring-shapedplate 53. - In addition, the oil is injected into the gap in the implementation manner; however, grease can also be injected in place of oil instead. A vibration damping effect can be produced by using grease, and the vibration of a
shaft 1 when passing through a critical speed is thereby suppressed. In addition, the present invention is not limited to a turbomolecular pump, but can also be applied to a vacuum pump having a same bearing structure, for example, a vacuum pump such as a drag pump. - Each embodiment can be used alone respectively, or can also be used in combination. Because the effects of the implementation manners can be carried out separately or in combination. In addition, as long as the features of the present invention are not affected, the present invention is not limited by the implementation manners.
Claims (6)
1. A vacuum pump using a ball bearing for supporting a rotor formed with an exhaust function portion and using a motor to make the rotor rotate for vacuum exhaustion, comprising:
a holding mechanism, clamping an outer race of the ball bearing in an axial direction and holding the outer race in a manner that the outer race is adapted to moves along a radial direction;
a housing, formed on a pump seat and accommodating the holding mechanism; and
an elastic member, located in the housing and disposed in contact with or close to an outer circumferential side of the outer race.
2. The vacuum pump according to claim 1 , wherein
the elastic member is a ring-shaped elastic member disposed in a manner of surrounding an outer circumference of the outer race through a gap; and
at least oil or grease is injected into the gap.
3. The vacuum pump according to claim 2 , wherein
an outer circumferential side gap is formed between the outer circumference of the elastic member and the housing; and
the oil or the grease is injected into the outer circumferential side gap.
4. The vacuum pump according to claim 1 , wherein
the elastic member is a ring-shaped elastic member disposed in a manner of contacting with an axial centre of an outer circumferential surface of the outer race and arranged in a manner of forming a gap between the outer circumferential surface of the outer race and the housing; and
at least oil or grease is injected into the gap.
5. The vacuum pump according to claim 1 , wherein:
the elastic member is made of metal.
6. The vacuum pump according to claim 1 , wherein
the holding mechanism includes:
a pair of pressure plates, respectively disposed at two axial ends of the outer race; and
an elastic support member, disposed between each of the pair of pressure plates and the housing.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2011-249507 | 2011-11-15 | ||
JP2011249507A JP5919745B2 (en) | 2011-11-15 | 2011-11-15 | Vacuum pump |
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US20130121858A1 true US20130121858A1 (en) | 2013-05-16 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US13/625,882 Abandoned US20130121858A1 (en) | 2011-11-15 | 2012-09-25 | Vacuum pump |
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US (1) | US20130121858A1 (en) |
JP (1) | JP5919745B2 (en) |
CN (1) | CN103104539B (en) |
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US20150211507A1 (en) * | 2012-09-04 | 2015-07-30 | Panasonic Intellectual Property Management Co., Ltd. | Sealed compressor |
WO2015136022A1 (en) * | 2014-03-12 | 2015-09-17 | BSH Hausgeräte GmbH | Vacuum cleaner fan |
US20160069391A1 (en) * | 2014-09-10 | 2016-03-10 | Shimadzu Corporation | Vacuum pump |
EP3106675A1 (en) * | 2015-06-17 | 2016-12-21 | Pfeiffer Vacuum GmbH | Vacuum pump |
US20170110930A1 (en) * | 2015-10-16 | 2017-04-20 | Shimadzu Corporation | Magnet bearing device and rotor rotary-drive apparatus |
CN107429607A (en) * | 2015-04-15 | 2017-12-01 | 三菱重工业株式会社 | Turbocharger |
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US11300130B2 (en) | 2017-06-20 | 2022-04-12 | Dyson Technology Limited | Electric machine |
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JP2015108434A (en) * | 2013-10-25 | 2015-06-11 | エドワーズ株式会社 | Protection bearing, bearing device and vacuum pump |
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US20150211507A1 (en) * | 2012-09-04 | 2015-07-30 | Panasonic Intellectual Property Management Co., Ltd. | Sealed compressor |
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US11480182B2 (en) * | 2018-08-08 | 2022-10-25 | Edwards Japan Limited | Vacuum pump, cylindrical portion used in vacuum pump, and base portion |
EP3690267A1 (en) * | 2019-02-01 | 2020-08-05 | United Technologies Corporation | Bearing centering spring and damper |
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CN113924418A (en) * | 2019-06-10 | 2022-01-11 | 爱德华兹有限公司 | Rotor support and vacuum pump having such a rotor support |
Also Published As
Publication number | Publication date |
---|---|
CN103104539B (en) | 2015-11-25 |
JP5919745B2 (en) | 2016-05-18 |
CN103104539A (en) | 2013-05-15 |
JP2013104370A (en) | 2013-05-30 |
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