JPWO2020195385A1 - - Google Patents

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Publication number
JPWO2020195385A1
JPWO2020195385A1 JP2021508793A JP2021508793A JPWO2020195385A1 JP WO2020195385 A1 JPWO2020195385 A1 JP WO2020195385A1 JP 2021508793 A JP2021508793 A JP 2021508793A JP 2021508793 A JP2021508793 A JP 2021508793A JP WO2020195385 A1 JPWO2020195385 A1 JP WO2020195385A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2021508793A
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JP7237146B2 (ja
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Publication of JPWO2020195385A1 publication Critical patent/JPWO2020195385A1/ja
Application granted granted Critical
Publication of JP7237146B2 publication Critical patent/JP7237146B2/ja
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2021508793A 2019-03-28 2020-02-19 マイクロミラーデバイスおよびマイクロミラーデバイスの駆動方法 Active JP7237146B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019063659 2019-03-28
JP2019063659 2019-03-28
PCT/JP2020/006638 WO2020195385A1 (ja) 2019-03-28 2020-02-19 マイクロミラーデバイスおよびマイクロミラーデバイスの駆動方法

Publications (2)

Publication Number Publication Date
JPWO2020195385A1 true JPWO2020195385A1 (ja) 2020-10-01
JP7237146B2 JP7237146B2 (ja) 2023-03-10

Family

ID=72608678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021508793A Active JP7237146B2 (ja) 2019-03-28 2020-02-19 マイクロミラーデバイスおよびマイクロミラーデバイスの駆動方法

Country Status (5)

Country Link
US (1) US20210405350A1 (ja)
EP (1) EP3950572A4 (ja)
JP (1) JP7237146B2 (ja)
CN (1) CN113574007A (ja)
WO (1) WO2020195385A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3872556A4 (en) 2018-10-25 2021-12-08 FUJIFILM Corporation MICROMIRROR DEVICE AND METHOD FOR DRIVING THE MICROMIRROR DEVICE
WO2020218586A1 (ja) * 2019-04-26 2020-10-29 富士フイルム株式会社 マイクロミラーデバイス
CN114105081A (zh) * 2020-08-27 2022-03-01 中光电智能感测股份有限公司 微型扫描面镜
EP4202529A1 (en) * 2021-12-22 2023-06-28 Silicon Austria Labs GmbH Optical deflector and method operating an optical deflector
JP2023144664A (ja) * 2022-03-28 2023-10-11 富士フイルム株式会社 光走査装置、光走査装置の駆動方法、及び測距装置
WO2024122127A1 (ja) * 2022-12-05 2024-06-13 パナソニックＩｐマネジメント株式会社 音叉型駆動素子および光偏向素子

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007312465A (ja) * 2006-05-16 2007-11-29 Omron Corp 駆動装置、光走査型装置及び物体情報検知装置
JP2008020701A (ja) * 2006-07-13 2008-01-31 Stanley Electric Co Ltd ２次元光スキャナ、それを用いた光学装置および２次元光スキャナの製造方法
JP2009192781A (ja) * 2008-02-14 2009-08-27 Panasonic Corp 光学反射素子
WO2010021216A1 (ja) * 2008-08-22 2010-02-25 コニカミノルタオプト株式会社 駆動装置
US20100296147A1 (en) * 2008-01-31 2010-11-25 Jirou Terada Optical reflection element
JP2015022065A (ja) * 2013-07-17 2015-02-02 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
JP2015022064A (ja) * 2013-07-17 2015-02-02 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
US20160211439A1 (en) * 2015-01-16 2016-07-21 The Regents Of The University Of Michigan Multi-Axis Piezoelectric Transducer
JP2017010005A (ja) * 2015-06-22 2017-01-12 株式会社リコー 光偏向装置、画像形成装置、画像表示装置、物体装置、及び光偏向装置の調整方法
WO2018179589A1 (ja) * 2017-03-30 2018-10-04 三菱電機株式会社 光走査装置およびその製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5151065B2 (ja) 2006-05-19 2013-02-27 コニカミノルタホールディングス株式会社 光スキャナ及び走査型プロジェクタ
US7864390B2 (en) * 2007-05-28 2011-01-04 Konica Minolta Opto, Inc. Image display apparatus
JP2009222841A (ja) * 2008-03-14 2009-10-01 Panasonic Corp 光学反射素子
JP5345102B2 (ja) * 2010-04-19 2013-11-20 日本信号株式会社 光走査装置及びその製造方法
JP2012182951A (ja) * 2011-03-02 2012-09-20 Ngk Insulators Ltd 圧電アクチュエータ及び圧電アクチュエータアレイ
JP2013003522A (ja) * 2011-06-21 2013-01-07 Konica Minolta Advanced Layers Inc 光走査装置の製造方法および性能調整方法
JP5343142B2 (ja) * 2012-02-22 2013-11-13 京セラドキュメントソリューションズ株式会社 光走査装置及び画像形成装置
JP6092713B2 (ja) * 2013-05-28 2017-03-08 スタンレー電気株式会社 光偏向器
JP6308700B2 (ja) * 2014-09-30 2018-04-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
JP6789704B2 (ja) * 2016-07-20 2020-11-25 スタンレー電気株式会社 光走査装置
DE102016216925A1 (de) 2016-09-07 2018-03-08 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zum zweidimensionalen Ablenken von Licht
JP6808506B2 (ja) * 2017-01-25 2021-01-06 スタンレー電気株式会社 光走査装置
JP2019063659A (ja) 2019-02-05 2019-04-25 株式会社三洋物産 遊技機
WO2020218586A1 (ja) * 2019-04-26 2020-10-29 富士フイルム株式会社 マイクロミラーデバイス

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007312465A (ja) * 2006-05-16 2007-11-29 Omron Corp 駆動装置、光走査型装置及び物体情報検知装置
JP2008020701A (ja) * 2006-07-13 2008-01-31 Stanley Electric Co Ltd ２次元光スキャナ、それを用いた光学装置および２次元光スキャナの製造方法
US20100296147A1 (en) * 2008-01-31 2010-11-25 Jirou Terada Optical reflection element
JP2009192781A (ja) * 2008-02-14 2009-08-27 Panasonic Corp 光学反射素子
WO2010021216A1 (ja) * 2008-08-22 2010-02-25 コニカミノルタオプト株式会社 駆動装置
JP2015022065A (ja) * 2013-07-17 2015-02-02 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
JP2015022064A (ja) * 2013-07-17 2015-02-02 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
US20160211439A1 (en) * 2015-01-16 2016-07-21 The Regents Of The University Of Michigan Multi-Axis Piezoelectric Transducer
JP2017010005A (ja) * 2015-06-22 2017-01-12 株式会社リコー 光偏向装置、画像形成装置、画像表示装置、物体装置、及び光偏向装置の調整方法
WO2018179589A1 (ja) * 2017-03-30 2018-10-04 三菱電機株式会社 光走査装置およびその製造方法

Also Published As

Publication number Publication date
EP3950572A1 (en) 2022-02-09
CN113574007A (zh) 2021-10-29
WO2020195385A1 (ja) 2020-10-01
EP3950572A4 (en) 2022-05-18
US20210405350A1 (en) 2021-12-30
JP7237146B2 (ja) 2023-03-10

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