JPWO2020246449A5

JPWO2020246449A5 -

Info

Publication number: JPWO2020246449A5
Application number: JP2021524846A
Authority: JP
Filing date: 2020-06-02
Publication date: 2022-09-09
Anticipated expiration: 2040-06-02

Claims

A film forming apparatus for forming a film on a work,
a chamber capable of being evacuated inside;
a transfer unit provided in the chamber and having a rotary table that circulates and transfers the workpiece along a circumferential transfer path;
a target made of a material that forms the film; and a plasma generator that converts the sputtering gas introduced between the target and the rotary table into plasma. a film forming processing unit that forms a film;
A cylindrical body projecting into the inner space of the chamber and opening toward the transfer path, a window member provided to close the opening of the cylindrical body, and between the rotary table and the cylindrical body. A first process gas introduction part for introducing a first process gas into a processing space to be formed, an antenna for generating an electric field in the processing space through the window member, and a power source for applying a high frequency voltage to the antenna. a film processing unit that converts the first process gas into plasma to generate inductively coupled plasma in the processing space and chemically react the film;
a cylindrical electrode having an opening at one end and attached to the chamber so that the opening faces the transfer path; and a second process gas introducing section for introducing a second process gas into the cylindrical electrode. and a power supply for applying a high-frequency voltage to the cylindrical electrode, and an ion irradiation unit for irradiating the film with ions generated by turning the second process gas into plasma;
with
The conveying unit circulates and conveys the work so as to pass through the film formation processing unit, the film processing unit, and the ion irradiation unit,
The ion irradiation unit irradiates the film in the process of being formed on the workpiece with ions;
A film forming apparatus characterized by:

The transport unit transports the work so that it passes through the ion irradiation unit after passing through the film processing unit;
The film forming apparatus according to claim 1, characterized by:

The conveying unit conveys the work so that it passes through the film processing unit after passing through the ion irradiation unit;
The film forming apparatus according to claim 1, characterized by:

The transport unit is configured to allow the circulatory transport in two directions,
The film processing section and the ion irradiation section are provided adjacent to each other;
4. The film forming apparatus according to claim 2 or 3, characterized by:

wherein the first process gas comprises oxygen or nitrogen;
The film forming apparatus according to any one of claims 1 to 4, characterized by:

comprising a plurality of the film formation processing units,
The plurality of film forming processing units are formed by alternately stacking the films having different compositions on the workpiece;
6. The film forming apparatus according to any one of claims 1 to 5, characterized by:

said second process gas comprising argon;
The film forming apparatus according to any one of claims 1 to 6, characterized by:

the second process gas comprises oxygen or nitrogen, or argon and oxygen or nitrogen;
The film forming apparatus according to any one of claims 1 to 6, characterized by:

The rotary table circulates and conveys the workpieces by rotating around a rotation axis,
9. The film forming apparatus according to claim 1, wherein the rotary shaft and the surface of the rotary table on which the work is placed are perpendicular to each other.