JPWO2020214197A5 - - Google Patents
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- JPWO2020214197A5 JPWO2020214197A5 JP2021562130A JP2021562130A JPWO2020214197A5 JP WO2020214197 A5 JPWO2020214197 A5 JP WO2020214197A5 JP 2021562130 A JP2021562130 A JP 2021562130A JP 2021562130 A JP2021562130 A JP 2021562130A JP WO2020214197 A5 JPWO2020214197 A5 JP WO2020214197A5
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- filament
- grid
- positive voltage
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 150000002500 ions Chemical class 0.000 claims description 99
- 230000001133 acceleration Effects 0.000 claims description 79
- 230000001629 suppression Effects 0.000 claims description 50
- 239000007789 gas Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 30
- 238000006243 chemical reaction Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 24
- 229910052739 hydrogen Inorganic materials 0.000 claims description 15
- 239000001257 hydrogen Substances 0.000 claims description 15
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 12
- 229910052721 tungsten Inorganic materials 0.000 claims description 12
- 239000010937 tungsten Substances 0.000 claims description 12
- 229910001080 W alloy Inorganic materials 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 230000004927 fusion Effects 0.000 claims description 5
- 239000011819 refractory material Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- 150000001768 cations Chemical class 0.000 claims description 3
- 230000000452 restraining effect Effects 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 230000005764 inhibitory process Effects 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 238000003860 storage Methods 0.000 description 10
- 238000012545 processing Methods 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000002679 ablation Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000004590 computer program Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000010893 electron trap Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000000644 propagated effect Effects 0.000 description 3
- 230000003134 recirculating effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052805 deuterium Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052722 tritium Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QKYBEKAEVQPNIN-UHFFFAOYSA-N barium(2+);oxido(oxo)alumane Chemical compound [Ba+2].[O-][Al]=O.[O-][Al]=O QKYBEKAEVQPNIN-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 230000005492 condensed matter physics Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- -1 hydrogen ions Chemical class 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000002601 radiography Methods 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024188189A JP7756223B2 (ja) | 2019-04-19 | 2024-10-25 | イオン源および中性子発生装置 |
| JP2025167902A JP2025188116A (ja) | 2019-04-19 | 2025-10-06 | イオン源および中性子発生装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962836481P | 2019-04-19 | 2019-04-19 | |
| US62/836,481 | 2019-04-19 | ||
| PCT/US2019/050060 WO2020214197A1 (en) | 2019-04-19 | 2019-09-06 | Ion source and neutron generator |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024188189A Division JP7756223B2 (ja) | 2019-04-19 | 2024-10-25 | イオン源および中性子発生装置 |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022529986A JP2022529986A (ja) | 2022-06-27 |
| JP2022529986A5 JP2022529986A5 (https=) | 2024-01-24 |
| JPWO2020214197A5 true JPWO2020214197A5 (https=) | 2024-01-24 |
| JP7579270B2 JP7579270B2 (ja) | 2024-11-07 |
Family
ID=72836988
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021562130A Active JP7579270B2 (ja) | 2019-04-19 | 2019-09-06 | イオン源および中性子発生装置 |
| JP2024188189A Active JP7756223B2 (ja) | 2019-04-19 | 2024-10-25 | イオン源および中性子発生装置 |
| JP2025167902A Pending JP2025188116A (ja) | 2019-04-19 | 2025-10-06 | イオン源および中性子発生装置 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024188189A Active JP7756223B2 (ja) | 2019-04-19 | 2024-10-25 | イオン源および中性子発生装置 |
| JP2025167902A Pending JP2025188116A (ja) | 2019-04-19 | 2025-10-06 | イオン源および中性子発生装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US12342447B2 (https=) |
| EP (1) | EP3956918A4 (https=) |
| JP (3) | JP7579270B2 (https=) |
| KR (2) | KR102784434B1 (https=) |
| CN (2) | CN120126983A (https=) |
| AU (2) | AU2019441368B2 (https=) |
| CA (1) | CA3137275A1 (https=) |
| WO (1) | WO2020214197A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4260360A4 (en) * | 2020-12-08 | 2024-05-22 | SHINE Technologies, LLC | ISOTHERMAL ION SOURCE WITH AUXILIARY HEATING ELEMENTS |
| CN117836899A (zh) * | 2021-08-13 | 2024-04-05 | 阳光技术有限责任公司 | 用于如离子和同位素生产等高真空应用的磁旋转装置 |
| KR20240090158A (ko) | 2021-10-01 | 2024-06-21 | 샤인 테크놀로지스 엘엘씨 | 이온 수집을 위한 섬유질 격자를 갖는 이온 생성 시스템 |
| CN117042276A (zh) * | 2023-07-26 | 2023-11-10 | 中国工程物理研究院流体物理研究所 | 一种高引出效率的离子源结构及密封中子管结构 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2689918A (en) | 1952-04-26 | 1954-09-21 | Well Surveys Inc | Static atmosphere ion accelerator for well logging |
| GB778656A (en) | 1954-03-08 | 1957-07-10 | Schlumberger Well Surv Corp | Neutron well logging apparatus |
| US3084256A (en) | 1957-09-03 | 1963-04-02 | Lab For Electronics Inc | Neutron generator |
| US3588593A (en) * | 1969-03-27 | 1971-06-28 | Atomic Energy Commission | Method of operating an ion-getter vacuum pump with gun and grid structure arranged for optimum ionization and sublimation |
| US3761708A (en) | 1971-10-08 | 1973-09-25 | Us Interior | Electron suppressor grid for a mass spectrometer |
| US4155825A (en) | 1977-05-02 | 1979-05-22 | Fournier Paul R | Integrated sputtering apparatus and method |
| US4267007A (en) | 1979-03-19 | 1981-05-12 | Kellogg Charles W | Winding apparatus for the manufacture of filament-wound, reinforced resinous products |
| JPS6252843A (ja) * | 1985-08-30 | 1987-03-07 | Hitachi Ltd | イオン流調整装置 |
| JPH02204941A (ja) * | 1989-02-03 | 1990-08-14 | Japan Steel Works Ltd:The | イオン発生装置 |
| US5262652A (en) | 1991-05-14 | 1993-11-16 | Applied Materials, Inc. | Ion implantation apparatus having increased source lifetime |
| JP3239427B2 (ja) * | 1992-03-27 | 2001-12-17 | 株式会社島津製作所 | イオン散乱分光装置 |
| US5856674A (en) | 1997-09-16 | 1999-01-05 | Eaton Corporation | Filament for ion implanter plasma shower |
| US6551471B1 (en) | 1999-11-30 | 2003-04-22 | Canon Kabushiki Kaisha | Ionization film-forming method and apparatus |
| US6907097B2 (en) | 2001-03-16 | 2005-06-14 | The Regents Of The University Of California | Cylindrical neutron generator |
| GB2386747A (en) | 2001-11-08 | 2003-09-24 | Ionoptika Ltd | Fullerene ion gun |
| JP4078084B2 (ja) * | 2002-01-28 | 2008-04-23 | キヤノン株式会社 | イオン化成膜方法及び装置 |
| JP2004362901A (ja) * | 2003-06-04 | 2004-12-24 | Sharp Corp | イオンドーピング装置、イオンドーピング方法および半導体装置 |
| JP2006266854A (ja) | 2005-03-23 | 2006-10-05 | Shinku Jikkenshitsu:Kk | 全圧測定電極付き四重極質量分析計及びこれを用いる真空装置 |
| JP2008152941A (ja) | 2006-12-14 | 2008-07-03 | Jeol Ltd | イオン発生装置 |
-
2019
- 2019-09-06 CN CN202510276823.5A patent/CN120126983A/zh active Pending
- 2019-09-06 KR KR1020217037260A patent/KR102784434B1/ko active Active
- 2019-09-06 CN CN201980096485.XA patent/CN113841216B/zh active Active
- 2019-09-06 JP JP2021562130A patent/JP7579270B2/ja active Active
- 2019-09-06 EP EP19925456.6A patent/EP3956918A4/en active Pending
- 2019-09-06 WO PCT/US2019/050060 patent/WO2020214197A1/en not_active Ceased
- 2019-09-06 AU AU2019441368A patent/AU2019441368B2/en active Active
- 2019-09-06 KR KR1020257008670A patent/KR20250046332A/ko active Pending
- 2019-09-06 US US17/604,634 patent/US12342447B2/en active Active
- 2019-09-06 CA CA3137275A patent/CA3137275A1/en active Pending
-
2024
- 2024-10-25 JP JP2024188189A patent/JP7756223B2/ja active Active
-
2025
- 2025-05-30 US US19/223,545 patent/US20250294664A1/en active Pending
- 2025-10-06 JP JP2025167902A patent/JP2025188116A/ja active Pending
- 2025-11-26 AU AU2025271362A patent/AU2025271362A1/en active Pending
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